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• Integration and Packaging of Optoelectronic and Silicon Photonic Chips on a µm-scale SOI Platform

  Aalto, T., Harjanne, M., Kapulainen, M. & Ylinen, S., 2012, European Conference on Integrated Photonics website. 2 p. ThP128

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Professional

  Open Access

• Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform

  Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M. & Aalto, T., 29 Jul 2013, In: Optics Express. 21, 15, p. 17814-17823

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  121 Citations (Scopus)

• ESSenTIAL: EPIXfab services specifically targeting (SME) industrial takeup of advanced silicon photonics

  Pozo, J., Kumar, P., Cascio, D. M. R. L., Khanna, A., Dumon, P., Delbeke, D., Baets, R., Fournier, M., Fedeli, J-M., Fulbert, L., Zimmermann, L., Tillack, B., Tian, H., Aalto, T., O'Brien, P., Deptuck, D., Xu, J., Zhang, X. & Gale, D., 2012, Proceedings: 14th International Conference on Transparent Optical Networks, ICTON 2012. IEEE Institute of Electrical and Electronic Engineers, 6254391

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  5 Citations (Scopus)

• Silicon Photonics

  Aalto, T., Arpiainen, S., Harjanne, M., Kapulainen, M. & Sami, Y., 2009, Finland-Japan Workshop on Nanophotonics and Related Technologies. Espoo: VTT Technical Research Centre of Finland, p. 42-45 (VTT Symposium; No. 255).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  Open Access

• Low loss GaInNAs/GaAs gain waveguides with U-bend geometry for single-facet coupling in hybrid photonic integration

  Tuorila, H., Viheriälä, J., Cherchi, M., Aho, A. T., Aalto, T. & Guina, M., 23 Jul 2018, In: Applied Physics Letters. 113, 4, 041104.

  Research output: Contribution to journal › Article › Scientific › peer-review
  6 Citations (Scopus)

• Photomic Devices and Methods of Using and Making Photonic Devices

  Purnawirman, P., Watts, M. R., Hosseini, E. S., Bradley, J. B., Sun, J. & Cherchi, M., 10 May 2018, IPC No. H01S 3/23, Patent No. US2018131155 A1, Priority date 28 Sep 2017, Priority No. US201715718045

  Research output: Patent › Patent application

• 3μm silicon photonics

  Aalto, T., Cherchi, M., Harjanne, M., Sun, F. & Kapulainen, M., 1 Jan 2018, 2018 Optical Fiber Communications Conference and Exposition, OFC 2018 - Proceedings. Optical Society of America OSA, Vol. Part F84-OFC 2018. p. 3-5 3 p. TU3A.5

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  2 Citations (Scopus)

• High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

  Pitanti, A., Makkonen, T., Colombano, M. F., Zanotto, S., Vicarelli, L., Cecchini, M., Griol, A., Navarro-Urrios, D., Sotomayor-Torres, C., Martinez, A. & Ahopelto, J., 17 Jul 2020, In: Physical Review Applied. 14, 1, 014054.

  Research output: Contribution to journal › Article › Scientific › peer-review
  1 Citation (Scopus)

• ePIXfab: The silicon photonics platform

  Khanna, A., Drissi, Y., Dumon, P., Baets, R., Absil, P., Pozo, J., Lo Cascio, D. M. R., Fournier, M., Fedeli, J-M., Fulbert, L., Zimmermann, L., Tillack, B., Aalto, T., O'Brien, P., Deptuck, D., Xu, J. & Gale, D., 2013, Integrated Photonics: Materials, Devices, and Applications II. Fedeli, J-M., Vivien, L. & Smit, M. K. (eds.). International Society for Optics and Photonics SPIE, 87670H. (Proceedings of SPIE, Vol. 8767).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  7 Citations (Scopus)

• Open-Access Silicon Photonics Platforms in Europe

  Rahim, A., Goyvaerts, J., Szelag, B., Fedeli, J. M., Absil, P., Aalto, T., Harjanne, M., Littlejohns, C. G., Reed, G. T., Winzer, G., Lischke, S., Lars, Z., Knoll, D., Geuzebroek, D., Leinse, A., Geiselmann, M., Zervas, M., Jans, H., Stassen, A., Dominguez, C. & 5 others, Munoz, P., Domenech, D., Giesecke, A. L., Lemme, M. C. & Baets, R., 1 Sep 2019, In: IEEE Journal on Selected Topics in Quantum Electronics. 25, 5, 8712400.

