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Metrology for trace water in ultra-pure process gases
Tabandeh, Shahin
(Manager)
BA6604 Process metrology
Project
:
EU project
Overview
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Projects
(1)
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
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Weight
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Earth and Planetary Sciences
Water
100%
Metrology
100%
Gas
100%
Project
33%
Water Vapor
33%
Purity
33%
Industry
16%
Thermodynamics
16%
Contaminant
16%
Standard
16%
Air
16%
Surface Pressure
16%
European Community
16%
Research
16%
Microelectronics
16%
Innovation
16%
Product
16%
Nitrogen
16%
Manufacturing
16%
Humidity Measurement
16%
Horizon
16%
State
16%
Frost
16%
Temperature
16%
Physics
Water
100%
Metrology
100%
Gases
100%
Water Vapor
33%
Nitrogen
16%
Pressure
16%
Thermodynamics
16%
Microelectromechanical System
16%
Temperature
16%
Standard
16%
Air
16%
Medicine and Dentistry
Water
100%
Measurement
50%
Nitrogen
16%
Saturation
16%