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2017
Biocompatible ALD barrier coatings for medical devices
Matvejeff, M., Ek, S., Ritasalo, R., Kalliomäki, J., Järvinen, P., Ylivaara, O. & Östreng, E., 13 Jun 2017, Proceedings of 2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM). IEEE Institute of Electrical and Electronic Engineers, p. 56-58 7947504Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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