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2019
1 Citation (Scopus)

Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam

Korovin, A. V., Pennec, Y., Stocchi, M., Mencarelli, D., Pierantoni, L., Makkonen, T., Ahopelto, J. & Djafari Rouhani, B., 6 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 32LT01.

Research output: Contribution to journalArticleScientificpeer-review

Surface waves
Acoustic waves
acoustics
cavities
Silicon

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons

NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration

Ahopelto, J., Ardila, G., Baldi, L., Balestra, F., Belot, D., Fagas, G., De Gendt, S., Demarchi, D., Fernandez-Bolaños, M., Holden, D., Ionescu, A. M., Meneghesso, G., Mocuta, A., Pfeffer, M., Popp, R., Sangiorgi, E. C. & Sotomayor Torres, C. M., 1 May 2019, In : Solid-State Electronics. 155, p. 7-19 13 p.

Research output: Contribution to journalArticleScientificpeer-review

systems integration
Nanoelectronics
manufacturing
industries
life sciences

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon
membranes
Detectors
Membranes
Phonon scattering
2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Open Access
3 Citations (Scopus)

Nanocrystalline silicon optomechanical cavities

Navarro-Urrios, D., Capuj, N. E., Maire, J., Colombano, M., Jaramillo-Fernandez, J., Chavez-Angel, E., Martin, L. L., Mercadé, L., Griol, A., Martínez, A., Sotomayer-Torres, C. & Ahopelto, J., 2018, In : Optics Express. 26, 8, p. 9829-9839 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
cavities
silicon
integrated circuits
lasing
chaos

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Porous silicon
electrochemical capacitors
Silicon
porous silicon
Electrodes

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
bolometers
photometers
silicon
membranes
costs

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

detectors
silicon
thermocouples
figure of merit
thermopiles

The Electromagnetic framework of “Nanoarchitectronics”

Ahopelto, J., Benini, A., Bilotti, F., Casali, B., Chazelas, J., Gerini, G., Hao, Y., Herbertz, K., Maci, S., Massa, A., Pierantoni, L., Sotomayor Torres, C. M., Treyakov, S., Tripon-Canseliet, C., Vardaxoglou, Y., Vecchi, G. & Zayats, A., 2018, 2018 IEEE Antennas and Propagation Society International Symposium and USNC/URSI National Radio Science Meeting, APSURSI 2018 - Proceedings. IEEE Institute of Electrical and Electronic Engineers , p. 2071-2072 2 p. 8608863

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Nanoelectronics
Field effect transistors
Physical properties
Industry
2017

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Porous Silicon
Porous silicon
electrochemical capacitors
Capacitance
porous silicon

Porous Silicon Supercapacitors

Kestutis, G., Jouni, A. & Mika, P., 2017, Handbook of Porous Silicon: Live Reference - Constantly updated Springer.com/SpringerReference. Springer, p. 1-11

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Porous silicon
Capacitors
Electrodes
Graphite
Atomic layer deposition

Self-assembled three-dimensional inverted photonic crystals on a photonic chip

Arpiainen, S., Vynck, K., Dekker, J., Kapulainen, M., Khunsin, W., Aalto, T., Mulot, M., Kocher-Oberlehrer, G., Zentel, R., Torres, C. M. S., Cassagne, D. & Ahopelto, J., 1 Sep 2017, In : Physica Status Solidi A: Applications and Materials Science. 214, 9, 1700039.

Research output: Contribution to journalArticleScientificpeer-review

Photonic crystals
Photonics
chips
photonics
Silicon

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers , p. 1828-1831 4 p. 7994425

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

grasses
electrochemical capacitors
Silicon
microelectromechanical systems
MEMS
10 Citations (Scopus)

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Nanorods
Silicon
Composite materials
Capacitance
Electrodes

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.

Research output: Contribution to conferenceConference articleScientific

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Bolometer
Bolometers
bolometers
Silicon
Membrane
14 Citations (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

doped crystals
thermocouples
membranes
detectors
single crystals
2016

Acoustic phonons in ultrathin free-standing silicon membranes

Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., Prunnila, M., Reparaz, J. S. & Ahopelto, J., 2016, Silicon Nanomembranes: Fundamental Science and Applications. Rogers, J. A. & Ahn, J-H. (eds.). Wiley, p. 305-326

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

phonons
membranes
acoustics
silicon
insulators

ALD enhanced on-chip supercapacitors

Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.

Research output: Contribution to conferenceConference articleScientific

47 Citations (Scopus)

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Titanium nitride
Porous silicon
Nanostructured materials
Silicon
Energy storage
31 Citations (Scopus)

Graphene biosensor programming with genetically engineered fusion protein monolayers

Soikkeli, M., Kurppa, K., Kainlauri, M., Arpiainen, S., Paananen, A., Gunnarsson, D., Joensuu, J. J., Laaksonen, P., Prunnila, M., Linder, M. B. & Ahopelto, J., 2016, In : ACS Applied Materials & Interfaces. 8, 12, p. 8257-8264

Research output: Contribution to journalArticleScientificpeer-review

Graphite
Biosensors
Graphene
Monolayers
Fusion reactions

Graphene biosensor with fusion protein receptor modules

Soikkeli, M., Paananen, A., Kainlauri, M., Arola, H., Joensuu, J. J., Arpiainen, S., Nevanen, T. & Ahopelto, J., 2016.

