Research output per year
Research output per year
Search results
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2024
Artificial neural network assisted spectral scatterometry for grating quality control
Mattila, A., Nysten, J., Heikkinen, V., Kilpi, J., Korpelainen, V., Hansen, P.-E., Karvinen, P., Kuittinen, M. & Lassila, A., 31 May 2024, In: Measurement Science and Technology. 35, 8, 085025.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile1 Citation (Scopus)37 Downloads (Pure) -
2022
A comparison of traceable spatial angle autocollimator calibrations performed by PTB and VTT MIKES
Geckeler, R. D., Schumann, M., Just, A., Krause, M., Lassila, A. & Heikkinen, V., Apr 2022, In: Metrologia. 59, 2, 024002.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access7 Citations (Scopus) -
2021
Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level
Arezki, Y., Su, R., Heikkinen, V., Leprete, F., Posta, P., Bitou, Y., Schober, C., Mehdi-Souzani, C., Alzahrani, B. A. M., Zhang, X., Kondo, Y., Pruss, C., Ledl, V., Anwer, N., Bouazizi, M. L., Leach, R. & Nouira, H., 5 Feb 2021, In: Sensors. 21, 4, p. 1-19 19 p., 1103.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile3 Citations (Scopus)175 Downloads (Pure) -
2020
Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty
Heikkinen, V., Nysten, J., Byman, V., Hemming, B. & Lassila, A., 21 Dec 2020, In: Surface Topography: Metrology and Properties. 8, 4, 12 p., 045030.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile4 Citations (Scopus)80 Downloads (Pure) -
Step height standards based on self-assembly for 3D metrology of biological samples
Heikkinen, V., Kassamakov, I., Viitala, T., Järvinen, M., Vainikka, T., Nolvi, A., Bermúdez, C., Artigas, R., Martinez, P., Korpelainen, V., Lassila, A. & Hæggström, E., Sept 2020, In: Measurement Science and Technology. 31, 9, 094008.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access4 Citations (Scopus) -
2017
Interferometric 2D small angle generator for autocollimator calibration
Heikkinen, V., Byman, V., Palosuo, I., Hemming, B. & Lassila, A., 2017, In: Metrologia. 54, 3, p. 253-261Research output: Contribution to journal › Article › Scientific › peer-review
Open Access27 Citations (Scopus) -
Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer
Kassamakov, I., Tureanu, A., Heikkinen, V. & Hæggström, E., 20 Mar 2017, In: Applied Optics. 56, 9, p. 2483-2488Research output: Contribution to journal › Article › Scientific › peer-review
2 Citations (Scopus) -
2015
Traceable methods for vertical scale characterization of dynamic stroboscopic scanning white-light interferometer measurements
Heikkinen, V., Kassamakov, I., Seppä, J., Paulin, T., Nolvi, A., Lassila, A. & Hæggström, E., 2015, In: Applied Optics. 54, 35, p. 10397-10403Research output: Contribution to journal › Article › Scientific › peer-review
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2013
Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard
Seppä, J., Kassamakov, I., Heikkinen, V., Nolvi, A., Paulin, T., Lassila, A. & Haeggström, E., 1 Dec 2013, In: Optical Engineering. 52, 12, 124104.Research output: Contribution to journal › Article › Scientific › peer-review
7 Citations (Scopus)