160 GHz Silicon Micromachined Folded Slot Antenna Array

Alina-Cristina Bunea, Dan Neculoiu, Andrei Avram, Tero Kiuru, Tauno Vähä-Heikkilä, Alexandru Takacs, Pierre Calmon

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)


    This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining. Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz. The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz. The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.
    Original languageEnglish
    Title of host publicationProceedings of APMC 2012
    Subtitle of host publicationAsia Pacific Microwave Conference
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4577-1332-3
    ISBN (Print)978-1-4577-1330-9
    Publication statusPublished - 2012
    MoE publication typeA4 Article in a conference publication
    EventAsia Pacific Microwave Conference, APMC 2012 - Kaohsiung, Taiwan, Province of China
    Duration: 4 Dec 20127 Dec 2012


    ConferenceAsia Pacific Microwave Conference, APMC 2012
    Abbreviated titleAPMC 2012
    Country/TerritoryTaiwan, Province of China


    • 160 GHz
    • antenna
    • electromagnetic modeling
    • millimeter waves: silicon micromachining


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