Find Research outputs

Search results

• 2021

  A Josephson traveling wave parametric amplifier featuring superconducting nonlinear asymmetric inductive elements

  Vesterinen, V., Datta, D., Tiencken, N., Simbierowicz, S., Najafi Jabdaraghi, L. R., Grönberg, L., Lehtinen, J., Prunnila, M. & Govenius, J., 16 Mar 2021.

  Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

• Cascaded superconducting junction refrigerators: Optimization and performance limits

  Kemppinen, A., Ronzani, A., Mykkänen, E., Hätinen, J., Lehtinen, J. S. & Prunnila, M., 2 Aug 2021, In: Applied Physics Letters. 119, 5, 5 p., 052603.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
  6 Downloads (Pure)

• Characterization of Al-based Airbridges for Superconducting Microwave Devices

  Najafi Jabdaraghi, R. L., Grönberg, L., Vesterinen, V. & Prunnila, M., 21 Mar 2021.

  Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

• Dispersive readout of reconfigurable ambipolar quantum dots in a silicon-on-insulator nanowire

  Duan, J., Lehtinen, J. S., Fogarty, M. A., Schaal, S., Lam, M. M. L., Ronzani, A., Shchepetov, A., Koppinen, P., Prunnila, M., Gonzalez-Zalba, F. & Morton, J. J. L., 19 Apr 2021, In: Applied Physics Letters. 118, 16, 164002.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

• Millimeter-Wave Amplifier-Based Noise Sources in SiGe BiCMOS Technology

  Forsten, H., Saijets, J. H., Kantanen, M., Varonen, M., Kaynak, M. & Piironen, P., 25 Aug 2021, (E-pub ahead of print) In: IEEE Transactions on Microwave Theory and Techniques.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
  9 Downloads (Pure)

• Nano-thermoelectric infrared bolometers

  Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Kilpi, O. P., Sovanto, K., Ahopelto, J. & Prunnila, M., Mar 2021, In: APL Photonics. 6, 3, 036111.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
  23 Downloads (Pure)

• Phonon-blocked junction refrigerators for cryogenic quantum devices

  Mykkanen, E., Lehtinen, J. S., Ronzani, A., Kemppinen, A., Alkurdi, A., Chapuis, P. O. & Prunnila, M., 11 Mar 2021, In: Technical Digest - International Electron Devices Meeting, IEDM. p. 25.8.1-25.8.4

  Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

• Study on exploring the possible employment implications of connected and automated driving - Final Report

  Smit, G., Flickenschild, M., Verkennis, N., Martino, A., De Stasio, C., Fiorello, D., Schade, W., Scherf, C., Berthold, D., Stich, M., Öörni, R., Fougeyrollas, A., Dreher, S., Giro, C., Tozzi, M. & Saeidizand, P., 13 Jan 2021, Rotterdam: ECORYS. 160 p.

  Research output: Book/Report › Report

  Open Access

  File
  408 Downloads (Pure)

• Sub-GHz Josephson parametric amplifiers for the readout of sensors and quantum dots

  Vesterinen, V., Simbierowicz, S., Najafi Jabdaraghi, L. R., Grönberg, L., Lehtinen, J., Prunnila, M. & Govenius, J., 16 Mar 2021.

  Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

• Vertical integration of superconducting solid state coolers

  Hätinen, J., 24 Aug 2021, 45 p.

  Research output: Thesis › Master's thesis › Theses

  Open Access

  File
  11 Downloads (Pure)
• 2020

  Characterization of Al-based Airbridges for Superconducting Microwave Devices

  Najafi Jabdaraghi, L. R., Grönberg, L., Vesterinen, V. & Prunnila, M., 6 Mar 2020.

  Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

• Characterization of Al-based Airbridges for Superconducting Microwave Devices

  Najafi Jabdaraghi, R., Grönberg, L., Vesterinen, V. & Prunnila, M., 6 Mar 2020, In: Bulletin of the American Physical Society. 65, 1, 1 p.

