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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

  • Phone+358408203522
20022019

Research output per year

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Research Output

2019

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2489-2492 4 p. 8925544

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2018

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Institute of Electrical and Electronic Engineers, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Laterally acoustically coupled BAW filters at 3.6 GHz

Pensala, T., Makkonen, T., Dekker, J. R. & Ylilammi, M., 2018, 2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2017

Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

Pensala, T., 2017.

Research output: Contribution to conferenceConference articleScientificpeer-review

PiezoMEMS at VTT: R&D and manufacturing services

Dekker, J. & Pensala, T., 2017. 42 p.

Research output: Contribution to conferenceConference articleProfessional

2016

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
2015

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. IEEE Institute of Electrical and Electronic Engineers, p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2014
39 Citations (Scopus)

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. IEEE Institute of Electrical and Electronic Engineers, 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2013

A miniature timing microsystem using two silicon resonators

Ruffieux, D., Baborowski, J., Scolari, N., Le, T. C., Jaakkola, A., Pensala, T., Dekker, J., Manier, C. A., Zoschke, K. & Oppermann, H., 2013, 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC). IEEE Institute of Electrical and Electronic Engineers, p. 750-753

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2013, In : Sensors and Actuators A: Physical. 190, p. 127-135 9 p.

Research output: Contribution to journalArticleScientificpeer-review

51 Citations (Scopus)

Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2013, Conference Proceeding: Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013. IEEE Institute of Electrical and Electronic Engineers, p. 421-424

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Interface dissipation in piezoelectric MEMS resonators: An experimental and numerical investigation

Frangi, A., Cemonesi, M., Jaakkola, A. & Pensala, T., 2013, Proceedings of the IEEE SENSORS 2013. IEEE Institute of Electrical and Electronic Engineers, 4 p. 6688410

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2012

Bulk acoustic wave propagation characteristics in degenerately n-doped Si

Pensala, T., Prunnila, M. & Jaakkola, A., 2012, Proceedings : International Frequency Control Symposium, IFCS 2012. IEEE Institute of Electrical and Electronic Engineers, p. 442-445

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Measurement of evanescent wave properties of a bulk acoustic wave resonator: Letters

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 3, p. 557-559 3 p.

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

On the optimization of piezoelectrically actuated MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2012, Proceedings: International Ultrasonics Symposium, IUS 2012. IEEE Institute of Electrical and Electronic Engineers, p. 1043-1046

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)

On the role of interface dissipation in MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2012, Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, p. 6601-6607

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access

Parametric study of laterally acoustically coupled bulk acoustic wave filters

Meltaus, J., Pensala, T. & Kokkonen, K., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 12, p. 2742-2751 9 p.

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)

Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M. & Pensala, T., 2012, Proceedings IFCS 2012: International Frequency Control Symposium . IEEE Institute of Electrical and Electronic Engineers, p. 77-81

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

14 Citations (Scopus)
2011

Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kokkonen, K., Pensala, T. & Kaivola, M., 2011, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 58, 1, p. 215-225 11 p.

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Measurement of dispersion properties of active and surrounding regions in BAW resonator

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2011, Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. IEEE Institute of Electrical and Electronic Engineers, p. 308-311

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Temperature compensation of silicon MEMS Resonators by Heavy Doping

Pensala, T., Jaakkola, A., Prunnila, M. & Dekker, J. R., 2011, 2011 IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, p. 1952-1955 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

42 Citations (Scopus)
Open Access
2010

2-D modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters

Pensala, T., Meltaus, J., Kokkonen, K. & Ylilammi, M., 2010, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 57, 11, p. 2537-2549 13 p.

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Characterization of energy trapping in a bulk acoustic wave resonator

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2010, In : Applied Physics Letters. 97, 23, 233507.

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Direct measurement of spurious mode properties in thin film BAW resonator

Kokkonen, K., Pensala, T., Meltaus, J. & Kaivola, M., 2010, Proceedings of the IEEE Ultrasonics Symposium, IUS 2010. IEEE Institute of Electrical and Electronic Engineers, p. 420-423

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

Jaakkola, A., Lamy, J., Dekker, J. & Pensala, T., 2010, 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, p. 410-414

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)

Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

Kokkonen, K., Pensala, T., Meltaus, J. & Kaivola, M., 2010, In : Applied Physics Letters. 96, 17, 173502.

