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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

20032021
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Research Output 2003 2019

2019

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 2489-2492 4 p. 8925544

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
flow measurement
air flow
transducers
ultrasonics

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers , p. 12-16 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Encapsulation
MEMS
Mirrors
Copper
Temperature

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 2592-2595 4 p. 8925964

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
wafers
scandium
thin films
actuation

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
field of view
mirrors
frequency scanning
aluminum nitrides
2018
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients

Laterally acoustically coupled BAW filters at 3.6 GHz

Pensala, T., Makkonen, T., Dekker, J. R. & Ylilammi, M., 2018, 2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers , p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Aluminum nitride
Insertion losses
Bandwidth
2017

Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

Pensala, T., 2017.

Research output: Contribution to conferenceConference articleScientificpeer-review

PiezoMEMS at VTT: R&D and manufacturing services

Dekker, J. & Pensala, T., 2017. 42 p.

Research output: Contribution to conferenceConference articleProfessional

silicon
manufacturing
sensor
substrate
cost
2016
6 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants
2015

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. IEEE Institute of Electrical and Electronic Engineers , p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
temperature compensation
silicon
microelectromechanical systems
temperature
2014
33 Citations (Scopus)
Elastic constants
microelectromechanical systems
MEMS
Resonators
elastic properties

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. IEEE Institute of Electrical and Electronic Engineers , 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Q factors
resonators
silicon
phosphorus
forks
2013
2 Citations (Scopus)

A miniature timing microsystem using two silicon resonators

Ruffieux, D., Baborowski, J., Scolari, N., Le, T. C., Jaakkola, A., Pensala, T., Dekker, J., Manier, C. A., Zoschke, K. & Oppermann, H., 2013, 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC). IEEE Institute of Electrical and Electronic Engineers , p. 750-753

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Microsystems
Clocks
Resonators
Silicon
Jitter
49 Citations (Scopus)

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2013, In : Sensors and Actuators A: Physical. 190, p. 127-135 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Anchors
microelectromechanical systems
MEMS
Resonators
dissipation
2 Citations (Scopus)

Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2013, Conference Proceeding: Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013. IEEE Institute of Electrical and Electronic Engineers , p. 421-424

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

elastic properties
silicon
coefficients
arsenic
microelectromechanical systems

Interface dissipation in piezoelectric MEMS resonators: An experimental and numerical investigation

Frangi, A., Cemonesi, M., Jaakkola, A. & Pensala, T., 2013, Proceedings of the IEEE SENSORS 2013. IEEE Institute of Electrical and Electronic Engineers , 4 p. 6688410

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
dissipation
resonators
actuation
coupled modes
2012

Bulk acoustic wave propagation characteristics in degenerately n-doped Si

Pensala, T., Prunnila, M. & Jaakkola, A., 2012, Proceedings : International Frequency Control Symposium, IFCS 2012. IEEE Institute of Electrical and Electronic Engineers , p. 442-445

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

wave propagation
acoustics
temperature
shear
coefficients
6 Citations (Scopus)

Measurement of evanescent wave properties of a bulk acoustic wave resonator: Letters

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 3, p. 557-559 3 p.

Research output: Contribution to journalArticleScientificpeer-review

evanescent waves
Resonators
resonators
Acoustic waves
acoustics
4 Citations (Scopus)

On the optimization of piezoelectrically actuated MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2012, Proceedings: International Ultrasonics Symposium, IUS 2012. IEEE Institute of Electrical and Electronic Engineers , p. 1043-1046

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

MEMS
Numerical analysis
Resonators

On the role of interface dissipation in MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2012, Proceedings: 6th European Congress on Computational Methods in Applied Sciences and Engineering, ECCOMAS 2012. Vienna University of Technology, p. 6601-6607

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
microelectromechanical systems
dissipation
resonators
vibration mode
predictions
16 Citations (Scopus)

Parametric study of laterally acoustically coupled bulk acoustic wave filters

Meltaus, J., Pensala, T. & Kokkonen, K., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 12, p. 2742-2751 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Wave filters
Resonators
resonators
Acoustic waves
filters
14 Citations (Scopus)

Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M. & Pensala, T., 2012, Proceedings IFCS 2012: International Frequency Control Symposium . IEEE Institute of Electrical and Electronic Engineers , p. 77-81

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
resonators
silicon
temperature
sensitivity analysis
2011
9 Citations (Scopus)

Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kokkonen, K., Pensala, T. & Kaivola, M., 2011, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 58, 1, p. 215-225 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
Mirrors
resonators
Acoustic waves
mirrors

Measurement of dispersion properties of active and surrounding regions in BAW resonator

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2011, Proceedings: IEEE International Ultrasonics Symposium, IUS 2011. IEEE Institute of Electrical and Electronic Engineers , p. 308-311

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
diagrams
acoustics
leakage
wave dispersion
39 Citations (Scopus)

Temperature compensation of silicon MEMS Resonators by Heavy Doping

Pensala, T., Jaakkola, A., Prunnila, M. & Dekker, J. R., 2011, 2011 IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers , p. 1952-1955 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

temperature compensation
microelectromechanical systems
resonators
silicon
coefficients
Open Access
bulk acoustic wave devices
optimization
resonators
acoustics
reflectors
2010
9 Citations (Scopus)

2-D modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters

Pensala, T., Meltaus, J., Kokkonen, K. & Ylilammi, M., 2010, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 57, 11, p. 2537-2549 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
resonators
Acoustic waves
filters
Thin films
8 Citations (Scopus)

Characterization of energy trapping in a bulk acoustic wave resonator

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2010, In : Applied Physics Letters. 97, 23, 233507.

