Metrology for trace water in ultra-pure process gases

Project: EU project

Project Details


Reliable humidity measurements for high-purity manufacturing

Water vapour is the single largest contaminant in high-purity processing of products such as microelectronics, OLEDs and MEMS devices. Currently, measurements of trace water in ultra-pure process gases lack traceability.

Project will develop improved methods for trace water measurement relevant to the production and use of pure process gases and demonstrate the relevant metrology practices in the industry supply.

VTT MIKES improves its thermodynamic saturation-based trace water standard to extend the lower limit of frost-point temperature to –100 °C and at pressure up to 0.11 MPa. This makes possible
the generation of nitrogen and air with trace levels of water vapour.

Call 2020: Metrology for Industry

This project has received funding from the EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme.
Effective start/end date1/06/2131/05/24

Collaborative partners

  • BA66 National metrology institute VTT MIKES
  • National Metrological Institute (INRIM) (lead)
  • Centro Español de Metrología (CEM) (Project partner)
  • Centre Technique des Industries Aérauliques et Thermiques (CETIAT) (Project partner)
  • Czech Metrology Institute (CMI) (Project partner)
  • Conservatoire National des Arts et Metiers (CNAM) (Project partner)
  • National Institute of Aerospace Technology (INTA) (Project partner)
  • German National Metrology Institute (PTB) (Project partner)
  • TÜBİTAK National Metrology Institute (UME) (Project partner)
  • University of Ljubljana (Project partner)
  • Dutch Metrology Institute (VSL) (Project partner)
  • Technical University of Denmark (DTU) (Project partner)
  • Nippon Gases Industrial S.r.l. (Project partner)
  • Qrometric Limited (Project partner)
  • University of Campania Luigi Vanvitelli (Project partner)
  • Università degli Studi di Cassino e del Lazio Meridionale (Project partner)
  • Universidad de Valladolid (Project partner)
  • MBW Calibration AG (Project partner)
  • Vaisala Oyj (Project partner)


  • EURAMET e.V.


  • high-purity manufacturing
  • trace water measurement