Metrology for airborne molecular contaminants II

Project: EU project

Project Details

Description

Improving product quality and reducing losses in clean room production.          
            
A key challenge facing semiconductor industry is production losses due to Airborne Molecular Contamination (AMC) in the form of vapours and aerosols that affect microscale manufacturing. 
         
Project develops spectroscopic techniques and reference materials to measure priority AMCs at lower concentrations and faster rates than is currently possible.       

VTT MIKES develops and characterises a trace gas analyser allowing simultaneous sensing of HCl, NH3 and HF at the nmol/mol level.
        
    
Call 2017: Metrology for Industry
  
This project has received funding from the EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme.
AcronymMetAMC II
StatusFinished
Effective start/end date1/05/18 → 31/07/21

Collaborative partners

  • National Physical Laboratory (NPL) (lead)
  • BA66 National metrology institute VTT MIKES
  • Czech Metrology Institute (CMI) (Project partner)
  • German National Metrology Institute (Project partner)
  • Dutch Metrology Institute (VSL) (Project partner)
  • Gasera (Project partner)
  • Optoseven Oy (Project partner)
  • Politecnico di Torino (Project partner)

Funding

  • EURAMET e.V.

Keywords

  • Airborne Molecular Contamination (AMC)
  • trace gas analyser

Access Project