Research Output per year
Personal profile
Education/Academic qualification
Physical sciences, Doctorate
Fingerprint Dive into the research topics where Virpi Korpelainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 7 Similar Profiles
Microscopes
Engineering & Materials Science
Atomic Force Microscope
Mathematics
microscopes
Physics & Astronomy
Calibration
Engineering & Materials Science
Traceability
Mathematics
Interferometers
Engineering & Materials Science
Gratings
Mathematics
Lasers
Engineering & Materials Science
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 2004 2018
PillarHall LHAR structure for thin film conformality measurements
Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
PillarHall LHAR structure for Thin Film Conformality Measurements
Utriainen, M., Korpelainen, V., Ylivaara, O., Gao, F., Ylilammi, M. & Puurunen, R. L., 13 May 2018, p. 16.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
Open Access
Aspect ratio
Thin films
Silicon
Atomic layer deposition
MEMS
Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Ylivaara, O., Korpelainen, V., Ylilammi, M. & Puurunen, R. L., 29 Jul 2018, p. 51.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
Open Access
Reliability analysis
Aspect ratio
Thin films
Silicon
Atomic layer deposition
2
Citations
(Scopus)
Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities
Seppä, J., Reischl, B., Sairanen, H., Korpelainen, V., Husu, H., Heinonen, M., Raiteri, P., Rohl, A. L., Nordlund, K. & Lassila, A., 2017, In : Measurement Science and Technology. 28, 3, 10 p., 034004.Research output: Contribution to journal › Article › Scientific › peer-review
Atomic Force Microscope
Humidity
Adhesion
Molecular Dynamics Simulation
Molecular dynamics
4
Citations
(Scopus)
DNA origami structures as calibration standards for nanometrology
Korpelainen, V., Linko, V., Seppä, J., Lassila, A. & Kostiainen, M. A., 2017, In : Measurement Science and Technology. 28, 3, 6 p., 034001.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
Nanometrology
tiles
Tile
Calibration
DNA
Activities 2018 2018
- 1 Oral presentation
Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)31 Jul 2018
Activity: Talk or presentation types › Oral presentation