An integrated pilot line for micro-fabricated medical devices

Kärkkäinen, Anu (PI)

Project: EU project

1 Conference article in proceedings
1 Conference Abstract

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2018
Stresses in ALD films: Aiming for zero stress thin films
Ritasalo, R., Ylivaara, O., Pilvi, T. & Suni, T., 29 Jul 2018, p. 49.
Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Open Access