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Virpi Korpelainen

20032019
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Personal profile

Education/Academic qualification

Physical sciences, Doctorate

Fingerprint Dive into the research topics where Virpi Korpelainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 3 Similar Profiles
Microscopes Engineering & Materials Science
microscopes Physics & Astronomy
Calibration Engineering & Materials Science
Atomic Force Microscope Mathematics
metrology Physics & Astronomy
Traceability Mathematics
Interferometers Engineering & Materials Science
Lasers Engineering & Materials Science

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Research Output 2003 2019

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

PillarHall LHAR structure for thin film conformality measurements

Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

PillarHall LHAR structure for Thin Film Conformality Measurements

Utriainen, M., Korpelainen, V., Ylivaara, O., Gao, F., Ylilammi, M. & Puurunen, R. L., 13 May 2018, p. 16.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Open Access
Aspect ratio
Thin films
Silicon
Atomic layer deposition
MEMS

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Ylivaara, O., Korpelainen, V., Ylilammi, M. & Puurunen, R. L., 29 Jul 2018, p. 51.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Open Access
Reliability analysis
Aspect ratio
Thin films
Silicon
Atomic layer deposition
2 Citations (Scopus)

Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities

Seppä, J., Reischl, B., Sairanen, H., Korpelainen, V., Husu, H., Heinonen, M., Raiteri, P., Rohl, A. L., Nordlund, K. & Lassila, A., 2017, In : Measurement Science and Technology. 28, 3, 10 p., 034004.

Research output: Contribution to journal › Article › Scientific › peer-review

Atomic Force Microscope
Humidity
Adhesion
Molecular Dynamics Simulation
Molecular dynamics

Activities 2018 2018

  • 1 Oral presentation

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation types › Oral presentation