3D processing on 6 in. high resistive SOI wafers: Fabrication of edgeless strip and pixel detectors
- Simo Eränen
- , Juha Kalliopuska*
- , Risto Orava
- , Nick van Remortel
- , Tuula Virolainen
*Corresponding author for this work
- Helsinki Institute of Physics (HIP)
Research output: Contribution to journal › Article › Scientific › peer-review
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