14 MHz Micromechanical Oscillator

Tomi Mattila; Olli Jaakkola; Jyrki Kiihamäki; Jani Karttunen; Tuomas Lamminmäki; Pekka Rantakari; Aarne Oja; Heikki Seppä; Hannu Kattelus; Ilkka Tittonen

doi:10.1007/978-3-642-59497-7_254

14 MHz Micromechanical Oscillator

Tomi Mattila
, Olli Jaakkola
, Jyrki Kiihamäki
, Jani Karttunen
, Tuomas Lamminmäki
, Pekka Rantakari
, Aarne Oja
, Heikki Seppä
, Hannu Kattelus
, Ilkka Tittonen

Helsinki University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.

Original language	English
Title of host publication	Transducers ’01 Eurosensors XV
Publisher	Springer
Pages	1102-1105
ISBN (Electronic)	978-3-642-59497-7
ISBN (Print)	978-3-540-42150-4
DOIs	https://doi.org/10.1007/978-3-642-59497-7_254
Publication status	Published - 2001
MoE publication type	A4 Article in a conference publication
Event	11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV - Munich, Germany Duration: 10 Jun 2001 → 14 Jun 2001

Conference

Conference	11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV
Country/Territory	Germany
City	Munich
Period	10/06/01 → 14/06/01

Access to Document

10.1007/978-3-642-59497-7_254

Cite this

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title = "14 MHz Micromechanical Oscillator",

abstract = "Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.",

author = "Tomi Mattila and Olli Jaakkola and Jyrki Kiiham{\"a}ki and Jani Karttunen and Tuomas Lamminm{\"a}ki and Pekka Rantakari and Aarne Oja and Heikki Sepp{\"a} and Hannu Kattelus and Ilkka Tittonen",

year = "2001",

doi = "10.1007/978-3-642-59497-7\_254",

language = "English",

isbn = "978-3-540-42150-4",

pages = "1102--1105",

booktitle = "Transducers {\textquoteright}01 Eurosensors XV",

publisher = "Springer",

address = "Germany",

note = "11th International Conference on Solid-State Sensors and Actuators, Transducers {\textquoteright}01 Eurosensors XV ; Conference date: 10-06-2001 Through 14-06-2001",

}

Mattila, T, Jaakkola, O, Kiihamäki, J, Karttunen, J, Lamminmäki, T, Rantakari, P, Oja, A, Seppä, H, Kattelus, H & Tittonen, I 2001, 14 MHz Micromechanical Oscillator. in Transducers ’01 Eurosensors XV. Springer, pp. 1102-1105, 11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV, Munich, Germany, 10/06/01. https://doi.org/10.1007/978-3-642-59497-7_254

TY - GEN

T1 - 14 MHz Micromechanical Oscillator

AU - Mattila, Tomi

AU - Jaakkola, Olli

AU - Kiihamäki, Jyrki

AU - Karttunen, Jani

AU - Lamminmäki, Tuomas

AU - Rantakari, Pekka

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Kattelus, Hannu

AU - Tittonen, Ilkka

PY - 2001

Y1 - 2001

N2 - Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.

AB - Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carrier noise of −90 dBc/Hz at 1 kHz offset. The oscillator noise is dominated by amplifier noise. By comparing the oscillator performance with conventional quartz oscillators, advantages and limitations of the micromechanical components in RF-technology are discussed.

U2 - 10.1007/978-3-642-59497-7_254

DO - 10.1007/978-3-642-59497-7_254

M3 - Conference article in proceedings

SN - 978-3-540-42150-4

SP - 1102

EP - 1105

BT - Transducers ’01 Eurosensors XV

PB - Springer

T2 - 11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV

Y2 - 10 June 2001 through 14 June 2001

ER -

14 MHz Micromechanical Oscillator

Abstract

Conference

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