Traceable three-dimensional nanometrology

Project: EU project

Project Details

Description

Traceable calibration services for 3D nanometrology

A need to improve accuracy in 3D nanometrology measurements has arisen from progressive miniaturisation of advanced nanomanufacturing.

Project aims to meet current and future requirements for 3D traceable dimensional metrology at nanometre level with uncertainties less than 1 nm.

VTT MIKES reduces the noise level increases the measurement range of its metrological atomic force microscope and develops reference materials for calibration of 3D-nanometrologymeasurements.

Call 2015: SI Broader Scope

This project has received funding from the EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme.

Acronym3DNano
StatusFinished
Effective start/end date1/10/1630/09/19

Funding

  • EURAMET e.V.

Keywords

  • nanometrology
  • atomic force microscopy
  • scanning probe microscopy
  • dimensional metrology