4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator

Kimmo Kokkonen, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    7 Citations (Scopus)

    Abstract

    Acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator manufactured onto a glass substrate have been studied in detail with our heterodyne laser interferometer. The glass substrate allows for optical probing directly from the bottom of the mirror stack and hence enables comparison of wave amplitudes on top of the resonator with those at the bottom of the acoustic mirror. Dispersion curves are calculated from the experimental data and compared to simulations. Transmission characteristics of the mirror stack are determined from the experimental data and compared to simulations. Furthermore, the relation between the electrical response of the device and its acoustical behavior is discussed.
    Original languageEnglish
    Title of host publication2006 IEEE Ultrasonics Symposium
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)1-4244-0202-6
    ISBN (Print)1-4244-0201-8
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication
    Event2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006. -
    Duration: 1 Jan 2006 → …

    Conference

    Conference2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006.
    Period1/01/06 → …

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