14 MHz micromechanical oscillator

Tomi Mattila (Corresponding Author), Olli Jaakkola, Jyrki Kiihamäki, Jani Karttunen, Tuomas Lamminmäki, P. Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

41 Citations (Scopus)


Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −120 dBc/Hz and a near-carrier noise of −105 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in rf-technology are discussed.
Original languageEnglish
Pages (from-to)497-502
JournalSensors and Actuators A: Physical
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed


  • micromechanical oscillators
  • oscillator noise

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    Mattila, T., Jaakkola, O., Kiihamäki, J., Karttunen, J., Lamminmäki, T., Rantakari, P., Oja, A., Seppä, H., Kattelus, H., & Tittonen, I. (2002). 14 MHz micromechanical oscillator. Sensors and Actuators A: Physical, 97-98, 497-502. https://doi.org/10.1016/S0924-4247(01)00813-5