Research output: Contribution to journalArticleScientificpeer-review

resonators
trapping
acoustics
energy
leakage

Direct measurement of spurious mode properties in thin film BAW resonator

Kokkonen, K., Pensala, T., Meltaus, J. & Kaivola, M., 2010, Proceedings of the IEEE Ultrasonics Symposium, IUS 2010. IEEE Institute of Electrical and Electronic Engineers , p. 420-423

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
thin films
diagrams
acoustics
multimode resonators
6 Citations (Scopus)

Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

Jaakkola, A., Lamy, J., Dekker, J. & Pensala, T., 2010, 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 410-414

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
resonators
indication
wafers
low frequencies
11 Citations (Scopus)

Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

Kokkonen, K., Pensala, T., Meltaus, J. & Kaivola, M., 2010, In : Applied Physics Letters. 96, 17, 173502.

Research output: Contribution to journalArticleScientificpeer-review

resonators
acoustics
thin films
multimode resonators
curves
4 Citations (Scopus)

Laterally coupled BAW filters with 5% bandwidth

Meltaus, J. & Pensala, T., 2010, Proceedings : IEEE Ultrasonics Symposium, IUS 2010. IEEE Institute of Electrical and Electronic Engineers , p. 966-969

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2009
10 Citations (Scopus)

Experimental Investigation of Acoustic Substrate Losses in 1850-MHz Thin Film BAW Resonators

Pensala, T., Thalhammer, R., Dekker, J. & Kaitila, J., 2009, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 56, 11, p. 2544-2552 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
Acoustics
resonators
Thin films
acoustics
7 Citations (Scopus)

Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

Riekkinen, T., Nurmela, A., Molarius, J., Pensala, T., Kostamo, P., Ylilammi, M. & van Dijken, S., 2009, In : Thin Solid Films. 517, 24, p. 6588-6592 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Acoustic properties
acoustic properties
Seed
seeds
Resonators
8 Citations (Scopus)

Laterally coupled solidly mounted BAW resonators at 1.9 GHz

Meltaus, J., Pensala, T., Kokkonen, K. & Jansman, A., 2009, IEEE International Ultrasonics Symposium. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 847-850

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

15 Citations (Scopus)
Resonators
resonators
retarding
Acoustic waves
Thin films
2008
6 Citations (Scopus)

An eigenmode superposition model for lateral acoustic coupling between thin film BAW resonators

Pensala, T., Meltaus, J. & Ylilammi, M., 2008, Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 1540-1543

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

acoustic coupling
resonators
thin films
wave dispersion
electric potential
9 Citations (Scopus)

Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Meltaus, J., Kokkonen, K. & Pensala, T., 2008, Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers , p. 1544-1547

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
frequency response
acoustics
ellipses
computer programs
29 Citations (Scopus)

Piezoelectrically transduced single-crystal-silicon plate resonators

Jaakkola, A., Rosenberg, P., Asmala, S., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T., Alastalo, A., Holmgren, O. & Kokkonen, K., 2008, Proceedings - IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers , p. 717-720 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2007

Aluminum nitride for thin film bulk acoustic wave resonators

Nurmela, A., Riekkinen, T., Pensala, T., Molarius, J. & Ylilammi, M., 2007.

Research output: Contribution to conferenceConference articleScientific

aluminum nitrides
bulk acoustic wave devices
resonators
filters
acoustics
3 Citations (Scopus)

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

Jansman, A. B. M., Strijbos, R. C., Lobeek, J. W., Vanhelmont, FW. M., Ruigrok, J. J. M., Pensala, T. & Ylilammi, M., 2007, Proceedings: IEEE Ultrasonics Symposium, 2007. p. 1045-1048

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
membranes
acoustics
profiles
electrical measurement
4 Citations (Scopus)

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Pensala, T., Ylilammi, M., Johanna, M. & Kokkonen, K., 2007, Proceedings : IEEE Ultrasonics Symposium, IUS 2007. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 1661-1664

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

coupling coefficients
resonators
vibration
coefficients
thin films

New Filter Technologies - Development of Bulk Acoustic Wave Resonators and Filters

Molarius, J., Nurmela, A., Pensala, T. & Ylilammi, M., 2007, Communications Technologies: VTT's Research Programme 2002-2006: Final Report. Sipilä, M. (ed.). Espoo: VTT Technical Research Centre of Finland, p. 237-243 (VTT Publications; No. 629).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Open Access
16 Citations (Scopus)

Piezotransduced single-crystal silicon BAW resonators

Jaakkola, A., Rosenberg, P., Nurmela, A., Pensala, T., Riekkinen, T., Dekker, J., Mattila, T. & Alastalo, A., 2007, Proceedings - IEEE Ultrasonics Symposium. p. 1653-1656 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
single crystals
silicon
Q factors
aluminum nitrides
2004
23 Citations (Scopus)

Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

Makkonen, T., Pensala, T., Vartiainen, J., Knuuttila, J. V., Kaitila, J. & Salomaa, M. M., 2004, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 51, 1, p. 42 - 51 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
estimating
resonators
Acoustic waves
Thin films
2 Citations (Scopus)

New approach to improve the piezoelectric quality of ZnO resonator by chemomechanical polishing

Molarius, J., Kulawski, M., Pensala, T. & Ylilammi, M., 2004, The Nano-Micro Interface: Bridging the Micro and Nano Worlds. Fetch, H-J. & Werner, M. (eds.). Weinheim, p. 181-193

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

Polishing
Resonators
Acoustic waves
Thin films
Acoustic surface wave filters
2003
46 Citations (Scopus)

Piezoelectric ZnO films by r.f. sputtering

Molarius, J., Kaitila, J., Pensala, T. & Ylilammi, M., 2003, In : Journal of Materials Science: Materials in Electronics. 14, 5-7, p. 431-435 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Sputtering
sputtering
Zinc Oxide
piezoelectricity
Piezoelectricity