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Integration and Packaging of Optoelectronic and Silicon Photonic Chips on a µm-scale SOI Platform
Aalto, T., Harjanne, M., Kapulainen, M. & Ylinen, S., 2012, European Conference on Integrated Photonics website. 2 p. ThP128Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Professional
Open Access -
Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform
Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M. & Aalto, T., 29 Jul 2013, In: Optics Express. 21, 15, p. 17814-17823Research output: Contribution to journal › Article › Scientific › peer-review
Open Access116 Citations (Scopus) -
ESSenTIAL: EPIXfab services specifically targeting (SME) industrial takeup of advanced silicon photonics
Pozo, J., Kumar, P., Cascio, D. M. R. L., Khanna, A., Dumon, P., Delbeke, D., Baets, R., Fournier, M., Fedeli, J-M., Fulbert, L., Zimmermann, L., Tillack, B., Tian, H., Aalto, T., O'Brien, P., Deptuck, D., Xu, J., Zhang, X. & Gale, D., 2012, Proceedings: 14th International Conference on Transparent Optical Networks, ICTON 2012. IEEE Institute of Electrical and Electronic Engineers, 6254391Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
5 Citations (Scopus) -
Silicon Photonics
Aalto, T., Arpiainen, S., Harjanne, M., Kapulainen, M. & Sami, Y., 2009, Finland-Japan Workshop on Nanophotonics and Related Technologies. Espoo: VTT Technical Research Centre of Finland, p. 42-45 (VTT Symposium; No. 255).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Open Access -
Photomic Devices and Methods of Using and Making Photonic Devices
Purnawirman, P., Watts, M. R., Hosseini, E. S., Bradley, J. B., Sun, J. & Cherchi, M., 10 May 2018, IPC No. H01S 3/23, Patent No. US2018131155 A1, Priority date 28 Sep 2017, Priority No. US201715718045Research output: Patent › Patent application
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Low loss GaInNAs/GaAs gain waveguides with U-bend geometry for single-facet coupling in hybrid photonic integration
Tuorila, H., Viheriälä, J., Cherchi, M., Aho, A. T., Aalto, T. & Guina, M., 23 Jul 2018, In: Applied Physics Letters. 113, 4, 041104.Research output: Contribution to journal › Article › Scientific › peer-review
6 Citations (Scopus) -
3μm silicon photonics
Aalto, T., Cherchi, M., Harjanne, M., Sun, F. & Kapulainen, M., 1 Jan 2018, 2018 Optical Fiber Communications Conference and Exposition, OFC 2018 - Proceedings. Optical Society of America OSA, Vol. Part F84-OFC 2018. p. 3-5 3 p. TU3A.5Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2 Citations (Scopus) -
High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers
Pitanti, A., Makkonen, T., Colombano, M. F., Zanotto, S., Vicarelli, L., Cecchini, M., Griol, A., Navarro-Urrios, D., Sotomayor-Torres, C., Martinez, A. & Ahopelto, J., 17 Jul 2020, In: Physical Review Applied. 14, 1, 014054.Research output: Contribution to journal › Article › Scientific › peer-review
1 Citation (Scopus) -
ePIXfab: The silicon photonics platform
Khanna, A., Drissi, Y., Dumon, P., Baets, R., Absil, P., Pozo, J., Lo Cascio, D. M. R., Fournier, M., Fedeli, J-M., Fulbert, L., Zimmermann, L., Tillack, B., Aalto, T., O'Brien, P., Deptuck, D., Xu, J. & Gale, D., 2013, Integrated Photonics: Materials, Devices, and Applications II. Fedeli, J-M., Vivien, L. & Smit, M. K. (eds.). International Society for Optics and Photonics SPIE, 87670H. (Proceedings of SPIE, Vol. 8767).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
7 Citations (Scopus) -
Open-Access Silicon Photonics Platforms in Europe
Rahim, A., Goyvaerts, J., Szelag, B., Fedeli, J. M., Absil, P., Aalto, T., Harjanne, M., Littlejohns, C. G., Reed, G. T., Winzer, G., Lischke, S., Lars, Z., Knoll, D., Geuzebroek, D., Leinse, A., Geiselmann, M., Zervas, M., Jans, H., Stassen, A., Dominguez, C. & 5 others, , 1 Sep 2019, In: IEEE Journal on Selected Topics in Quantum Electronics. 25, 5, 8712400.Research output: Contribution to journal › Article › Scientific › peer-review
14 Citations (Scopus) -
Filtering on a micron-scale silicon photonics platform
Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M. & Aalto, T., 2013, IEEE 10th International Conference on Group IV Photonics, GFP 2013. IEEE Institute of Electrical and Electronic Engineers, p. 25-26Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Optical interconnects based on VCSELs and low-loss silicon photonics
