No photo of Tuomas Pensala

Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

  • Phone+358408203522
20022020

Research output per year

If you made any changes in Pure these will be visible here soon.

Supervised Work

2019

Xenon difluoride etching of sacrificial layers for fabrication of microelectromechanical devices

Vähänissi, J., Feb 2019, Espoo: Aalto University. 61 p.

Research output: ThesisMaster's thesisTheses

Open Access
2015
Open Access