Finnish Centre of Excellence in Atomic Layer Deposition

Ylivaara, Oili M.E. (PI)
Ahopelto, Jouni (Participant)
Puurunen, Riikka L. (Participant)
Grigoras, Kestutis (Participant)

BA6201 MEMS

Project: Academy of Finland project

2 Conference Abstract
2 Conference article
1 Conference Poster
1 Article in a proceedings journal

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2018
Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method
Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In: Proceedings. 2, 13, 5 p., 883.
Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

Open Access