Aalto, T., Harjanne, M., Karppinen, M., Cherchi, M., Sitomaniemi, A., Ollila, J., Malacarne, A. & Neumeyr, C., 1 Jan 2018, Optical Interconnects XVIII. International Society for Optics and Photonics SPIE, 1053816. (Proceedings of SPIE, Vol. 10538).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2 Citations (Scopus) -
Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene: Dissertation
Arpiainen, S., 2015, Espoo: VTT Technical Research Centre of Finland. 78 p.Research output: Thesis › Dissertation › Collection of Articles
Open Access -
Fabrication tolerant polarization splitters for micron-scale silicon photonics: Master's thesis
Shahwar, D., 23 Jul 2019, University of Eastern Finland.Research output: Thesis › Master's thesis
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1.3μm u-bend traveling wave SOA devices for high efficiency coupling to silicon photonics
Viheriälä, J., Tuorila, H., Zia, N., Cherchi, M., Aalto, T. & Guina, M., 4 Mar 2019, Silicon Photonics XIV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 7 p. 109230E. (Proceedings of SPIE, Vol. 10923).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Silicon photonics for optical connectivity: Small footprint with large dimensions
Aalto, T., Cherchi, M., Harjanne, M., Ylinen, S. & Kapulainen, M., 1 Jan 2015, 2015 IEEE Optical Interconnects Conference (OI). IEEE Institute of Electrical and Electronic Engineers, p. 40-41 2 p. 7115676Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
5 Citations (Scopus) -
Micron-scale silicon photonics with multi-mode interference couplers for chiral spirals and flat-top filters
Aalto, T., Cherchi, M., Ylinen, S., Kapulainen, M. & Harjanne, M., 2015, Northern Optics & Photonics 2015. University of Eastern Finland, 33Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
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GaSb diode lasers tunable around 2.6 μm using silicon photonics resonators or external diffractive gratings
Ojanen, S. P., Viheriälä, J., Cherchi, M., Zia, N., Koivusalo, E., Karioja, P. & Guina, M., 27 Feb 2020, (E-pub ahead of print) In: Applied Physics Letters. 116, 8, 081105.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
Polarization-independent, low-loss and micro-scale silicon photonics for high-dense GPON OLT application
Fu, S., Man, J., Zhang, Q., Li, Z., Cherchi, M., Sun, F., Karppinen, M. & Zeng, L., 2016, Asia Communications and Photonics Conference 2016. Optical Society of America OSA, AF4F.1Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Open Access -
Precise length definition of active GaAs-based optoelectronic devices for low-loss silicon photonics integration
Tuorila, H., Viheriälä, J., Zia, N., Cherchi, M., Harjanne, M., Isoaho, R., Aalto, T. & Guina, M., 15 Feb 2020, In: Optics Letters. 45, 4, p. 943-946 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
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Development and scalability of a 2 Tb/s data transmission module based on a3 μm SOI silicon photonics platform
Delrosso, G. & Bhat, S., 2020, 2020 22nd International Conference on Transparent Optical Networks, ICTON 2020. IEEE Institute of Electrical and Electronic Engineers, 5 p. (International Conference on Transparent Optical Networks, Vol. 22).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1 Citation (Scopus) -
Semiconductor Optical Amplifier with U-bend Geometry for Simplified Coupling to Silicon Photonics Waveguides
Tuorila, H., Viheriälä, J., Cherchi, M., Aho, A., Aalto, T. & Guina, M., 15 Nov 2018, 2018 European Conference on Optical Communication, ECOC 2018. IEEE Institute of Electrical and Electronic Engineers, 8535103Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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GaSb-based 2.55 µm external cavity diode lasers employing ruled diffraction gratings and external silicon photonics vernier reflectors
Ojanen, S. P., Viheriälä, J., Cherchi, M., Zia, N., Koivusalo, E., Karioja, P. & Guina, M., 1 Jan 2019, 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC). IEEE Institute of Electrical and Electronic Engineers, 1 p. (Optics InfoBase Conference Papers).Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
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Launching of multi-project wafer runs in ePIXfab with micron-scale silicon rib waveguide technology
Aalto, T., Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M. & Vehmas, T., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 899003. (Proceedings of SPIE, Vol. 8990).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
