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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

20032021
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Research Output 2003 2019

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Article
2016
6 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants
2014
33 Citations (Scopus)
Elastic constants
microelectromechanical systems
MEMS
Resonators
elastic properties
2013
49 Citations (Scopus)

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Frangi, A., Cremonesi, M., Jaakkola, A. & Pensala, T., 2013, In : Sensors and Actuators A: Physical. 190, p. 127-135 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Anchors
microelectromechanical systems
MEMS
Resonators
dissipation
2012
6 Citations (Scopus)

Measurement of evanescent wave properties of a bulk acoustic wave resonator: Letters

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 3, p. 557-559 3 p.

Research output: Contribution to journalArticleScientificpeer-review

evanescent waves
Resonators
resonators
Acoustic waves
acoustics
16 Citations (Scopus)

Parametric study of laterally acoustically coupled bulk acoustic wave filters

Meltaus, J., Pensala, T. & Kokkonen, K., 2012, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 59, 12, p. 2742-2751 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Wave filters
Resonators
resonators
Acoustic waves
filters
2011
9 Citations (Scopus)

Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

Kokkonen, K., Pensala, T. & Kaivola, M., 2011, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 58, 1, p. 215-225 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
Mirrors
resonators
Acoustic waves
mirrors
2010
9 Citations (Scopus)

2-D modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters

Pensala, T., Meltaus, J., Kokkonen, K. & Ylilammi, M., 2010, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 57, 11, p. 2537-2549 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
resonators
Acoustic waves
filters
Thin films
8 Citations (Scopus)

Characterization of energy trapping in a bulk acoustic wave resonator

Kokkonen, K., Meltaus, J., Pensala, T. & Kaivola, M., 2010, In : Applied Physics Letters. 97, 23, 233507.

Research output: Contribution to journalArticleScientificpeer-review

resonators
trapping
acoustics
energy
leakage
11 Citations (Scopus)

Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

Kokkonen, K., Pensala, T., Meltaus, J. & Kaivola, M., 2010, In : Applied Physics Letters. 96, 17, 173502.

Research output: Contribution to journalArticleScientificpeer-review

resonators
acoustics
thin films
multimode resonators
curves
2009
10 Citations (Scopus)

Experimental Investigation of Acoustic Substrate Losses in 1850-MHz Thin Film BAW Resonators

Pensala, T., Thalhammer, R., Dekker, J. & Kaitila, J., 2009, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 56, 11, p. 2544-2552 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
Acoustics
resonators
Thin films
acoustics
7 Citations (Scopus)

Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AlN resonators

Riekkinen, T., Nurmela, A., Molarius, J., Pensala, T., Kostamo, P., Ylilammi, M. & van Dijken, S., 2009, In : Thin Solid Films. 517, 24, p. 6588-6592 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Acoustic properties
acoustic properties
Seed
seeds
Resonators
15 Citations (Scopus)
Resonators
resonators
retarding
Acoustic waves
Thin films
2004
23 Citations (Scopus)

Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

Makkonen, T., Pensala, T., Vartiainen, J., Knuuttila, J. V., Kaitila, J. & Salomaa, M. M., 2004, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 51, 1, p. 42 - 51 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Resonators
estimating
resonators
Acoustic waves
Thin films
2003
46 Citations (Scopus)

Piezoelectric ZnO films by r.f. sputtering

Molarius, J., Kaitila, J., Pensala, T. & Ylilammi, M., 2003, In : Journal of Materials Science: Materials in Electronics. 14, 5-7, p. 431-435 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Sputtering
sputtering
Zinc Oxide
piezoelectricity
Piezoelectricity