An integrated pilot line for micro-fabricated medical devices

Kärkkäinen, Anu (PI)

BA66 National metrology institute VTT MIKES

Project: EU project

1 Conference article in proceedings
1 Conference Abstract

1 results

Filter

2018
Stresses in ALD films: Aiming for zero stress thin films
Ritasalo, R., Ylivaara, O., Pilvi, T. & Suni, T., 29 Jul 2018, p. 49.
Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

Open Access