160 GHz Silicon Micromachined Folded Slot Antenna Array

Alina-Cristina Bunea, Dan Neculoiu, Andrei Avram, Tero Kiuru, Tauno Vähä-Heikkilä, Alexandru Takacs, Pierre Calmon

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.
Original languageEnglish
Title of host publicationProceedings of APMC 2012
Subtitle of host publicationAsia Pacific Microwave Conference
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages896-898
ISBN (Electronic)978-1-4577-1332-3
ISBN (Print)978-1-4577-1330-9
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
EventAsia Pacific Microwave Conference, APMC 2012 - Kaohsiung, Taiwan, Province of China
Duration: 4 Dec 20127 Dec 2012

Conference

ConferenceAsia Pacific Microwave Conference, APMC 2012
Abbreviated titleAPMC 2012
CountryTaiwan, Province of China
CityKaohsiung
Period4/12/127/12/12

Fingerprint

Slot antennas
Antenna arrays
Silicon
Reactive ion etching
Micromachining
Substrates
Ultra-wideband (UWB)
Frequency bands
Bandwidth

Keywords

  • 160 GHz
  • antenna
  • electromagnetic modeling
  • millimeter waves: silicon micromachining

Cite this

Bunea, A-C., Neculoiu, D., Avram, A., Kiuru, T., Vähä-Heikkilä, T., Takacs, A., & Calmon, P. (2012). 160 GHz Silicon Micromachined Folded Slot Antenna Array. In Proceedings of APMC 2012: Asia Pacific Microwave Conference (pp. 896-898). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/APMC.2012.6421771
Bunea, Alina-Cristina ; Neculoiu, Dan ; Avram, Andrei ; Kiuru, Tero ; Vähä-Heikkilä, Tauno ; Takacs, Alexandru ; Calmon, Pierre. / 160 GHz Silicon Micromachined Folded Slot Antenna Array. Proceedings of APMC 2012: Asia Pacific Microwave Conference . Institute of Electrical and Electronic Engineers IEEE, 2012. pp. 896-898
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abstract = "This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7{\%} (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.",
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Bunea, A-C, Neculoiu, D, Avram, A, Kiuru, T, Vähä-Heikkilä, T, Takacs, A & Calmon, P 2012, 160 GHz Silicon Micromachined Folded Slot Antenna Array. in Proceedings of APMC 2012: Asia Pacific Microwave Conference . Institute of Electrical and Electronic Engineers IEEE, pp. 896-898, Asia Pacific Microwave Conference, APMC 2012, Kaohsiung, Taiwan, Province of China, 4/12/12. https://doi.org/10.1109/APMC.2012.6421771

160 GHz Silicon Micromachined Folded Slot Antenna Array. / Bunea, Alina-Cristina; Neculoiu, Dan; Avram, Andrei; Kiuru, Tero; Vähä-Heikkilä, Tauno; Takacs, Alexandru; Calmon, Pierre.

Proceedings of APMC 2012: Asia Pacific Microwave Conference . Institute of Electrical and Electronic Engineers IEEE, 2012. p. 896-898.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Bunea, Alina-Cristina

AU - Neculoiu, Dan

AU - Avram, Andrei

AU - Kiuru, Tero

AU - Vähä-Heikkilä, Tauno

AU - Takacs, Alexandru

AU - Calmon, Pierre

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N2 - This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.

AB - This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.

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KW - millimeter waves: silicon micromachining

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Bunea A-C, Neculoiu D, Avram A, Kiuru T, Vähä-Heikkilä T, Takacs A et al. 160 GHz Silicon Micromachined Folded Slot Antenna Array. In Proceedings of APMC 2012: Asia Pacific Microwave Conference . Institute of Electrical and Electronic Engineers IEEE. 2012. p. 896-898 https://doi.org/10.1109/APMC.2012.6421771