14 MHz Micromechanical Oscillator

Tomi Mattila; Olli Jaakkola; Jyrki Kiihamäki; Jani Karttunen; Tuomas Lamminmäki; Pekka Rantakari; Aarne Oja; Heikki Seppä; Hannu Kattelus; Ilkka Tittonen

doi:10.1007/978-3-642-59497-7_254

14 MHz Micromechanical Oscillator

Tomi Mattila, Olli Jaakkola, Jyrki Kiihamäki, Jani Karttunen, Tuomas Lamminmäki, Pekka Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

Helsinki University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.

Original language	English
Title of host publication	Transducers ’01 Eurosensors XV
Publisher	Springer
Pages	1102-1105
ISBN (Electronic)	978-3-642-59497-7
ISBN (Print)	978-3-540-42150-4
DOIs	https://doi.org/10.1007/978-3-642-59497-7_254
Publication status	Published - 2001
MoE publication type	A4 Article in a conference publication
Event	11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV - Munich, Germany Duration: 10 Jun 2001 → 14 Jun 2001

Conference

Conference	11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV
Country/Territory	Germany
City	Munich
Period	10/06/01 → 14/06/01

Access to Document

10.1007/978-3-642-59497-7_254

Cite this

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title = "14 MHz Micromechanical Oscillator",

abstract = "Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.",

author = "Tomi Mattila and Olli Jaakkola and Jyrki Kiiham{\"a}ki and Jani Karttunen and Tuomas Lamminm{\"a}ki and Pekka Rantakari and Aarne Oja and Heikki Sepp{\"a} and Hannu Kattelus and Ilkka Tittonen",

year = "2001",

doi = "10.1007/978-3-642-59497-7_254",

language = "English",

isbn = "978-3-540-42150-4",

pages = "1102--1105",

booktitle = "Transducers {\textquoteright}01 Eurosensors XV",

publisher = "Springer",

address = "Germany",

note = "11th International Conference on Solid-State Sensors and Actuators, Transducers {\textquoteright}01 Eurosensors XV ; Conference date: 10-06-2001 Through 14-06-2001",

}

Mattila, T, Jaakkola, O, Kiihamäki, J, Karttunen, J, Lamminmäki, T, Rantakari, P, Oja, A, Seppä, H, Kattelus, H & Tittonen, I 2001, 14 MHz Micromechanical Oscillator. in Transducers ’01 Eurosensors XV. Springer, pp. 1102-1105, 11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV, Munich, Germany, 10/06/01. https://doi.org/10.1007/978-3-642-59497-7_254

TY - GEN

T1 - 14 MHz Micromechanical Oscillator

AU - Mattila, Tomi

AU - Jaakkola, Olli

AU - Kiihamäki, Jyrki

AU - Karttunen, Jani

AU - Lamminmäki, Tuomas

AU - Rantakari, Pekka

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Kattelus, Hannu

AU - Tittonen, Ilkka

PY - 2001

Y1 - 2001

N2 - Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.

AB - Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.

U2 - 10.1007/978-3-642-59497-7_254

DO - 10.1007/978-3-642-59497-7_254

M3 - Conference article in proceedings

SN - 978-3-540-42150-4

SP - 1102

EP - 1105

BT - Transducers ’01 Eurosensors XV

PB - Springer

T2 - 11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV

Y2 - 10 June 2001 through 14 June 2001

ER -

14 MHz Micromechanical Oscillator

Abstract

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