Finnish Centre of Excellence in Atomic Layer Deposition

Ylivaara, Oili M.E. (PI)
Ahopelto, Jouni (Participant)
Puurunen, Riikka L. (Participant)
Grigoras, Kestutis (Participant)

BA6201 MEMS

Project: Academy of Finland project

2 Conference Abstract
2 Conference article
1 Conference Poster
1 Article in a proceedings journal

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2018

(Semi-)transparent ALD TiN microelectrodes
Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.
Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Open Access