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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

20032021
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Research Output 2003 2019

Filter
Chapter or book article
2007

New Filter Technologies - Development of Bulk Acoustic Wave Resonators and Filters

Molarius, J., Nurmela, A., Pensala, T. & Ylilammi, M., 2007, Communications Technologies: VTT's Research Programme 2002-2006: Final Report. Sipilä, M. (ed.). Espoo: VTT Technical Research Centre of Finland, p. 237-243 (VTT Publications; No. 629).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Open Access
2004
2 Citations (Scopus)

New approach to improve the piezoelectric quality of ZnO resonator by chemomechanical polishing

Molarius, J., Kulawski, M., Pensala, T. & Ylilammi, M., 2004, The Nano-Micro Interface: Bridging the Micro and Nano Worlds. Fetch, H-J. & Werner, M. (eds.). Weinheim, p. 181-193

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

Polishing
Resonators
Acoustic waves
Thin films
Acoustic surface wave filters