  Research output: Contribution to journal › Article › Scientific › peer-review
  24 Citations (Scopus)

• Polarization splitters for micron-scale silicon photonics

  Shahwar, D., Cherchi, M., Harjanne, M., Kapulainen, M. & Aalto, T., 2021, Silicon Photonics XVI. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 1169104. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 11691).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Filtering on a micron-scale silicon photonics platform

  Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M. & Aalto, T., 2013, IEEE 10th International Conference on Group IV Photonics, GFP 2013. IEEE Institute of Electrical and Electronic Engineers, p. 25-26

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Optical interconnects based on VCSELs and low-loss silicon photonics

  Aalto, T., Harjanne, M., Karppinen, M., Cherchi, M., Sitomaniemi, A., Ollila, J., Malacarne, A. & Neumeyr, C., 1 Jan 2018, Optical Interconnects XVIII. International Society for Optics and Photonics SPIE, 1053816. (Proceedings of SPIE, Vol. 10538).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  2 Citations (Scopus)

• 1.3μm u-bend traveling wave SOA devices for high efficiency coupling to silicon photonics

  Viheriälä, J., Tuorila, H., Zia, N., Cherchi, M., Aalto, T. & Guina, M., 4 Mar 2019, Silicon Photonics XIV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 7 p. 109230E. (Proceedings of SPIE, Vol. 10923).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Fabrication tolerant polarization splitters for micron-scale silicon photonics: Master's thesis

  Shahwar, D., 23 Jul 2019, University of Eastern Finland.

  Research output: Thesis › Master's thesis › Theses

• Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene: Dissertation

  Arpiainen, S., 2015, Espoo: VTT Technical Research Centre of Finland. 78 p.

  Research output: Thesis › Dissertation › Collection of Articles

  Open Access

• Silicon photonics for optical connectivity: Small footprint with large dimensions

  Aalto, T., Cherchi, M., Harjanne, M., Ylinen, S. & Kapulainen, M., 1 Jan 2015, 2015 IEEE Optical Interconnects Conference (OI). IEEE Institute of Electrical and Electronic Engineers, p. 40-41 2 p. 7115676

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  5 Citations (Scopus)

• Micron-scale silicon photonics with multi-mode interference couplers for chiral spirals and flat-top filters

  Aalto, T., Cherchi, M., Ylinen, S., Kapulainen, M. & Harjanne, M., 2015, Northern Optics & Photonics 2015. University of Eastern Finland, 33

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

• GaSb diode lasers tunable around 2.6 μm using silicon photonics resonators or external diffractive gratings

  Ojanen, S. P., Viheriälä, J., Cherchi, M., Zia, N., Koivusalo, E., Karioja, P. & Guina, M., 27 Feb 2020, In: Applied Physics Letters. 116, 8, 081105.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  1 Citation (Scopus)

• Polarization-independent, low-loss and micro-scale silicon photonics for high-dense GPON OLT application

  Fu, S., Man, J., Zhang, Q., Li, Z., Cherchi, M., Sun, F., Karppinen, M. & Zeng, L., 2016, Asia Communications and Photonics Conference 2016. Optical Society of America OSA, AF4F.1

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  Open Access

• Development and scalability of a 2 Tb/s data transmission module based on a3 μm SOI silicon photonics platform

  Delrosso, G. & Bhat, S., 2020, 2020 22nd International Conference on Transparent Optical Networks, ICTON 2020. IEEE Institute of Electrical and Electronic Engineers, 5 p. (International Conference on Transparent Optical Networks, Vol. 22).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)

• Precise length definition of active GaAs-based optoelectronic devices for low-loss silicon photonics integration

  Tuorila, H., Viheriälä, J., Zia, N., Cherchi, M., Harjanne, M., Isoaho, R., Aalto, T. & Guina, M., 15 Feb 2020, In: Optics Letters. 45, 4, p. 943-946 4 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Semiconductor Optical Amplifier with U-bend Geometry for Simplified Coupling to Silicon Photonics Waveguides

  Tuorila, H., Viheriälä, J., Cherchi, M., Aho, A., Aalto, T. & Guina, M., 15 Nov 2018, 2018 European Conference on Optical Communication, ECOC 2018. IEEE Institute of Electrical and Electronic Engineers, 8535103

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• GaSb-based 2.55 µm external cavity diode lasers employing ruled diffraction gratings and external silicon photonics vernier reflectors

  Ojanen, S. P., Viheriälä, J., Cherchi, M., Zia, N., Koivusalo, E., Karioja, P. & Guina, M., 1 Jan 2019, 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE Institute of Electrical and Electronic Engineers, 1 p. (Optics InfoBase Conference Papers).