6 Citations (Scopus) -
Flat-top interleavers based on single MMIs
Cherchi, M., Sun, F., Kapulainen, M., Harjanne, M. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). Bellingham: International Society for Optics and Photonics SPIE, 112850G. (Proceedings of SPIE, Vol. 11285).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Chiral spiral waveguides based on MMI crossings: Theory and experiments
Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T. & Aalto, T., 1 Jan 2016, Silicon Photonics XI. International Society for Optics and Photonics SPIE, 975215. (Proceedings of SPIE, Vol. 9752).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Flat-top MZI filters: A novel robust design based on MMI splitters
Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T. & Aalto, T., 1 Jan 2016, Silicon Photonics XI. International Society for Optics and Photonics SPIE, 975210. (Proceedings of SPIE, Vol. 9752).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Open Access3 Citations (Scopus) -
Second order add/drop filter with a single ring resonator
Cherchi, M., Sun, F., Kapulainen, M., Vehmas, T., Harjanne, M. & Aalto, T., 1 Jan 2017, Silicon Photonics XII. Knights, A. P. & Reed, G. T. (eds.). International Society for Optics and Photonics SPIE, 101080B. (Proceedings of SPIE, Vol. 10108).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1 Citation (Scopus) -
Fabrication tolerant flat-top interleavers
Cherchi, M., Sun, F., Kapulainen, M., Vehmas, T., Harjanne, M. & Aalto, T., 1 Jan 2017, Silicon Photonics XII. Knights, A. P. & Reed, G. T. (eds.). International Society for Optics and Photonics SPIE, 101080V. (Proceedings of SPIE, Vol. 10108).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
4 Citations (Scopus) -
Experimental demonstration of chiral spiral waveguides without waveguide crossings
Aalto, T., Cherchi, M., Ylinen, S., Kapulainen, M., Harjanne, M. & Vehmas, T., 2015, 2015 European Conference on Lasers and Electro-Optics: European Quantum Electronics Conference. Optical Society of America OSA, CH_6_1Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 μm SOI platform
Bera, A., Cherchi, M., Tappura, K., Heimala, P. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 1128507. (Proceedings of SPIE, Vol. 11285).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Data Transmission at1.3 μmUsing Hybrid Integrated Silicon Interposer and GalnNAs/GaAs Electroabsorption Modulator
Guina, M., Sheehan, R. N., Isoaho, R., Viheriälä, J., Harjanne, M., Malacarne, A., Falconi, F., Aalto, T. & Peters, F. H., 2018, 2018 European Conference on Optical Communication, ECOC 2018. IEEE Institute of Electrical and Electronic Engineers, 8535166Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Photonic integrated circuits based on silicon waveguides
Aalto, T., Harjanne, M., Kapulainen, M., Solehmainen, K., Heimala, P., Mulot, M. & Arpiainen, S., 2006.Research output: Contribution to conference › Other conference contribution › Scientific
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Flat-top interleavers: A novel approach based on MMI splitters
Cherchi, M., Ylinen, S., Kapulainen, M., Harjanne, M., Vehmas, T. & Aalto, T., 2015, 2015 European Conference on Lasers and Electro-Optics : European Quantum Electronics Conference. Optical Society of America OSA, CI_P_7Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Possibilities of optical microsystems in environmental measurements
Hokkanen, A., 1999, SIHTI 2: Energy and Environmental Technology, Final report 1993-1998. Alakangas, E. (ed.). p. 211-212Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific
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Low-loss delay lines with small footprint on a micron-scale SOI platform
Cherchi, M., Harjanne, M., Vyrsokinos, K., Ylinen, S., Kapulainen, M., Vehmas, T. & Aalto, T., 27 Feb 2015, Silicon Photonics X . Reed, G. T. & Watts, M. R. (eds.). International Society for Optics and Photonics SPIE, 93670A. (Proceedings of SPIE, Vol. 9367).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1 Citation (Scopus) -
Comparison of different types of MMI-resonators fabricated on a micron-scale SOI platform
Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M., Vehmas, T. & Aalto, T., 27 Feb 2015, Silicon Photonics X. Reed, G. T. & Watts, M. R. (eds.). International Society for Optics and Photonics SPIE, 936713. (Proceedings of SPIE, Vol. 9367).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Low-loss spiral waveguides with ultra-small footprint on a micron scale SOI platform
Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T. & Aalto, T., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 899005. (Proceedings of SPIE, Vol. 8990).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
18 Citations (Scopus) -
Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films
Karvonen, L., Säynätjoki, A., Tu, X., Liow, T. Y., Hiltunen, M., Hiltunen, J., Tervonen, A., Lo, G. Q. & Honkanen, S., 2012, Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. Laurent, V. (ed.). International Society for Optics and Photonics SPIE, 84311M. (Proceedings of SPIE, Vol. 8431).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Fast 100-channel wavelength selectors integrated on silicon
Aalto, T., Harjanne, M., Kapulainen, M., Ylinen, S. & Mörl, L., 2011, Silicon Photonics VI. International Society for Optics and Photonics SPIE, 9 p. 79430V. (Proceedings of SPIE, Vol. 7943).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Citations (Scopus) -
Condition monitoring of high temperature power plant components using metal embedded fibre optical bragg gratings: Final report, Part 1
Sandlin, S. & Hokkanen, A., 2003, TUKEVA: Research Programme on Future Mechanical Engineering 2000-2003. Hakalehto, K. & Mattila, M. (eds.). Suomen akatemia, p. 96-108Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review
Open Access -
Deeply etched MMI-based components on 4 μm thick SOI for SOA-based optical RAM cell circuits
Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Aalto, T., Kanellos, G. T., Fitsios, D. & Pleros, N., 2013, Silicon Photonics VIII. Kubby, J. & Reed, G. T. (eds.). International Society for Optics and Photonics SPIE, 86290C. (Proceedings of SPIE, Vol. 8629).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
7 Citations (Scopus) -
The Euler bend: Paving the way for high-density integration on micron-scale semiconductor platforms
Cherchi, M., Ylinen, S., Harjanne, M., Kapulainen, M., Vehmas, T. & Aalto, T., 2014, SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials. International Society for Optics and Photonics SPIE, 899004. (Proceedings of SPIE, Vol. 8990).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
19 Citations (Scopus) -
Use of brazing technique for manufacturing of a high temperature fiber optical displacement transducer
Sandlin, S., Kosonen, T., Hokkanen, A. & Heikinheimo, L., 2006, Brazing and Soldering: Proceedings of the third international brazing and soldering conference. ASM International, 176Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Roll to roll method produce fluidics channels on plastic web
Mäkelä, T., Haatainen, T., Majander, P. & Ahopelto, J., 2007.Research output: Contribution to conference › Conference article › Scientific › peer-review
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Roll to roll method produce fluidics channels on plastic web
Mäkelä, T., Haatainen, T., Majander, P. & Ahopelto, J., 2007.Research output: Contribution to conference › Conference article › Scientific › peer-review
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RR-P3HT based organic diode
Hassinen, T., Sandberg, H., Jussila, S. & Mäkelä, T., 2006, Proceedings of the XL Annual Conference of the Finnish Physical Society. Tampere University of Technology, 224Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
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Optical transceiver engine based on 12 μm Silicon-on-insulator waveguides and VCSELs
Karppinen, M., Harjanne, M., Vehmas, T., Neumeyr, C., Sitomaniemi, A., Ollila, J., Kapulainen, M., Tanskanen, A., Heimala, P. & Aalto, T., 2019. 3 p.Research output: Contribution to conference › Conference article › Scientific
Open Access -
Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography
Haatainen, T., Majander, P., Mäkelä, T., Ahopelto, J. & Kawaguchi, Y., 2007.Research output: Contribution to conference › Conference article › Scientific › peer-review
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Comparison of step and repeat method of thermal and UV-imprinting using a commercial nanoimprint stepper
Haatainen, T., Majander, P., Mäkelä, T. & Ahopelto, J., 2007.Research output: Contribution to conference › Conference article › Scientific › peer-review