Traceability of localised functional properties of nanostructures with high-speed scanning probe microscopy

Project: EU project

Project Details


Enabling quantitative quality control of nanostructures and -devices

Nowadays, complex nanostructures and -devices produced by advanced manufacturing techniques are used in many areas e.g. in photonics, quantum technology and nanoelectronics. Hence, fast, accurate and reliable measurement methods and services are needed for quality control and for characterisation of these structures.

Project develops methods for traceable high-speed scanning probe measurements with 1 nm uncertainty and for characterisation of localised functional properties of nanostructures.

VTT MIKES implements and tests different scan path systems and characterises the developed high-speed self-sensing SPM probe.

Call 2020: Metrology for Industry

This project has received funding from the EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme.
Effective start/end date1/09/2131/08/24

Collaborative partners

  • BA66 National metrology institute VTT MIKES (lead)
  • Czech Metrology Institute (CMI) (Project partner)
  • Central Office of Measures (GUM) (Project partner)
  • German National Metrology Institute (PTB) (Project partner)
  • Carl Zeiss SMT GmbH (Project partner)
  • nano analytik GmbH (Project partner)
  • Physik Instrumente (PI) GmbH & Co. KG (Project partner)
  • Wroclaw University of Technology (Project partner)


  • EURAMET e.V.


  • nanostructures
  • high-speed scanning probe microscopy
  • SPM
  • advanced manufacturing