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Digitalisation route for dimensional nanometrology

Project: EU project

Project Details

Description

Establishing digital information flow in dimensional nanometrology

Despite extensive research in nanometrology, most nanoscale dimensional measuring instruments remain uncalibrated due to the complexity of the calibration process. As a result, only highly experienced users perform calibrations, and even then, it is done infrequently.

Project facilitates digital information flow in dimensional nanometrology, starting from the primary definition of units, through smart calibration
samples and automated evaluation routines integrated into the instrumentation, reaching both industrial and academic end users.

VTT MIKES will design and produce step height standards based on ALD technique. MIKES leads the works package focusing on uncertainty propagation through digital toolchains


Call 2024: Metrology Support for Digital Transformation

The project (24DIT02) has received funding from the European Partnership on Metrology, co-financed from the European Union’s Horizon Europe Research and Innovation Programme and by the Participating States.
AcronymDINAMO
StatusActive
Effective start/end date1/06/2531/05/28

Collaborative partners

  • VTT Technical Research Centre of Finland
  • Czech Metrology Institute (CMI) (lead)
  • Centro Español de Metrología (CEM) (Project partner)
  • Danish National Metrology Institute (DFM) (Project partner)
  • Central Office of Measures (GUM) (Project partner)
  • National Metrological Institute (INRIM) (Project partner)
  • National Physics Laboratory (NPL) (Project partner)
  • German National Metrology Institute (PTB) (Project partner)
  • Dutch Metrology Institute (VSL) (Project partner)
  • Brno University of Technology (Project partner)
  • Nearfield Instruments B.V. (Project partner)
  • Wrocław University of Science and Technology (Project partner)
  • Technische Universität Braunschweig (TUBS) (Project partner)
  • Bruker France SAS (Project partner)

UN Sustainable Development Goals

In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Funding category

  • Horizon Europe

Keywords

  • data processing
  • scanning probe microscopy
  • uncertainty
  • nanometrology