Research Output per year
Research Output per year
Personal profile
Education/Academic qualification
Physical sciences, Doctorate
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Dive into the research topics where Virpi Korpelainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research Output
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Step height standards based on self-assembly for 3D metrology of biological samples
Heikkinen, V., Kassamakov, I., Viitala, T., J rvinen, M., Vainikka, T., Nolvi, A., Bermúdez, C., Artigas, R., Martinez, P., Korpelainen, V., Lassila, A. & H ggström, E., Sep 2020, In : Measurement Science and Technology. 31, 9, 094008.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates
Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
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PillarHall LHAR structure for thin film conformality measurements
Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
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PillarHall LHAR structure for Thin Film Conformality Measurements
Utriainen, M., Korpelainen, V., Ylivaara, O., Gao, F., Ylilammi, M. & Puurunen, R. L., 13 May 2018, p. 16.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
Open Access -
Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Ylivaara, O., Korpelainen, V., Ylilammi, M. & Puurunen, R. L., 29 Jul 2018, p. 51.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
Open Access
Activities
- 1 Oral presentation
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Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker) & Riikka L. Puurunen (Speaker)
31 Jul 2018Activity: Talk or presentation types › Oral presentation