  Research output: Contribution to journal › Article in a proceedings journal › Scientific

  Open Access

• Coulomb Blockade Thermometry on a Wide Temperature Range

  Hahtela, O. M., Kemppinen, A., Lehtinen, J., Manninen, A. J., Mykkänen, E., Prunnila, M., Yurttagul, N., Blanchet, F., Gramich, M., Karimi, B., Mannila, E. T., Muhojoki, J., Peltonen, J. T. & Pekola, J. P., 2020, 2020 Conference on Precision Electromagnetic Measurements, CPEM 2020. IEEE Institute of Electrical and Electronic Engineers, p. 1-2

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Distinction of the thermoelectric effect in graphene FET THz detectors

  Generalov, A. A., Ludwig, F., Ahmadi, M., Bonmann, M., Vorobiev, A., Soikkeli, M., Arpiainen, S., Prunnila, M., Stake, J., Roskos, H. G. & Sun, Z., 8 Nov 2020, 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020. IEEE Institute of Electrical and Electronic Engineers, p. 504-505 2 p. 9370957. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2020-November).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Enhancement of Superconductivity by Amorphizing Molybdenum Silicide Films Using a Focused Ion Beam

  Mykkänen, E., Bera, A., Lehtinen, J. S., Ronzani, A., Kohopää, K., Hönigl-decrinis, T., Shaikhaidarov, R., De Graaf, S. E., Govenius, J. & Prunnila, M., 16 May 2020, In: Nanomaterials. 10, 5, 950.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
  2 Citations (Scopus)

  22 Downloads (Pure)

• High-performance infrared thermoelectric bolometers based on nanomembranes

  Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 26 Feb 2020, Photonic and Phononic Properties of Engineered Nanostructures X. Adibi, A., Lin, S-Y. & Scherer, A. (eds.). International Society for Optics and Photonics SPIE, 112891O. (Proceedings of SPIE, Vol. 11289).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  Open Access

  File
  1 Citation (Scopus)

  37 Downloads (Pure)

• Josephson Parametric Amplifiers Fabricated in Wafer-scale with Side-wall Passivated Spacer Junction Technology

  Vesterinen, V., Simbierowicz, S., Grönberg, L., Lehtinen, J., Najafi Jabdaraghi, R. L., Prunnila, M. & Govenius, J., 6 Mar 2020, In: Bulletin of the American Physical Society. 65, 1, 1 p.

  Research output: Contribution to journal › Article in a proceedings journal › Scientific

  Open Access

• Josephson Parametric Amplifiers Fabricated in Wafer-scale with Side-wall Passivated Spacer Junction Technology

  Vesterinen, V., Simbierowicz, S., Grönberg, L., Lehtinen, J., Najafi Jabdaraghi, L. R., Prunnila, M. & Govenius, J., 6 Mar 2020.

  Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

• MoS2 Based High-Performance FET Devices for Memory Circuits on Flexible Platform

  Majumdar, S., Arpiainen, S., Soikkeli, M., Aspiotis, N., Huang, C-C., Prunnila, M. & Zeimpekis, I., 2020.

  Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

• Readout Range and Sensing Resolution Optimization of a Reader for Fully Passive Wireless Sensors

  McCaffrey, C., Flak, J. & Pursula, P., 2020, In: IEEE Transactions on Instrumentation and Measurement. 69, 10, p. 7846-7856 11 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

• Review of LTCC Technology for Millimeter Waves and Photonics

  Lahti, M., Kautio, K., Karppinen, M., Ollila, J., Keränen, K. & Karioja, P., 1 Jun 2020, In: International Journal of Electronics and Telecommunications. 66, 2, p. 361-367 7 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
  244 Downloads (Pure)

• Thermionic junction devices utilizing phonon blocking

  Mykkänen, E., Lehtinen, J. S., Grönberg, L., Shchepetov, A., Timofeev, A. V., Gunnarsson, D., Kemppinen, A., Manninen, A. J. & Prunnila, M., 2020, In: Science advances. 6, 15, eaax9191.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  3 Citations (Scopus)
• 2019

  Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

  Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society (AVS)

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

  Open Access

• All-Silicon Spectrally Resolved Interferometric Circuit for Multiplexed Diagnostics: A Monolithic Lab-on-a-Chip Integrating All Active and Passive Components

  Misiakos, K., Makarona, E., Hoekman, M., Fyrogenis, R., Tukkiniemi, K., Jobst, G., Petrou, P. S., Kakabakos, S. E., Salapatas, A., Goustouridis, D., Harjanne, M., Heimala, P. & Raptis, I., 13 Jun 2019, In: ACS Photonics. 6, 7, p. 1694-1705 12 p.

