3D features on plastic substrate by combined thermal and UV-imprinting

Tomi Haatainen; Tapio Mäkelä; Jouni Ahopelto

3D features on plastic substrate by combined thermal and UV-imprinting

Tomi Haatainen, Tapio Mäkelä, Jouni Ahopelto

Research output: Contribution to conference › Conference article › Scientific › peer-review

Abstract

In this work, we report a method to fabricate 3D polymer stamps by combining thermal SSIL and UV Step and Stamp Imprint Lithography (UV-SSIL). In the first step 100 x 100 mm2 PET substrate was patterned by thermal SSIL using a small silicon stamp with micron scale test structures. In the second step submicron features of a quartz stamp were added into the PET substrate by UV-SSIL. Finally, the patterned PET substrate consists of micron scale recessed and submicron scale elevated features.

Original language	English
Publication status	Published - 2009
MoE publication type	Not Eligible
Event	35th International Conference on Micro & Nano Engineering, MNE 2009 - Ghent, Belgium Duration: 28 Sept 2009 → 1 Oct 2009

Conference

Conference	35th International Conference on Micro & Nano Engineering, MNE 2009
Country/Territory	Belgium
City	Ghent
Period	28/09/09 → 1/10/09

Keywords

Nanoimprint lithography
UV imprinting

Cite this

@conference{eef8a14e381142128d8311023fd68841,

title = "3D features on plastic substrate by combined thermal and UV-imprinting",

abstract = "In this work, we report a method to fabricate 3D polymer stamps by combining thermal SSIL and UV Step and Stamp Imprint Lithography (UV-SSIL). In the first step 100 x 100 mm2 PET substrate was patterned by thermal SSIL using a small silicon stamp with micron scale test structures. In the second step submicron features of a quartz stamp were added into the PET substrate by UV-SSIL. Finally, the patterned PET substrate consists of micron scale recessed and submicron scale elevated features.",

keywords = "Nanoimprint lithography, UV imprinting",

author = "Tomi Haatainen and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",

note = "Project code: 21975; 35th International Conference on Micro & Nano Engineering, MNE 2009 ; Conference date: 28-09-2009 Through 01-10-2009",

year = "2009",

language = "English",

}

TY - CONF

T1 - 3D features on plastic substrate by combined thermal and UV-imprinting

AU - Haatainen, Tomi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

N1 - Project code: 21975

PY - 2009

Y1 - 2009

N2 - In this work, we report a method to fabricate 3D polymer stamps by combining thermal SSIL and UV Step and Stamp Imprint Lithography (UV-SSIL). In the first step 100 x 100 mm2 PET substrate was patterned by thermal SSIL using a small silicon stamp with micron scale test structures. In the second step submicron features of a quartz stamp were added into the PET substrate by UV-SSIL. Finally, the patterned PET substrate consists of micron scale recessed and submicron scale elevated features.

AB - In this work, we report a method to fabricate 3D polymer stamps by combining thermal SSIL and UV Step and Stamp Imprint Lithography (UV-SSIL). In the first step 100 x 100 mm2 PET substrate was patterned by thermal SSIL using a small silicon stamp with micron scale test structures. In the second step submicron features of a quartz stamp were added into the PET substrate by UV-SSIL. Finally, the patterned PET substrate consists of micron scale recessed and submicron scale elevated features.

KW - Nanoimprint lithography

KW - UV imprinting

M3 - Conference article

T2 - 35th International Conference on Micro & Nano Engineering, MNE 2009

Y2 - 28 September 2009 through 1 October 2009

ER -

3D features on plastic substrate by combined thermal and UV-imprinting

Abstract

Conference

Keywords

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Cite this