Research output per year
Research output per year
Research output
Search results
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2018
(Semi-)transparent ALD TiN microelectrodes
Ryynänen, T. (Corresponding author), Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
Open Access -
Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method
Grigoras, K. (Corresponding Author), Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In: Proceedings. 2, 13, 5 p., 883.Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review
Open Access -
2017
Bulge testing of freestanding ALD thin film membranes
Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
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Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method
Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers, p. 1-5 5 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2 Citations (Scopus) -
Modelling of conformality of Atomic Layer Deposition in lateral high aspect ratio structures
Ylilammi, M., 2017.Research output: Contribution to conference › Conference article › Scientific
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Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports
Puurunen, R. L., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.Research output: Contribution to conference › Conference article › Scientific › peer-review
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Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density
Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers, p. 1828-1831 7994425Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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XeF2 etching of silicon using ALD films as etch stop layers
Ylivaara, O. (Corresponding author), Saarilahti, J. & Puurunen, R., 2017.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review