14 MHz Micromechanical Oscillator

Tomi Mattila, Olli Jaakkola, Jyrki Kiihamäki, Jani Karttunen, Tuomas Lamminmäki, Pekka Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.
Original languageEnglish
Title of host publicationTransducers ’01 Eurosensors XV
PublisherSpringer
Pages1102-1105
ISBN (Electronic)978-3-642-59497-7
ISBN (Print)978-3-540-42150-4
DOIs
Publication statusPublished - 2001
MoE publication typeA4 Article in a conference publication
Event11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV - Munich, Germany
Duration: 10 Jun 200114 Jun 2001

Conference

Conference11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV
CountryGermany
CityMunich
Period10/06/0114/06/01

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    Mattila, T., Jaakkola, O., Kiihamäki, J., Karttunen, J., Lamminmäki, T., Rantakari, P., Oja, A., Seppä, H., Kattelus, H., & Tittonen, I. (2001). 14 MHz Micromechanical Oscillator. In Transducers ’01 Eurosensors XV (pp. 1102-1105). Springer. https://doi.org/10.1007/978-3-642-59497-7_254