Finnish Centre of Excellence in Atomic Layer Deposition

Ylivaara, Oili M.E. (PI)
Ahopelto, Jouni (Participant)
Puurunen, Riikka L. (Participant)
Grigoras, Kestutis (Participant)

BA6201 MEMS

Project: Academy of Finland project

2 Conference Abstract
2 Conference article
1 Conference Poster
1 Article in a proceedings journal

2 results

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2017

Bulge testing of freestanding ALD thin film membranes
Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.
Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
XeF₂ etching of silicon using ALD films as etch stop layers
Ylivaara, O., Saarilahti, J. & Puurunen, R., 2017.
Research output: Contribution to conference › Conference Abstract › Scientific › peer-review