Research output per year
Research output per year
Project Details
Description
Research of the CoE focuses on Atomic Layer Deposition (ALD) which is one of the key methods among thin film technologies. The CoE groups are worldwide known and recognized actors in ALD. Research of the CoE in ALD is focused on four areas:
1. ALD precursors and processes
2. Micro- and nanostructures
3. Materials for electronics
4. Materials for energy technologies
The precursor and process development is focused on materials which are needed in electronics and energy technologies. As examples chalcogenide materials for phase change memories, III-V semiconductors, lithium compounds for thin film Li-ion batteries and new materials for all solid state 3D solar cells, can be mentioned. Fabrication of 3D micro- and nanostructures, needed in applications, will also be studied. 3D devices (MEMS, NEMS) have important applications for example in sensors.
1. ALD precursors and processes
2. Micro- and nanostructures
3. Materials for electronics
4. Materials for energy technologies
The precursor and process development is focused on materials which are needed in electronics and energy technologies. As examples chalcogenide materials for phase change memories, III-V semiconductors, lithium compounds for thin film Li-ion batteries and new materials for all solid state 3D solar cells, can be mentioned. Fabrication of 3D micro- and nanostructures, needed in applications, will also be studied. 3D devices (MEMS, NEMS) have important applications for example in sensors.
| Acronym | ALDCoE |
|---|---|
| Status | Finished |
| Effective start/end date | 1/01/12 → 31/12/17 |
Collaborative partners
- VTT Technical Research Centre of Finland (lead)
- University of Helsinki
UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):
Research output
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(Semi-)transparent ALD TiN microelectrodes
Ryynänen, T. (Corresponding author), Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
Open Access -
Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method
Grigoras, K. (Corresponding Author), Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In: Proceedings. 2, 13, 5 p., 883.Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review
Open Access -
Bulge testing of freestanding ALD thin film membranes
Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review