An integrated pilot line for micro-fabricated medical devices

Activities

Activities per year 2018 2018 2018

• 1 Conference presentation

Activities per year

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• Stresses in ALD films: Aiming for zero stress thin films

  Ritasalo, R. (Speaker), Ylivaara, O. M. E. (Speaker), Pilvi, T. (Speaker) & Suni, T. (Speaker)

  31 Jul 2018

  Activity: Talk or presentation types › Conference presentation