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

• Launching of multi-project wafer runs in ePIXfab with micron-scale silicon rib waveguide technology

  Aalto, T., Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M. & Vehmas, T., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 899003. (Proceedings of SPIE, Vol. 8990).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  6 Citations (Scopus)

• Flat-top interleavers based on single MMIs

  Cherchi, M., Sun, F., Kapulainen, M., Harjanne, M. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). Bellingham: International Society for Optics and Photonics SPIE, 112850G. (Proceedings of SPIE, Vol. 11285).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Chiral spiral waveguides based on MMI crossings: Theory and experiments

  Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T. & Aalto, T., 1 Jan 2016, Silicon Photonics XI. International Society for Optics and Photonics SPIE, 975215. (Proceedings of SPIE, Vol. 9752).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Flat-top MZI filters: A novel robust design based on MMI splitters

  Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T. & Aalto, T., 1 Jan 2016, Silicon Photonics XI. International Society for Optics and Photonics SPIE, 975210. (Proceedings of SPIE, Vol. 9752).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  Open Access
  3 Citations (Scopus)

• Second order add/drop filter with a single ring resonator

  Cherchi, M., Sun, F., Kapulainen, M., Vehmas, T., Harjanne, M. & Aalto, T., 1 Jan 2017, Silicon Photonics XII. Knights, A. P. & Reed, G. T. (eds.). International Society for Optics and Photonics SPIE, 101080B. (Proceedings of SPIE, Vol. 10108).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)

• Fabrication tolerant flat-top interleavers

  Cherchi, M., Sun, F., Kapulainen, M., Vehmas, T., Harjanne, M. & Aalto, T., 1 Jan 2017, Silicon Photonics XII. Knights, A. P. & Reed, G. T. (eds.). International Society for Optics and Photonics SPIE, 101080V. (Proceedings of SPIE, Vol. 10108).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  4 Citations (Scopus)

• Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 μm SOI platform

  Bera, A., Cherchi, M., Tappura, K., Heimala, P. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 1128507. (Proceedings of SPIE, Vol. 11285).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Experimental demonstration of chiral spiral waveguides without waveguide crossings

  Aalto, T., Cherchi, M., Ylinen, S., Kapulainen, M., Harjanne, M. & Vehmas, T., 2015, 2015 European Conference on Lasers and Electro-Optics: European Quantum Electronics Conference. Optical Society of America OSA, CH_6_1

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Photonic integrated circuits based on silicon waveguides

  Aalto, T., Harjanne, M., Kapulainen, M., Solehmainen, K., Heimala, P., Mulot, M. & Arpiainen, S., 2006.

  Research output: Contribution to conference › Other conference contribution › Scientific

• Data Transmission at1.3 μmUsing Hybrid Integrated Silicon Interposer and GalnNAs/GaAs Electroabsorption Modulator

  Guina, M., Sheehan, R. N., Isoaho, R., Viheriälä, J., Harjanne, M., Malacarne, A., Falconi, F., Aalto, T. & Peters, F. H., 2018, 2018 European Conference on Optical Communication, ECOC 2018. IEEE Institute of Electrical and Electronic Engineers, 8535166

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Optical waveguide

  Aalto, T., 12 Jan 2005, IPC No. G02B 6/ 12 A N, Patent No. EP1495350, Priority date 11 Apr 2003, Priority No. WO2003FI00279

  Research output: Patent › Patent

• Optical Fiber

  Aalto, T., 27 Dec 2007, IPC No. G02B 6/ 24 A I, Patent No. US2007297738, Priority date 9 Jul 2004, Priority No. WO2004FI00444

  Research output: Patent › Patent

• Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

  Karvonen, L., Säynätjoki, A., Tu, X., Liow, T. Y., Hiltunen, M., Hiltunen, J., Tervonen, A., Lo, G. Q. & Honkanen, S., 2012, Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. Laurent, V. (ed.). International Society for Optics and Photonics SPIE, 84311M. (Proceedings of SPIE, Vol. 8431).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Low-loss delay lines with small footprint on a micron-scale SOI platform

