60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane

D. Neculoiu, G. Konstantinidis, Tauno Vähä-Heikkilä, M. Kantanen, A. Muller, A. Stavinidris, D. Vasilache, Z. Chatzopoulos, A. Muller, M. Dragoman, D. Dascalu

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

This paper presents the design, fabrication and characterization of a GaAs membrane-supported 60 GHz receiver based on the monolithic integration of a double folded slot antenna with a Schottky diode. The design is based on intensive electromagnetic simulations and layout optimization of the antenna structure. The antenna integrated with the Schottky diode are supported on a 2.2 ìm thick semi-insulating membrane fabricated using GaAs micromachining. The experimental results demonstrate a isotropic voltage sensitivity of 20.000 mV/mW at 61 GHz operating frequency.
Original languageEnglish
Title of host publicationProceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009
Place of PublicationTrento
Pages33-36
Publication statusPublished - 2009
MoE publication typeNot Eligible
Event10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 - Trento, Italy
Duration: 6 Jul 20098 Jul 2009

Conference

Conference10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009
Abbreviated titleMEMSWAVE 2009
CountryItaly
CityTrento
Period6/07/098/07/09

Fingerprint

Slot antennas
Diodes
Antennas
Membranes
Micromachining
Fabrication
Electric potential

Keywords

  • MEMS
  • RF MEMS
  • micromachining
  • GaAs
  • millimeter wave
  • microwave

Cite this

Neculoiu, D., Konstantinidis, G., Vähä-Heikkilä, T., Kantanen, M., Muller, A., Stavinidris, A., ... Dascalu, D. (2009). 60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane. In Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 (pp. 33-36). Trento.
Neculoiu, D. ; Konstantinidis, G. ; Vähä-Heikkilä, Tauno ; Kantanen, M. ; Muller, A. ; Stavinidris, A. ; Vasilache, D. ; Chatzopoulos, Z. ; Muller, A. ; Dragoman, M. ; Dascalu, D. / 60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane. Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. Trento, 2009. pp. 33-36
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title = "60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane",
abstract = "This paper presents the design, fabrication and characterization of a GaAs membrane-supported 60 GHz receiver based on the monolithic integration of a double folded slot antenna with a Schottky diode. The design is based on intensive electromagnetic simulations and layout optimization of the antenna structure. The antenna integrated with the Schottky diode are supported on a 2.2 {\`i}m thick semi-insulating membrane fabricated using GaAs micromachining. The experimental results demonstrate a isotropic voltage sensitivity of 20.000 mV/mW at 61 GHz operating frequency.",
keywords = "MEMS, RF MEMS, micromachining, GaAs, millimeter wave, microwave",
author = "D. Neculoiu and G. Konstantinidis and Tauno V{\"a}h{\"a}-Heikkil{\"a} and M. Kantanen and A. Muller and A. Stavinidris and D. Vasilache and Z. Chatzopoulos and A. Muller and M. Dragoman and D. Dascalu",
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Neculoiu, D, Konstantinidis, G, Vähä-Heikkilä, T, Kantanen, M, Muller, A, Stavinidris, A, Vasilache, D, Chatzopoulos, Z, Muller, A, Dragoman, M & Dascalu, D 2009, 60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane. in Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. Trento, pp. 33-36, 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009, Trento, Italy, 6/07/09.

60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane. / Neculoiu, D.; Konstantinidis, G.; Vähä-Heikkilä, Tauno; Kantanen, M.; Muller, A.; Stavinidris, A.; Vasilache, D.; Chatzopoulos, Z.; Muller, A.; Dragoman, M.; Dascalu, D.

Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. Trento, 2009. p. 33-36.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - 60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane

AU - Neculoiu, D.

AU - Konstantinidis, G.

AU - Vähä-Heikkilä, Tauno

AU - Kantanen, M.

AU - Muller, A.

AU - Stavinidris, A.

AU - Vasilache, D.

AU - Chatzopoulos, Z.

AU - Muller, A.

AU - Dragoman, M.

AU - Dascalu, D.

PY - 2009

Y1 - 2009

N2 - This paper presents the design, fabrication and characterization of a GaAs membrane-supported 60 GHz receiver based on the monolithic integration of a double folded slot antenna with a Schottky diode. The design is based on intensive electromagnetic simulations and layout optimization of the antenna structure. The antenna integrated with the Schottky diode are supported on a 2.2 ìm thick semi-insulating membrane fabricated using GaAs micromachining. The experimental results demonstrate a isotropic voltage sensitivity of 20.000 mV/mW at 61 GHz operating frequency.

AB - This paper presents the design, fabrication and characterization of a GaAs membrane-supported 60 GHz receiver based on the monolithic integration of a double folded slot antenna with a Schottky diode. The design is based on intensive electromagnetic simulations and layout optimization of the antenna structure. The antenna integrated with the Schottky diode are supported on a 2.2 ìm thick semi-insulating membrane fabricated using GaAs micromachining. The experimental results demonstrate a isotropic voltage sensitivity of 20.000 mV/mW at 61 GHz operating frequency.

KW - MEMS

KW - RF MEMS

KW - micromachining

KW - GaAs

KW - millimeter wave

KW - microwave

M3 - Conference article in proceedings

SP - 33

EP - 36

BT - Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009

CY - Trento

ER -

Neculoiu D, Konstantinidis G, Vähä-Heikkilä T, Kantanen M, Muller A, Stavinidris A et al. 60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane. In Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. Trento. 2009. p. 33-36