  Research output: Contribution to journal › Article › Scientific › peer-review
  7 Citations (Scopus)

• Conformality in atomic layer deposition: Current status overview of analysis and modelling

  Cremers, V., Puurunen, R. L. & Dendooven, J., 1 Jun 2019, In: Applied Physics Reviews. 6, 2, 44 p., 021302.

  Research output: Contribution to journal › Review Article › Scientific › peer-review

  Open Access
  101 Citations (Scopus)

• Cryogenic Operation of a Millimeter-Wave SiGe BiCMOS Low-Noise Amplifier

  Ramírez, W., Forstén, H., Varonen, M., Reeves, R., Kantanen, M., Mehmet, K. & Torres, S., 1 Jun 2019, In: IEEE Microwave and Wireless Components Letters. 29, 6, p. 403-405 3 p., 8708938.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access

  File
  4 Citations (Scopus)

  80 Downloads (Pure)

• Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

  Silander, I., Hausmaninger, T., Forssén, C., Zelan, M. & Axner, O., 2019, In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 4, 042901.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  9 Citations (Scopus)

• Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

  Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
• 2018

  Design of an E-band Doherty Power amplifier

  Najmussadat, M., Ahamed, R., Parveg, D., Varonen, M. & Halonen, K. A. I., 8 Aug 2018, PRIME 2018 - 14th Conference on Ph.D. Research in Microelectronics and Electronics. IEEE Institute of Electrical and Electronic Engineers, p. 145-148 4 p. 8430350

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  2 Citations (Scopus)

• Digitalisation of Maintenance

  Jantunen, E., Campos, J., Sharma, P. & Baglee, D., 29 Jan 2018, 2017 2nd International Conference on System Reliability and Safety, ICSRS 2017. IEEE Institute of Electrical and Electronic Engineers, p. 343-347

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

  File
  5 Citations (Scopus)

  45 Downloads (Pure)

• Enhanced silicon-on-insulator platform enabling new structures and applications

  Haapalinna, A. & Aalto, T., 7 Mar 2018, 2017 IEEE SOI-3D-Subthreshold Microelectronics Unified Conference, S3S 2017. IEEE Institute of Electrical and Electronic Engineers, p. 1-3 3 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)

• Improving the performance of advertising LED displays by in-mould integration

  Juntunen, E., Gandhi, V., Ylimaula, S. & Huttunen, A., 2 Aug 2018, 2018 IMAPS Nordic Conference on Microelectronics Packaging: NordPack 2018. IEEE Institute of Electrical and Electronic Engineers, p. 52-56 5 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

  Keskiväli, L., Putkonen, M., Puhakka, E., Kenttä, E., Kint, J., Ramachandran, R. K., Detavernier, C. & Simell, P., 31 Jul 2018, In: ACS Omega. 3, 7, p. 7141-7149 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  3 Citations (Scopus)

• Reliability assessment and failure mode analysis of MEMS accelerometers for space applications

  Marozau, I., Auchlin, M., Pejchal, V., Souchon, F., Vogel, D., Lahti, M., Saillen, N. & Sereda, O., 1 Sep 2018, In: Microelectronics Reliability. 88-90, p. 846-854 9 p.

  Research output: Contribution to journal › Article › Scientific › peer-review
  8 Citations (Scopus)
• 2017

  A broadband millimetre-wave vivaldi antenna on LTCC

  Gagnon, N., Petosa, A., Panther, A. & Kautio, K., 28 Feb 2017, ANTEM 2006 12th International Symposium on Antenna Technology and Applied Electromagnetics and Canadian Radio Sciences Conference. IEEE Institute of Electrical and Electronic Engineers

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

  Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers, p. 1-5 5 p.

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Hybrid Organic-Inorganic Nanostructures for Spin Switching and Spintronic Applications

  Majumdar, S., Sliwinski, G. & Garcia, Y., 2017, Hybrid Organic‐Inorganic Interfaces: Towards Advanced Functional Materials. Delville, M-H. & Taubert, A. (eds.). Wiley, Vol. 1. p. 301

  Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

• Inkjet printed metallic micropillars for bare die flip-chip bonding

  Khorramdel, B., Kraft, T. M. & Mäntysalo, M., 1 Dec 2017, In: Flexible and Printed Electronics. 2, 4, 045005.

