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2019

High-Accuracy autocollimator calibration by interferometric 2D angle generator

Heikkinen, V., Byman, V., Shpak, M., Geckeler, R., Just, A., Krause, M., Schumann, M. & Lassila, A., 9 Sep 2019, Advances in Metrology for X-Ray and EUV Optics VIII. Assoufid, L., Ohashi, H. & Asundi, A. K. (eds.). International Society for Optics and Photonics SPIE, 1110903. (Proceedings of SPIE, Vol. 11109).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

collimators
High Accuracy
Calibration
generators
Generator

Linking the optical and the mechanical measurements of dimension by a Newton's rings method

Balling, P., Ramotowski, Z., Szumski, R., Lassila, A., Křen, P. & Mašika, P., 8 Mar 2019, In : Metrologia. 56, 2, 14 p., 025008.

Research output: Contribution to journalArticleScientificpeer-review

Gage blocks
Gages
Interferometers
Steel
Surface roughness
2018

High accuracy step gauge interferometer

Byman, V., Jaakkola, T., Palosuo, I. & Lassila, A., 23 Mar 2018, In : Measurement Science and Technology. 29, 5, 054003.

Research output: Contribution to journalArticleScientificpeer-review

Interferometer
Interferometers
Gages
Gauge
High Accuracy

Interferometric step gauge for CMM verification

Hemming, B., Esala, V. P., Laukkanen, P., Rantanen, A., Viitala, R., Widmaier, T., Kuosmanen, P. & Lassila, A., 7 Jun 2018, In : Measurement Science and Technology. 29, 7, 074012.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Gage blocks
Coordinate Measuring Machine
Coordinate measuring machines
Gages
Gauge
2 Citations (Scopus)

Metrological characterization methods for confocal chromatic line sensors and optical topography sensors

Seppä, J., Niemelä, K. & Lassila, A., 9 Apr 2018, In : Measurement Science and Technology. 29, 5, 054008.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Confocal
Topography
topography
Sensor
Line

Online measurement of optical fibre geometry during manufacturing

Shpak, M., Burger, S., Byman, V., Saastamoinen, K., Haapalainen, M. & Lassila, A., 2018, Fiber Lasers and Glass Photonics: Materials through Applications. Taccheo, S., Mackenzie, J. I. & Ferrari, M. (eds.). International Society for Optics and Photonics SPIE, 1068318. (Proceedings of SPIE, Vol. 10683).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

concentricity
On-line Measurement
Optical Fiber
Optical fibers
manufacturing
1 Citation (Scopus)

Recent developments in traceable dimensional measurements

Schödel, R. & Lassila, A., 1 Jan 2018, In : Measurement Science and Technology. 29, 9, 090101.

Research output: Contribution to journalOther journal contributionScientific

Toward SI Traceability of a Monte Carlo Radiative Transfer Model in the Visible Range

Jaanson, P., Bialek, A., Greenwell, C., Mantynen, H., Widlowski, J. L., Manoocheri, F., Lassila, A., Fox, N. & Ikonen, E., Mar 2018, In : IEEE Transactions on Geoscience and Remote Sensing. 56, 3, p. 1360-1373 14 p.

Research output: Contribution to journalArticleScientificpeer-review

bidirectional reflectance
Radiative transfer
radiative transfer
optical property
scattering
2017
13 Citations (Scopus)

Application of Monte Carlo simulation for estimation of uncertainty of four-point roundness measurements of rolls

Widmaier, T., Hemming, B., Juhanko, J., Kuosmanen, P., Esala, V-P., Lassila, A., Laukkanen, P. & Haikio, J., 2017, In : Precision Engineering. 48, December, p. 181-190 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Rotors
Iron and steel industry
Uncertainty
Monte Carlo simulation
Machining
2 Citations (Scopus)

Atomic force microscope adhesion measurements and atomistic molecular dynamics simulations at different humidities

Seppä, J., Reischl, B., Sairanen, H., Korpelainen, V., Husu, H., Heinonen, M., Raiteri, P., Rohl, A. L., Nordlund, K. & Lassila, A., 2017, In : Measurement Science and Technology. 28, 3, 10 p., 034004.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Force Microscope
Humidity
Adhesion
Molecular Dynamics Simulation
Molecular dynamics
4 Citations (Scopus)

DNA origami structures as calibration standards for nanometrology

Korpelainen, V., Linko, V., Seppä, J., Lassila, A. & Kostiainen, M. A., 2017, In : Measurement Science and Technology. 28, 3, 6 p., 034001.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Nanometrology
tiles
Tile
Calibration
DNA
2 Citations (Scopus)

Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Quabis, S., Schulz, M., Ehret, G., Asar, M., Balling, P., Kren, P., Bergmans, R. H., Küng, A., Lassila, A., Putland, D., Williams, D., Pirée, H., Prieto, E., Pérez, M., Svedova, L., Ramotowski, Z., Vannoni, M., Hungwe, F. & Kang, Y., 1 Feb 2017, In : Metrologia. 54, 1, p. 85-93 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Uncertainty
7 Citations (Scopus)

Interferometric 2D small angle generator for autocollimator calibration

Heikkinen, V., Byman, V., Palosuo, I., Hemming, B. & Lassila, A., 2017, In : Metrologia. 54, 3, p. 253-261 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Calibration
Interferometers
Lasers
Uncertainty
2016
2 Citations (Scopus)

Fabrication of a thin silicon detector with excellent thickness uniformity

Valtonen, E., Eronen, T., Nenonen, S., Andersson, H., Miikkulainen, K., Eränen, S., Ronkainen, H., Mäkinen, J., Husu, H., Lassila, A., Punkkinen, R. & Hirvonen, M., 21 Feb 2016, In : Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 810, p. 27-31 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon detectors
Detectors
Fabrication
fabrication
detectors
3 Citations (Scopus)

Report on key comparison EURAMET.L-K1.2011 measurement of gauge blocks by interferometry

Matus, M., Pirée, H., Gavalyugov, V., Tamakyarska, D., Thalmann, R., Balling, P., Garnæs, J., Hald, J., Farid, N., Prieto, E., Lassila, A., Salgado, J., Lewis, A., Bandis, C., Mudronja, V., Bánréti, E., Balsamo, A., Bergmans, R., Karlsson, H., Ramotowski, Z. & 12 others, Saraiva, F., Eusébio, L., Duta, A., Zelenika, S., Bergstrand, S., Fíra, R., Yandayan, T., Şendoǧdu, D., Akgöz, S. A., Ganioǧlu, O., Haas, S. & Franke, P., 1 Jan 2016, In : Metrologia. 53, 1A, p. 1-63 63 p., 04003.

Research output: Contribution to journalArticleScientificpeer-review

Gage blocks
Interferometry
Calibration
2015

Final report on EURAMET.L-S21: 'Supplementary comparison of parallel thread gauges'

Mudronja, V., Simunovic, V., Acko, B., Matus, M., Bánréti, E., István, D., Thalmann, R., Lassila, A., Lillepea, L., Picotto, G. B., Bellotti, R., Pometto, M., Ganioglu, O., Meral, I., Salgado, J. A. & Georges, V., 2015, In : Metrologia. 52, Technical Supplement, 04003.

Research output: Contribution to journalArticleScientificpeer-review

Screw thread gages
Calibration

Interference cancellation for hollow-core fiber reference cells

Seppä, J., Merimaa, M., Manninen, A., Triches, M., Hald, J. & Lassila, A., 2015, In : IEEE Transactions on Instrumentation and Measurement. 64, 6, p. 1595-1599

Research output: Contribution to journalArticleScientificpeer-review

cancellation
hollow
interference
fibers
Fibers
3 Citations (Scopus)

Interference Cancellation for Hollow-Core Fiber Reference Cells

Seppä, J., Merimaa, M., Manninen, A., Triches, M., Hald, J. & Lassila, A., 1 Jun 2015, In : IEEE Transactions on Instrumentation and Measurement. 64, 6, p. 1595-1599 5 p., 7060653.

Research output: Contribution to journalArticleScientificpeer-review

cancellation
hollow
interference
fibers
Fibers
3 Citations (Scopus)

MIKES' primary phase stepping gauge block interferometer

Byman, V. & Lassila, A., 2015, In : Measurement Science and Technology. 26, 8, 9 p., 084009.

Research output: Contribution to journalArticleScientificpeer-review

Gage blocks
Interferometer
Interferometers
Gauge
interferometers

The CCL-K11 ongoing key comparison. Final report for the year 2012

Matus, M., Karlsson, H., Stone, J., Krüger, O., Zelan, M., Madej, A. A., Bernard, J. E., Lassila, A. & Robertsson, L., 2015, In : Metrologia. 52, Technical Supplement, 04005.

