160 GHz Silicon Micromachined Folded Slot Antenna Array

Alina-Cristina Bunea; Dan Neculoiu; Andrei Avram; Tero Kiuru; Tauno Vähä-Heikkilä; Alexandru Takacs; Pierre Calmon

doi:10.1109/APMC.2012.6421771

160 GHz Silicon Micromachined Folded Slot Antenna Array

Alina-Cristina Bunea, Dan Neculoiu, Andrei Avram, Tero Kiuru, Tauno Vähä-Heikkilä, Alexandru Takacs, Pierre Calmon

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

4 Citations (Scopus)

Abstract

This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.

Original language	English
Title of host publication	Proceedings of APMC 2012
Subtitle of host publication	Asia Pacific Microwave Conference
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	896-898
ISBN (Electronic)	978-1-4577-1332-3
ISBN (Print)	978-1-4577-1330-9
DOIs	https://doi.org/10.1109/APMC.2012.6421771
Publication status	Published - 2012
MoE publication type	A4 Article in a conference publication
Event	Asia Pacific Microwave Conference, APMC 2012 - Kaohsiung, Taiwan, Province of China Duration: 4 Dec 2012 → 7 Dec 2012

Conference

Conference	Asia Pacific Microwave Conference, APMC 2012
Abbreviated title	APMC 2012
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	4/12/12 → 7/12/12

Keywords

160 GHz
antenna
electromagnetic modeling
millimeter waves: silicon micromachining

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/APMC.2012.6421771

Cite this

@inproceedings{c9a5b6cd8b4f41ee90b225f7b96a12d7,

title = "160 GHz Silicon Micromachined Folded Slot Antenna Array",

abstract = "This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.",

keywords = "160 GHz, antenna, electromagnetic modeling, millimeter waves: silicon micromachining",

author = "Alina-Cristina Bunea and Dan Neculoiu and Andrei Avram and Tero Kiuru and Tauno V{\"a}h{\"a}-Heikkil{\"a} and Alexandru Takacs and Pierre Calmon",

year = "2012",

doi = "10.1109/APMC.2012.6421771",

language = "English",

isbn = "978-1-4577-1330-9",

pages = "896--898",

booktitle = "Proceedings of APMC 2012",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "Asia Pacific Microwave Conference, APMC 2012, APMC 2012 ; Conference date: 04-12-2012 Through 07-12-2012",

}

Bunea, A-C, Neculoiu, D, Avram, A, Kiuru, T, Vähä-Heikkilä, T, Takacs, A & Calmon, P 2012, 160 GHz Silicon Micromachined Folded Slot Antenna Array. in Proceedings of APMC 2012: Asia Pacific Microwave Conference . IEEE Institute of Electrical and Electronic Engineers, pp. 896-898, Asia Pacific Microwave Conference, APMC 2012, Kaohsiung, Taiwan, Province of China, 4/12/12. https://doi.org/10.1109/APMC.2012.6421771

160 GHz Silicon Micromachined Folded Slot Antenna Array. / Bunea, Alina-Cristina; Neculoiu, Dan; Avram, Andrei et al.
Proceedings of APMC 2012: Asia Pacific Microwave Conference . IEEE Institute of Electrical and Electronic Engineers, 2012. p. 896-898.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - 160 GHz Silicon Micromachined Folded Slot Antenna Array

AU - Bunea, Alina-Cristina

AU - Neculoiu, Dan

AU - Avram, Andrei

AU - Kiuru, Tero

AU - Vähä-Heikkilä, Tauno

AU - Takacs, Alexandru

AU - Calmon, Pierre

PY - 2012

Y1 - 2012

N2 - This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.

AB - This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.

KW - 160 GHz

KW - antenna

KW - electromagnetic modeling

KW - millimeter waves: silicon micromachining

U2 - 10.1109/APMC.2012.6421771

DO - 10.1109/APMC.2012.6421771

M3 - Conference article in proceedings

SN - 978-1-4577-1330-9

SP - 896

EP - 898

BT - Proceedings of APMC 2012

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - Asia Pacific Microwave Conference, APMC 2012

Y2 - 4 December 2012 through 7 December 2012

ER -

160 GHz Silicon Micromachined Folded Slot Antenna Array

Abstract

Conference

Keywords

UN SDGs

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