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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

  • Phone+358408203522

Research output per year

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Supervised Work


Xenon difluoride etching of sacrificial layers for fabrication of microelectromechanical devices

Vähänissi, J., Feb 2019, Espoo: Aalto University. 61 p.

Research output: ThesisMaster's thesisTheses

Open Access
Open Access