Research output: Contribution to journalArticleScientificpeer-review

Lasers
Iodine

Traceable methods for vertical scale characterization of dynamic stroboscopic scanning white-light interferometer measurements

Heikkinen, V., Kassamakov, I., Seppä, J., Paulin, T., Nolvi, A., Lassila, A. & Hæggström, E., 2015, In : Applied Optics. 54, 35, p. 10397-10403

Research output: Contribution to journalArticleScientificpeer-review

Interferometers
Interferometry
interferometers
interferometry
Scanning
2 Citations (Scopus)

Wave front and phase correction for double-ended gauge block interferometry

Lassila, A. & Byman, V., 2015, In : Metrologia. 52, 5, p. 708-716

Research output: Contribution to journalArticleScientificpeer-review

Gage blocks
Interferometry
Interferometers
Quartz
Wavefronts
2014
5 Citations (Scopus)

Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe

Seppä, J., Korpelainen, V., Bergstrand, S., Karlsson, H., Lillepea, L. & Lassila, A., 1 Jan 2014, In : Measurement Science and Technology. 25, 4, 044013.

Research output: Contribution to journalArticleScientificpeer-review

Atomic Force Microscope
Scanning Electron Microscope
Gratings
Lateral
Microscopes
1 Citation (Scopus)

Interference cancellation for hollow-core fiber reference cells

Seppä, J., Merimaa, M., Manninen, A. & Lassila, A., 1 Jan 2014, Digest. IEEE Institute of Electrical and Electronic Engineers , p. 672-673 2 p. 6898564

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

cancellation
hollow
interference
fibers
Fibers
2 Citations (Scopus)

Scatterometer for characterization of diffractive optical elements

Husu, H., Saastamoinen, T., Laukkanen, J., Siitonen, S., Turunen, J. & Lassila, A., 2014, In : Measurement Science and Technology. 25, 4, 8 p., 044019.

Research output: Contribution to journalArticleScientificpeer-review

scatterometers
metrology
fabrication
causes

Scatterometric characterization of diffractive optical elements

Saastamoinen, T., Husu, H., Laukkanen, J., Siitonen, S., Turunen, J. & Lassila, A., 1 Jan 2014, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII. Postek, M. T. & Orji, N. G. (eds.). International Society for Optics and Photonics SPIE, 91730I. (Proceedings of SPIE, Vol. 9173).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Diffractive optical elements
Diffractive Optical Elements
Atomic Force Microscope
electron microscopes
Scanning Electron Microscope
1 Citation (Scopus)

Sub-kHz traceable characterization of stroboscopic scanning white light interferometer

Heikkinen, V., Kassamakov, I., Paulin, T., Nolvi, A., Seppä, J., Lassila, A. & Hæggström, E., 2014, Optical Micro- and Nanometrology V. International Society for Optics and Photonics SPIE, 913218. (Proceedings of SPIE, Vol. 9132).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Interferometer
Interferometers
Scanning
interferometers
scanning

Traceable quasi-dynamic stroboscopic scanning white light interferometry

Heikkinen, V. V., Nolvi, A., Paulin, T., Seppä, J., Kassamakov, I., Lassila, A. & Hæggström, E., 1 Jan 2014, Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology. Springer, p. 491-496 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Interferometry
Scanning
Piezoelectric transducers
MEMS
Trajectories
2013
7 Citations (Scopus)

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

Seppä, J., Kassamakov, I., Heikkinen, V., Nolvi, A., Paulin, T., Lassila, A. & Hæggström, E., 1 Dec 2013, In : Optical Engineering. 52, 12, 124104.

Research output: Contribution to journalArticleScientificpeer-review

Interferometers
interferometers
Calibration
Scanning
scanning
1 Citation (Scopus)

Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Seppä, J., Kassamakov, I., Nolvi, A., Heikkinen, V., Paulin, T., Lassila, A., Hao, L. & Hæggsröm, E., 1 Aug 2013, Optical Measurement Systems for Industrial Inspection VIII. International Society for Optics and Photonics SPIE, 87883J. (Proceedings of SPIE, Vol. 8788).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Interferometer
Interferometers
Scanning
Calibration
interferometers
2012
57 Citations (Scopus)

Comparison of the performance of the next generation of optical interferometers

Pisani, M., Yacoot, A., Balling, P., Bancone, N., Birlikseven, C., Celik, M., Flügge, J., Hamid, R., Köchert, P., Kren, P., Kuetgens, U., Lassila, A., Picotto, G. B., Sahin, E., Seppä, J., Tedaldi, M. & Weichert, C., 2012, In : Metrologia. 49, 4, p. 455-467 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Interferometers
Nanotechnology
X rays
1 Citation (Scopus)

Equipment for the calibration of squareness standards

Hemming, B., Korhonen, A., Palosuo, I. & Lassila, A., 2012, In : Measurement Science and Technology. 23, 9, 5 p., 094009.

