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Virpi Korpelainen

PhD

 https://orcid.org/0000-0001-9123-8521
  • Phone+358504105504
20032019

Research output per year

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Personal profile

Education/Academic qualification

Physical sciences, Doctorate

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Research Output

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

PillarHall LHAR structure for thin film conformality measurements

Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

PillarHall LHAR structure for Thin Film Conformality Measurements

Utriainen, M., Korpelainen, V., Ylivaara, O., Gao, F., Ylilammi, M. & Puurunen, R. L., 13 May 2018, p. 16.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Open Access

    • Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

    Ylivaara, O., Korpelainen, V., Ylilammi, M. & Puurunen, R. L., 29 Jul 2018, p. 51.

    Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

    Open Access

    • Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities

    Seppä, J., Reischl, B., Sairanen, H., Korpelainen, V., Husu, H., Heinonen, M., Raiteri, P., Rohl, A. L., Nordlund, K. & Lassila, A., 2017, In : Measurement Science and Technology. 28, 3, 10 p., 034004.

    Research output: Contribution to journal › Article › Scientific › peer-review

    • 2 Citations (Scopus)

    Activities

    • 1 Oral presentation

    Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

    Oili M.E. Ylivaara (Speaker), , Virpi Korpelainen (Speaker), , Markku Ylilammi (Speaker), & Riikka L. Puurunen (Speaker)

    31 Jul 2018

    Activity: Talk or presentation types › Oral presentation