Fingerprint
Dive into the research topics of '3D Nanostructuring of hydrogen silsesquioxane resist by 100 keV electron beam lithography'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
3D Nanostructuring of hydrogen silsesquioxane resist by 100 keV electron beam lithography
Joan Vila-Comamala, Sergey Gorelick, Vitaliy A. Guzenko, Christian David
Research output: Contribution to journal › Article › Scientific › peer-review
17
Citations
(Scopus)