14 MHz micromechanical oscillator

Tomi Mattila; Olli Jaakkola; Jyrki Kiihamäki; Jani Karttunen; Tuomas Lamminmäki; P. Rantakari; Aarne Oja; Heikki Seppä; Hannu Kattelus; Ilkka Tittonen

doi:10.1016/S0924-4247(01)00813-5

14 MHz micromechanical oscillator

Tomi Mattila (Corresponding Author), Olli Jaakkola, Jyrki Kiihamäki, Jani Karttunen, Tuomas Lamminmäki, P. Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

Helsinki University of Technology

Research output: Contribution to journal › Article › Scientific › peer-review

44 Citations (Scopus)

Abstract

Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −120 dBc/Hz and a near-carrier noise of −105 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in rf-technology are discussed.

Original language	English
Pages (from-to)	497-502
Journal	Sensors and Actuators A: Physical
Volume	97-98
DOIs	https://doi.org/10.1016/S0924-4247(01)00813-5
Publication status	Published - 2002
MoE publication type	A1 Journal article-refereed

Keywords

micromechanical oscillators
oscillator noise

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10.1016/S0924-4247(01)00813-5

Cite this

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title = "14 MHz micromechanical oscillator",

abstract = "Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −120 dBc/Hz and a near-carrier noise of −105 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in rf-technology are discussed.",

keywords = "micromechanical oscillators, oscillator noise",

author = "Tomi Mattila and Olli Jaakkola and Jyrki Kiiham{\"a}ki and Jani Karttunen and Tuomas Lamminm{\"a}ki and P. Rantakari and Aarne Oja and Heikki Sepp{\"a} and Hannu Kattelus and Ilkka Tittonen",

year = "2002",

doi = "10.1016/S0924-4247(01)00813-5",

language = "English",

volume = "97-98",

pages = "497--502",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

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TY - JOUR

T1 - 14 MHz micromechanical oscillator

AU - Mattila, Tomi

AU - Jaakkola, Olli

AU - Kiihamäki, Jyrki

AU - Karttunen, Jani

AU - Lamminmäki, Tuomas

AU - Rantakari, P.

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Kattelus, Hannu

AU - Tittonen, Ilkka

PY - 2002

Y1 - 2002

N2 - Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −120 dBc/Hz and a near-carrier noise of −105 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in rf-technology are discussed.

AB - Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −120 dBc/Hz and a near-carrier noise of −105 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in rf-technology are discussed.

KW - micromechanical oscillators

KW - oscillator noise

U2 - 10.1016/S0924-4247(01)00813-5

DO - 10.1016/S0924-4247(01)00813-5

M3 - Article

SN - 0924-4247

VL - 97-98

SP - 497

EP - 502

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

14 MHz micromechanical oscillator

Abstract

Keywords

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