  Research output: Contribution to journal › Article › Scientific › peer-review
  5 Citations (Scopus)

• Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements

  Stam, F., Kuisma, H., Gao, F., Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Marrinan, B. & Pintal, S., 1 Jan 2017, Bio-MEMS and Medical Microdevices III. Giouroudi, I., Giouroudi, I., Delgado-Restituto, M. & van den Driesche, S. (eds.). International Society for Optics and Photonics SPIE, 1024703. (Proceedings of SPIE, Vol. 10247).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

• Printed and low-temperature-processed indium oxide thin-film transistors for flexible applications: Dissertation

  Leppäniemi, J., 2017, Espoo: Aalto University. 162 p.

  Research output: Thesis › Dissertation › Collection of Articles

  Open Access

• R2R process for integrating LEDs on flexible substrate

  Juntunen, E., Ihme, S., Huttunen, A. & Mäkinen, J-T., 2017, 2017 IMAPS Nordic Conference on Microelectronics Packaging, NordPac 2017. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 7993155

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  4 Citations (Scopus)

• Review Article: Recommended reading list of early publications on atomic layer deposition: Outcome of the "Virtual Project on the History of ALD"

  Ahvenniemi, E., Akbashev, A., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D., Hwang, C. S., Jen, S-H., Kallio, T., Kanervo, J. & 42 others, Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, O., Kuhs, J., Kärkkänen, I., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Lapicki, A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D., Törndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. & Yurkevich, O., 1 Jan 2017, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 010801.

  Research output: Contribution to journal › Review Article › Scientific › peer-review

  Open Access
  43 Citations (Scopus)
• 2016

  Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

  Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In: Nano Energy. 26, p. 340-345

  Research output: Contribution to journal › Article › Scientific › peer-review

  Open Access
  59 Citations (Scopus)

• Optical and thermal simulation chain for LED package

  Tapaninen, O., Myöhänen, P., Majanen, M., Sitomaniemi, A., Olkkonen, J., Hildenbrand, V., Gielen, A. W. J., Mackenzie, F. V., Barink, M., Šmilauer, V. & Patzák, B., 5 May 2016, Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2016 17th International Conference on. IEEE Institute of Electrical and Electronic Engineers, p. 1-6

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  8 Citations (Scopus)

• Optimization of contact metallizations for reliable wafer level Au[sbnd]Sn bonds

  Vuorinen, V., Rautiainen, A., Heikkinen, H. & Paulasto-Kröckel, M., 1 Sep 2016, In: Microelectronics Reliability. 64, p. 676-680

  Research output: Contribution to journal › Article › Scientific › peer-review
  6 Citations (Scopus)

• Simulating light conversion in mid-power LEDs

  Alexeev, A., Cassarly, W., Hildenbrand, V. D., Tapaninen, O., Sitomaniemi, A. & Wondergem, A., 29 Apr 2016, 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016. IEEE Institute of Electrical and Electronic Engineers, 7463300

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  3 Citations (Scopus)
• 2015

  Application of Inkjet printing for 3D integration

  Eiroma, K. & Viljanen, H., 2015, NIP & Digital Fabrication Conference: 31st International Conference on Digital Printing Technologies (NIP 31) . The Society for Imaging Science and Technology, IS&T, Vol. 2015. p. 195-200

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  5 Citations (Scopus)

• Atomic layer deposited thin barrier films for packaging

  Vähä-Nissi, M., Pitkänen, M., Salo, E., Sievänen-Rahijärvi, J., Putkonen, M. & Harlin, A., 2015, In: Cellulose chemistry and technology. 49, 7-8, p. 575-585

  Research output: Contribution to journal › Article › Scientific › peer-review
  7 Citations (Scopus)

• Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene: Dissertation

  Arpiainen, S., 2015, Espoo: VTT Technical Research Centre of Finland. 78 p.

  Research output: Thesis › Dissertation › Collection of Articles

  Open Access

• Thin Film Piezomaterials for Bulk Acoustic Wave Technology

  Molarius, J., Riekkinen, T., Kulawski, M. & Ylilammi, M., 2015, The Nano-Micro Interface: Bridging the Micro and Nano Worlds. Van de Voorde, M., Werner, M. & Fecht, H-J. (eds.). 2nd ed. Wiley, p. 243-270

  Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional
  2 Citations (Scopus)