4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator

Kimmo Kokkonen; Tuomas Pensala

doi:10.1109/ULTSYM.2006.123

4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

8 Citations (Scopus)

Abstract

Acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator manufactured onto a glass substrate have been studied in detail with our heterodyne laser interferometer. The glass substrate allows for optical probing directly from the bottom of the mirror stack and hence enables comparison of wave amplitudes on top of the resonator with those at the bottom of the acoustic mirror. Dispersion curves are calculated from the experimental data and compared to simulations. Transmission characteristics of the mirror stack are determined from the experimental data and compared to simulations. Furthermore, the relation between the electrical response of the device and its acoustical behavior is discussed.

Original language	English
Title of host publication	2006 IEEE Ultrasonics Symposium
Publisher	IEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)	1-4244-0202-6
ISBN (Print)	1-4244-0201-8
DOIs	https://doi.org/10.1109/ULTSYM.2006.123
Publication status	Published - 2006
MoE publication type	A4 Article in a conference publication
Event	2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006. - Duration: 1 Jan 2006 → …

Conference

Conference	2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006.
Period	1/01/06 → …

Access to Document

10.1109/ULTSYM.2006.123

Cite this

@inproceedings{b8ca44f52fc440fba6f97147a0ff151b,

title = "4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator",

abstract = "Acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator manufactured onto a glass substrate have been studied in detail with our heterodyne laser interferometer. The glass substrate allows for optical probing directly from the bottom of the mirror stack and hence enables comparison of wave amplitudes on top of the resonator with those at the bottom of the acoustic mirror. Dispersion curves are calculated from the experimental data and compared to simulations. Transmission characteristics of the mirror stack are determined from the experimental data and compared to simulations. Furthermore, the relation between the electrical response of the device and its acoustical behavior is discussed.",

author = "Kimmo Kokkonen and Tuomas Pensala",

year = "2006",

doi = "10.1109/ULTSYM.2006.123",

language = "English",

isbn = "1-4244-0201-8",

booktitle = "2006 IEEE Ultrasonics Symposium",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006. ; Conference date: 01-01-2006",

}

Kokkonen, K & Pensala, T 2006, 4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator. in 2006 IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006., 1/01/06. https://doi.org/10.1109/ULTSYM.2006.123

4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator. / Kokkonen, Kimmo; Pensala, Tuomas.
2006 IEEE Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 2006.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - 4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator

AU - Kokkonen, Kimmo

AU - Pensala, Tuomas

PY - 2006

Y1 - 2006

N2 - Acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator manufactured onto a glass substrate have been studied in detail with our heterodyne laser interferometer. The glass substrate allows for optical probing directly from the bottom of the mirror stack and hence enables comparison of wave amplitudes on top of the resonator with those at the bottom of the acoustic mirror. Dispersion curves are calculated from the experimental data and compared to simulations. Transmission characteristics of the mirror stack are determined from the experimental data and compared to simulations. Furthermore, the relation between the electrical response of the device and its acoustical behavior is discussed.

AB - Acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator manufactured onto a glass substrate have been studied in detail with our heterodyne laser interferometer. The glass substrate allows for optical probing directly from the bottom of the mirror stack and hence enables comparison of wave amplitudes on top of the resonator with those at the bottom of the acoustic mirror. Dispersion curves are calculated from the experimental data and compared to simulations. Transmission characteristics of the mirror stack are determined from the experimental data and compared to simulations. Furthermore, the relation between the electrical response of the device and its acoustical behavior is discussed.

U2 - 10.1109/ULTSYM.2006.123

DO - 10.1109/ULTSYM.2006.123

M3 - Conference article in proceedings

SN - 1-4244-0201-8

BT - 2006 IEEE Ultrasonics Symposium

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2006 IEEE International Ultrasonics Symposium, Vancouver, British Columbia, Canada, 3 - 6 Oct. 2006.

Y2 - 1 January 2006

ER -

4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator

Abstract

Conference

Access to Document

Fingerprint

Cite this