Research output: Contribution to journalArticleScientificpeer-review

Calibration
Metrology
Table
Coordinate Measuring Machine
Error Compensation

Final report on inter-RMO key comparison EUROMET.L-K5.2004: Calibration of a step gauge

Prieto, E., Brown, N., Lassila, A., Lewis, A., Matus, M., Vailleau, G., de Chiffre, L., Kotte, G. W. J. L., Frennberg, M., McQuoid, H., Zelený, V., Ramotowski, Z., Bánréti, E., Duta, A., Picotto, G. B., Doytchinov, K., de Oliveira, J. C. V., Alonso, M. V. & Chekirda, K., 2012, In : Metrologia. 49, 1A, 04008.

Research output: Contribution to journalArticleScientificpeer-review

Gages
Calibration
Uncertainty

Intercomparison of lateral scales of SEM and AFM microscopes in research institutes in Northern Europe

Seppä, S. J., Korpelainen, V., Bergstrand, S., Karlsson, H., Lillepea, L. & Lassila, A., 2012, Espoo: Centre of Metrology and Accreditation. (MIKES Publication; No. J1/2012).

Research output: Book/ReportReport

Open Access
scanning electron microscopy
calibration
Europe
laboratory
9 Citations (Scopus)

Interferometric 30 m bench for calibrations of 1D scales and optical distance measuring instruments

Unkuri, J., Rantanen, A., Manninen, J., Esala, V-P. & Lassila, A., 2012, In : Measurement Science and Technology. 23, 9, 8 p., 094017.

Research output: Contribution to journalArticleScientificpeer-review

carriages
Measuring instruments
seats
Calibration
Interferometers
Microscopes
microscopes
Calibration
gratings
Position measurement
7 Citations (Scopus)

MIKES fibre-coupled differential dynamic line scale interferometer

Lassila, A., 2012, In : Measurement Science and Technology. 23, 9, 10 p., 094011.

Research output: Contribution to journalArticleScientificpeer-review

Optical fiber coupling
Interferometer
Interferometers
interferometers
Fiber
2011
13 Citations (Scopus)

A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

Seppä, J., Korpelainen, V., Merimaa, M., Picotto, G. B. & Lassila, A., 2011, In : Measurement Science and Technology. 22, 9, 7 p., 094027.

Research output: Contribution to journalArticleScientificpeer-review

Capacitive sensors
Laser Interferometer
linearization
Linearization
Interferometers
25 Citations (Scopus)

Design and performance of an advanced metrology building for MIKES

Lassila, A., Kari, M., Koivula, H., Koivula, U., Kortström, J., Leinonen, E., Manninen, J., Manssila, J., Mansten, T., Meriläinen, T., Muttilainen, J., Nissilä, J., Nyblom, R., Riski, K., Sarilo, J. & Isotalo, H., 1 Feb 2011, In : Measurement: Journal of the International Measurement Confederation. 44, 2, p. 399-425 27 p.

Research output: Contribution to journalArticleScientificpeer-review

metrology
specifications
electromagnetic shielding
Electromagnetic shielding
Specifications
15 Citations (Scopus)

High-precision diode-laser-based temperature measurement for air refractive index compensation

Hieta, T., Merimaa, M., Vainio, M., Seppä, J. & Lassila, A., 2011, In : Applied Optics. 50, 31, p. 5990 - 5998

Research output: Contribution to journalArticleScientificpeer-review

Temperature measurement
temperature measurement
Semiconductor lasers
Refractive index
semiconductor lasers
1 Citation (Scopus)

Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM

Korpelainen, V., Seppä, J. & Lassila, A., 2011, Proceedings of SPIE, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences. International Society for Optics and Photonics SPIE, 80360Q. (Proceedings of SPIE, Vol. 8036).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Uncertainty Estimation
Calibration
atomic force microscopy
gratings
Gratings
2 Citations (Scopus)

Traceability of the pressure balance effective area at MIKES

Saxholm, S., Hemming, B., Heinonen, M., Otal, P., Rantanen, M., Esala, V. P. & Lassila, A., 2011, In : PTB-Mitteilungen: Forschen und Prufen. 121, 3, p. 284-286 3 p.

Research output: Contribution to journalArticleScientificpeer-review

2010
59 Citations (Scopus)

Design and characterization of MIKES metrological atomic force microscope

Korpelainen, V., Seppä, J. & Lassila, A., 2010, In : Precision Engineering. 34, 4, p. 735-744 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Microscopes
Acoustic noise
Interferometers
Vibrations (mechanical)
Calibration

Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

Danzebrink, U., Koenders, L., Picotto, G. B., Lassila, A., Wang, S. H. & Klapetek, P., 2010, In : Metrologia. 47, Technical Supplement, 04006.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Scanning probe microscopy
Microscopes
Uncertainty