Research output per year
Research output per year
Personal profile
Education/Academic qualification
Physical sciences, Doctorate
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Dive into the research topics where Virpi Korpelainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research output
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Conformality in Aluminum Oxide ALD Process Analyzed using 3rd Generation Silicon Based Lateral High Aspect Ratio Test Structures
Yim, J., Ylivaara, O. M. E., Ylilammi, M., Korpelainen, V., Haimi, E., Verkama, E., Utriainen, M. & Puurunen, R. L., Jun 2020.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
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Saturation profile based conformality analysis for atomic layer deposition: Aluminum oxide in lateral high-aspect-ratio channels
Yim, J., Ylivaara, O. M. E., Ylilammi, M., Korpelainen, V., Haimi, E., Verkama, E., Utriainen, M. & Puurunen, R. L., 2020, In: Physical Chemistry Chemical Physics. 22, 40, p. 23107-23120 14 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
Step height standards based on self-assembly for 3D metrology of biological samples
Heikkinen, V., Kassamakov, I., Viitala, T., Järvinen, M., Vainikka, T., Nolvi, A., Bermúdez, C., Artigas, R., Martinez, P., Korpelainen, V., Lassila, A. & Hæggström, E., Sep 2020, In: Measurement Science and Technology. 31, 9, 094008.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates
Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
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PillarHall LHAR structure for thin film conformality measurements
Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
Activities
- 1 Conference presentation
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Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker) & Riikka L. Puurunen (Speaker)
31 Jul 2018Activity: Talk or presentation types › Conference presentation