Fingerprint
Dive into the research topics of '3D processing on 6 in. high resistive SOI wafers: Fabrication of edgeless strip and pixel detectors'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
3D processing on 6 in. high resistive SOI wafers: Fabrication of edgeless strip and pixel detectors
Simo Eränen, Juha Kalliopuska (Corresponding Author), Risto Orava, Nick van Remortel, Tuula Virolainen
Research output: Contribution to journal › Article › Scientific › peer-review
16
Citations
(Scopus)