60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane

D. Neculoiu, G. Konstantinidis, Tauno Vähä-Heikkilä, M. Kantanen, A. Muller, A. Stavinidris, D. Vasilache, Z. Chatzopoulos, A. Muller, M. Dragoman, D. Dascalu

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    This paper presents the design, fabrication and characterization of a GaAs membrane-supported 60 GHz receiver based on the monolithic integration of a double folded slot antenna with a Schottky diode. The design is based on intensive electromagnetic simulations and layout optimization of the antenna structure. The antenna integrated with the Schottky diode are supported on a 2.2 ìm thick semi-insulating membrane fabricated using GaAs micromachining. The experimental results demonstrate a isotropic voltage sensitivity of 20.000 mV/mW at 61 GHz operating frequency.
    Original languageEnglish
    Title of host publicationProceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009
    Place of PublicationTrento
    Pages33-36
    Publication statusPublished - 2009
    MoE publication typeNot Eligible
    Event10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009 - Trento, Italy
    Duration: 6 Jul 20098 Jul 2009

    Conference

    Conference10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009
    Abbreviated titleMEMSWAVE 2009
    Country/TerritoryItaly
    CityTrento
    Period6/07/098/07/09

    Keywords

    • MEMS
    • RF MEMS
    • micromachining
    • GaAs
    • millimeter wave
    • microwave

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