Abstract
This paper presents the design, fabrication and characterization of a
GaAs membrane-supported 60 GHz receiver based on the monolithic integration of
a double folded slot antenna with a Schottky diode. The design is based on
intensive electromagnetic simulations and layout optimization of the antenna
structure. The antenna integrated with the Schottky diode are supported on a
2.2 ìm thick semi-insulating membrane fabricated using GaAs micromachining.
The experimental results demonstrate a isotropic voltage sensitivity of 20.000
mV/mW at 61 GHz operating frequency.
Original language | English |
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Title of host publication | Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 |
Place of Publication | Trento |
Pages | 33-36 |
Publication status | Published - 2009 |
MoE publication type | Not Eligible |
Event | 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 - Trento, Italy Duration: 6 Jul 2009 → 8 Jul 2009 |
Conference
Conference | 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 |
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Abbreviated title | MEMSWAVE 2009 |
Country/Territory | Italy |
City | Trento |
Period | 6/07/09 → 8/07/09 |
Keywords
- MEMS
- RF MEMS
- micromachining
- GaAs
- millimeter wave
- microwave