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Laterally coupled BAW filters with 5% bandwidth

Meltaus, J. & Pensala, T., 2010, Proceedings : IEEE Ultrasonics Symposium, IUS 2010. IEEE Institute of Electrical and Electronic Engineers, p. 966-969

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)
2009

Experimental Investigation of Acoustic Substrate Losses in 1850-MHz Thin Film BAW Resonators

Pensala, T., Thalhammer, R., Dekker, J. & Kaitila, J., 2009, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 56, 11, p. 2544-2552 9 p.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

Riekkinen, T., Nurmela, A., Molarius, J., Pensala, T., Kostamo, P., Ylilammi, M. & van Dijken, S., 2009, In : Thin Solid Films. 517, 24, p. 6588-6592 5 p.

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Laterally coupled solidly mounted BAW resonators at 1.9 GHz

Meltaus, J., Pensala, T., Kokkonen, K. & Jansman, A., 2009, IEEE International Ultrasonics Symposium. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, p. 847-850

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)
17 Citations (Scopus)
2008

An eigenmode superposition model for lateral acoustic coupling between thin film BAW resonators

Pensala, T., Meltaus, J. & Ylilammi, M., 2008, Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, p. 1540-1543

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)

Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Meltaus, J., Kokkonen, K. & Pensala, T., 2008, Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers, p. 1544-1547

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)

Piezoelectrically transduced single-crystal-silicon plate resonators

Jaakkola, A., Rosenberg, P., Asmala, S., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T., Alastalo, A., Holmgren, O. & Kokkonen, K., 2008, Proceedings - IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, p. 717-720 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

29 Citations (Scopus)
2007

Aluminum nitride for thin film bulk acoustic wave resonators

Nurmela, A., Riekkinen, T., Pensala, T., Molarius, J. & Ylilammi, M., 2007.

Research output: Contribution to conferenceConference articleScientific

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

Jansman, A. B. M., Strijbos, R. C., Lobeek, J. W., Vanhelmont, FW. M., Ruigrok, J. J. M., Pensala, T. & Ylilammi, M., 2007, Proceedings: IEEE Ultrasonics Symposium, 2007. p. 1045-1048

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Pensala, T., Ylilammi, M., Johanna, M. & Kokkonen, K., 2007, Proceedings : IEEE Ultrasonics Symposium, IUS 2007. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, p. 1661-1664

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)

Influence of the seed layer on the crystalline structure and piezoelectric properties of sputter-deposited AlN-films

Riekkinen, T., Molarius, J., Kostamo, P., Pensala, T. & Nurmela, A., 2007.

Research output: Contribution to conferenceConference articleScientific

New Filter Technologies - Development of Bulk Acoustic Wave Resonators and Filters

Molarius, J., Nurmela, A., Pensala, T. & Ylilammi, M., 2007, Communications Technologies: VTT's Research Programme 2002-2006: Final Report. Sipilä, M. (ed.). Espoo: VTT Technical Research Centre of Finland, p. 237-243 (VTT Publications; No. 629).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Open Access

Piezotransduced single-crystal silicon BAW resonators

Jaakkola, A., Rosenberg, P., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T. & Alastalo, A., 2007, Proceedings - IEEE Ultrasonics Symposium. p. 1653-1656 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

16 Citations (Scopus)
2006

4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator

Kokkonen, K. & Pensala, T., 2006, 2006 IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

8 Citations (Scopus)
2005

Low noise 0.9 GHz FBAR clock

Åberg, M., Ylimaula, M., Ylilammi, M., Pensala, T. & Rantala, A., 2005, 2005 NORCHIP. IEEE Institute of Electrical and Electronic Engineers, p. 257-260

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Pensala, T., Ylilammi, M. & Makkonen, T., 2005, 2005 IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, p. 1844-1847

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

ZnO for thin film BAW devices

Molarius, J., Pensala, T., Nurmela, A., Ylilammi, M. & Dommann, A., 2005, Proceedings of the IEEE Ultrasonics Symposium 2005. IEEE Institute of Electrical and Electronic Engineers, p. 1816-1819

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2004

Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

Makkonen, T., Pensala, T., Vartiainen, J., Knuuttila, J. V., Kaitila, J. & Salomaa, M. M., 2004, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 51, 1, p. 42 - 51 10 p.

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)