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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

20032021
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Research Output 2003 2019

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Conference article
2017

Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

Pensala, T., 2017.

Research output: Contribution to conferenceConference articleScientificpeer-review

PiezoMEMS at VTT: R&D and manufacturing services

Dekker, J. & Pensala, T., 2017. 42 p.

Research output: Contribution to conferenceConference articleProfessional

silicon
manufacturing
sensor
substrate
cost
2007

Aluminum nitride for thin film bulk acoustic wave resonators

Nurmela, A., Riekkinen, T., Pensala, T., Molarius, J. & Ylilammi, M., 2007.

Research output: Contribution to conferenceConference articleScientific

aluminum nitrides
bulk acoustic wave devices
resonators
filters
acoustics