Finnish Centre of Excellence in Atomic Layer Deposition

Research output

Research output per year 2017 2017 2018 2018

• 2 Conference Abstract
• 2 Conference article
• 1 Conference Poster
• 1 Article in a proceedings journal

Research output per year

Research output per year

Search results

• 2017

  Modelling of conformality of Atomic Layer Deposition in lateral high aspect ratio structures

  Ylilammi, M., 2017.

  Research output: Contribution to conference › Conference article › Scientific

  • Conformality 100%
  • Surface Reaction 100%
  • Growth 100%
  • High Aspect Ratio 50%
  • Atomic Layer Deposition 50%

• Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

  Puurunen, R. L., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

  Research output: Contribution to conference › Conference article › Scientific › peer-review