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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

  • Phone+358408203522
20022019

Research output per year

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Research Output

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Article
2016

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
2014
39 Citations (Scopus)
2013

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2013, In : Sensors and Actuators A: Physical. 190, p. 127-135 9 p.

Research output: Contribution to journalArticleScientificpeer-review

51 Citations (Scopus)
2012

Measurement of evanescent wave properties of a bulk acoustic wave resonator: Letters

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 3, p. 557-559 3 p.

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Parametric study of laterally acoustically coupled bulk acoustic wave filters

Meltaus, J., Pensala, T. & Kokkonen, K., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 12, p. 2742-2751 9 p.

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)
2011

Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kokkonen, K., Pensala, T. & Kaivola, M., 2011, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 58, 1, p. 215-225 11 p.

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
2010

2-D modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters

Pensala, T., Meltaus, J., Kokkonen, K. & Ylilammi, M., 2010, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 57, 11, p. 2537-2549 13 p.

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Characterization of energy trapping in a bulk acoustic wave resonator

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2010, In : Applied Physics Letters. 97, 23, 233507.

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

Kokkonen, K., Pensala, T., Meltaus, J. & Kaivola, M., 2010, In : Applied Physics Letters. 96, 17, 173502.

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
2009

Experimental Investigation of Acoustic Substrate Losses in 1850-MHz Thin Film BAW Resonators

Pensala, T., Thalhammer, R., Dekker, J. & Kaitila, J., 2009, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 56, 11, p. 2544-2552 9 p.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

Riekkinen, T., Nurmela, A., Molarius, J., Pensala, T., Kostamo, P., Ylilammi, M. & van Dijken, S., 2009, In : Thin Solid Films. 517, 24, p. 6588-6592 5 p.

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
17 Citations (Scopus)
2004

Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

Makkonen, T., Pensala, T., Vartiainen, J., Knuuttila, J. V., Kaitila, J. & Salomaa, M. M., 2004, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 51, 1, p. 42 - 51 10 p.

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)
2003

Piezoelectric ZnO films by r.f. sputtering

Molarius, J., Kaitila, J., Pensala, T. & Ylilammi, M., 2003, In : Journal of Materials Science: Materials in Electronics. 14, 5-7, p. 431-435 5 p.

Research output: Contribution to journalArticleScientificpeer-review

47 Citations (Scopus)