Research output per year
Research output per year
Search results
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2018
Stresses in ALD films: Aiming for zero stress thin films
Ritasalo, R., Ylivaara, O., Pilvi, T. & Suni, T., 29 Jul 2018, p. 49.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
Open Access -
2017
Biocompatible ALD barrier coatings for medical devices
Matvejeff, M., Ek, S., Ritasalo, R., Kalliomäki, J., Järvinen, P., Ylivaara, O. & Östreng, E., 13 Jun 2017, Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM). IEEE Institute of Electrical and Electronic Engineers, p. 56-58 7947504Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1 Citation (Scopus)