  Cherchi, M., Harjanne, M., Vyrsokinos, K., Ylinen, S., Kapulainen, M., Vehmas, T. & Aalto, T., 27 Feb 2015, Silicon Photonics X . Reed, G. T. & Watts, M. R. (eds.). International Society for Optics and Photonics SPIE, 93670A. (Proceedings of SPIE, Vol. 9367).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)

• Comparison of different types of MMI-resonators fabricated on a micron-scale SOI platform

  Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T. & Aalto, T., 27 Feb 2015, Silicon Photonics X. Reed, G. T. & Watts, M. R. (eds.). International Society for Optics and Photonics SPIE, 936713. (Proceedings of SPIE, Vol. 9367).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Microneedle

  Gao, F., Hokkanen, A., Kiihamäki, J. & Heimala, P., 29 Feb 2012, IPC No. B81B 1/ 00 A I, Patent No. EP2421596, Priority date 20 Apr 2010, Priority No. WO2010FI50318

  Research output: Patent › Patent

• Integrated multi-wavelength Mid-IR light source for gas sensing

  Karioja, P., Alajoki, T., Cherchi, M., Ollila, J., Harjanne, M., Heinilehto, N., Suomalainen, S., Zia, N., Tuorila, H., Viheriälä, J., Guina, M., Buczynski, R., Kasztelanic, R., Salo, T., Virtanen, S., Kluczynski, P., Borgen, L., Ratajczyk, M. & Kalinowski, P., 2018, Next-Generation Spectroscopic Technologies XI. Druy, M. A., Barnett, S. M., Profeta, L. T. M., Crocombe, R. A. & Azad, A. K. (eds.). International Society for Optics and Photonics SPIE, 9 p. 106570A. (Proceedings of SPIE, Vol. 10657).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  Open Access

  File
  2 Citations (Scopus)

  154 Downloads (Pure)

• Low-loss spiral waveguides with ultra-small footprint on a micron scale SOI platform

  Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T. & Aalto, T., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 899005. (Proceedings of SPIE, Vol. 8990).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  19 Citations (Scopus)

• Fast 100-channel wavelength selectors integrated on silicon

  Aalto, T., Harjanne, M., Kapulainen, M., Ylinen, S. & Mörl, L., 2011, Silicon Photonics VI. International Society for Optics and Photonics SPIE, 9 p. 79430V. (Proceedings of SPIE, Vol. 7943).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  3 Citations (Scopus)

• Method for controlling an optoelectronic component

  Aalto, T., Kapulainen, M., Harjanne, M. & Roenoe, M., 1 Jun 2005, IPC No. G02F 1/ 01 A N, Patent No. EP1535107, Priority date 4 Sep 2003, Priority No. WO2003FI00649

  Research output: Patent › Patent

• Deeply etched MMI-based components on 4 μm thick SOI for SOA-based optical RAM cell circuits

  Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Aalto, T., Kanellos, G. T., Fitsios, D. & Pleros, N., 2013, Silicon Photonics VIII. Kubby, J. & Reed, G. T. (eds.). International Society for Optics and Photonics SPIE, 86290C. (Proceedings of SPIE, Vol. 8629).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  7 Citations (Scopus)

• The Euler bend: Paving the way for high-density integration on micron-scale semiconductor platforms

  Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T. & Aalto, T., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 899004. (Proceedings of SPIE, Vol. 8990).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  19 Citations (Scopus)

• Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides

  Aalto, T., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T. & Cherchi, M., 27 Feb 2015, Silicon Photonics X. Reed, G. T. & Watts, M. R. (eds.). International Society for Optics and Photonics SPIE, 93670B. (Proceedings of SPIE, Vol. 9367).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  10 Citations (Scopus)

• Flat-top interleavers: A novel approach based on MMI splitters

  Cherchi, M., Ylinen, S., Kapulainen, M., Harjanne, M., Vehmas, T. & Aalto, T., 2015, 2015 European Conference on Lasers and Electro-Optics : European Quantum Electronics Conference. Optical Society of America OSA, CI_P_7

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Fabrication-tolerant optical filters for dense integration on a micron-scale SOI platform

  Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T., Aalto, T., Kanellos, G. T., Fitsios, D. & Pleros, N., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 89900F. (Proceedings of SPIE, Vol. 8990).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  5 Citations (Scopus)

• Monolithic integration of up to 40 GHz Ge photodetectors in 3μm SOI

  Vehmas, T., Kapulainen, M., Heimala, P., Delrosso, G., Sun, F., Gao, F. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 112850V. (Proceedings of SPIE, Vol. 11285).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)