An integrated pilot line for micro-fabricated medical devices

Project: EU project

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  • 2018

    Stresses in ALD films: Aiming for zero stress thin films

    Ritasalo, R., Ylivaara, O., Pilvi, T. & Suni, T., 29 Jul 2018, p. 49.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Open Access