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Virpi Korpelainen

20042018
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Personal profile

Education/Academic qualification

Physical sciences, Doctorate

Fingerprint Dive into the research topics where Virpi Korpelainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

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Microscopes Engineering & Materials Science
Atomic Force Microscope Mathematics
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Calibration Engineering & Materials Science
Traceability Mathematics
Interferometers Engineering & Materials Science
Gratings Mathematics
Lasers Engineering & Materials Science

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Research Output 2004 2018

PillarHall LHAR structure for thin film conformality measurements

Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

PillarHall LHAR structure for Thin Film Conformality Measurements

Utriainen, M., Korpelainen, V., Ylivaara, O., Gao, F., Ylilammi, M. & Puurunen, R. L., 13 May 2018, p. 16.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access
Aspect ratio
Thin films
Silicon
Atomic layer deposition
MEMS

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Ylivaara, O., Korpelainen, V., Ylilammi, M. & Puurunen, R. L., 29 Jul 2018, p. 51.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access
Reliability analysis
Aspect ratio
Thin films
Silicon
Atomic layer deposition
2 Citations (Scopus)

Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities

Seppä, J., Reischl, B., Sairanen, H., Korpelainen, V., Husu, H., Heinonen, M., Raiteri, P., Rohl, A. L., Nordlund, K. & Lassila, A., 2017, In : Measurement Science and Technology. 28, 3, 10 p., 034004.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Force Microscope
Humidity
Adhesion
Molecular Dynamics Simulation
Molecular dynamics
4 Citations (Scopus)

DNA origami structures as calibration standards for nanometrology

Korpelainen, V., Linko, V., Seppä, J., Lassila, A. & Kostiainen, M. A., 2017, In : Measurement Science and Technology. 28, 3, 6 p., 034001.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Nanometrology
tiles
Tile
Calibration
DNA

Activities 2018 2018

  • 1 Oral presentation

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation