An integrated pilot line for micro-fabricated medical devices

Kärkkäinen, Anu (PI)

Project: EU project

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Stresses in ALD films: Aiming for zero stress thin films
Ritasalo, R. (Speaker), Ylivaara, O. M. E. (Speaker), Pilvi, T. (Speaker) & Suni, T. (Speaker)
31 Jul 2018
Activity: Talk or presentation types › Conference presentation