Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.
|Conference||11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV|
|Period||10/06/01 → 14/06/01|