Abstract
This paper describes the design, electromagnetic (EM) modeling and experimental results obtained for a 160 GHz double folded slot antenna array processed through silicon micromachining.
Initial simulations showed reflection losses (RL) of -17 dB at 160 GHz and a fractional bandwidth of ~18.7% (with RL<;-10dB between 148.65 GHz and 178.59 GHz). The simulated directivity was larger than 4 dBi in the working frequency band and ~6.8 dBi at 160 GHz.
The structure was processed through deep reactive ion etching (DRIE), and resulted in a thinner substrate than designed. The experimental results for this thinner substrate of about 140 μm showed a ultra wideband behavior, with measured RL<;-10dB for almost the whole 140-210 GHz band and -17 dB at 160 GHz.
The free space transmission parameter was measured and the results were compared with the simulated directivity showing a frequency shift of the curve, but otherwise a very good agreement in the trend of the two curves.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of APMC 2012 |
| Subtitle of host publication | Asia Pacific Microwave Conference |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 896-898 |
| ISBN (Electronic) | 978-1-4577-1332-3 |
| ISBN (Print) | 978-1-4577-1330-9 |
| DOIs | |
| Publication status | Published - 2012 |
| MoE publication type | A4 Article in a conference publication |
| Event | Asia Pacific Microwave Conference, APMC 2012 - Kaohsiung, Taiwan, Province of China Duration: 4 Dec 2012 → 7 Dec 2012 |
Conference
| Conference | Asia Pacific Microwave Conference, APMC 2012 |
|---|---|
| Abbreviated title | APMC 2012 |
| Country/Territory | Taiwan, Province of China |
| City | Kaohsiung |
| Period | 4/12/12 → 7/12/12 |
Keywords
- 160 GHz
- antenna
- electromagnetic modeling
- millimeter waves: silicon micromachining