Research output: Contribution to conferenceConference AbstractScientific

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
cycles
residual stress
wafers
electrical resistivity
27 Citations (Scopus)

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticleScientificpeer-review

Titanium nitride
Silicon
Nanorods
Coatings
Electrodes
76 Citations (Scopus)

Nanophononics: state of the art and perspectives

Volz, S., Ordonez-Miranda, J., Shchepetov, A., Prunnila, M., Ahopelto, J., Pezeril, T., Vaudel, G., Gusev, V., Ruello, P., Weig, E. M., Schubert, M., Hettich, M., Grossman, M., Dekorsy, T., Alzina, F., Graczykowski, B., Chavez-Angel, E., Reparaz, S. J., Wagner, M. R., Sotomayor-Torres, C. M. & 3 others, Xiong, S., Neogi, S. & Donadio, D., 2016, In : European Physical Journal B. 89, 15, 20 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Phonons
phonons
Electron transport properties
Nanoelectronics
thermoelectric materials
27 Citations (Scopus)

Plasmonic colors: Toward mass production of metasurfaces

Højlund-Nielsen, E., Clausen, J., Mäkela, T., Højlund Thamdrup, L., Zalkovskij, M., Nielsen, T., Li Pira, N., Ahopelto, J., Mortensen, N. A. & Kristensen, A., 2016, In : Advanced Materials Technologies. 1, 7

Research output: Contribution to journalArticleScientificpeer-review

Die casting inserts
Molding
Polymers
Color
Metallizing

Porous silicon based supercapacitors for integrated energy storages

Prunnila, M., Grönberg, L., Grigoras, K. & Ahopelto, J., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

3 Citations (Scopus)

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Porous silicon
Energy storage
Capacitors
Electrodes
Supercapacitor

Thermal and Electrical Properties of Strontium Titanate Membranes

Ahopelto, J., Shchepetov, A., Prunnila, M., Paterson, J., Tainoff, D. & Bourgeois, O., 2016.

Research output: Contribution to conferenceConference articleScientific

Thermal and Electrical Properties of Thin Semiconductor Membranes (invited lecture)

Ahopelto, J., 2016.

Research output: Contribution to conferenceConference articleScientific

Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

Shchepetov, A., Varpula, A., Timofeev, A., Grazykowski, B., Sotomayor Torres, C., Prunnila, M. & Ahopelto, J., 2016, Abstract book: International Conference on Phononics and Thermal Energy Science, PTES2016. Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Thermal properties and applications of ultra-thin highly doped silicon membranes

Shchepetov, A., Varpula, A., Timofeev, A., Graczykowski, B., Sotomayor Torres, C., Ahopelto, J. & Prunnila, M., 2016.

Research output: Contribution to conferenceConference AbstractScientific

2015
5 Citations (Scopus)

(Et3Si)2Se as a precursor for atomic layer deposition: growth analysis of thermoelectric Bi2Se3

Sarnet, T., Hatanpää, T., Vehkamäki, M., Flyktman, T., Ahopelto, J., Mizohata, K., Ritala, M. & Leskelä, M., 2015, In : Journal of Materials Chemistry C. 3, 18, p. 4820-4828

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition
Film thickness
Impurities
Thin films
Temperature

Graphene biosensor based on fusion protein receptor modules

Ahopelto, J., 2015.

Research output: Contribution to conferenceConference articleScientific

Manufacture of devices based on interaction between graphene and proteins (Invited seminar)

Ahopelto, J., 2015.

Research output: Contribution to conferenceOther conference contributionScientific

16 Citations (Scopus)

Optical and mechanical properties of nanofibrillated cellulose: toward a robust platform for next-generation green technologies

Simão, C. D., Reparaz, J. S., Wagner, M. R., Graczykowski, B., Kreuzera, M., Ruiz-Blanco, Y. B., García, Y., Malho, J-M., Goni, A. R., Ahopelto, J. & Sotomayor Torres, C. M., 2015, In : Carbohydrate Polymers. 126, p. 40-46

Research output: Contribution to journalArticleScientificpeer-review

Environmental technology
Cellulose
Optical properties
Mechanical properties
Optical band gaps

Platform for Label-Free Biosensing

Arpiainen, S., Soikkeli, M., Kurppa, K., Kainlauri, M., Gunnarsson, D., Joensuu, J. J., Laaksonen, P., Prunnila, M., Linder, M. B. & Ahopelto, J., 2015.

Research output: Contribution to conferenceConference articleScientific

Programmable Graphene Biosensor

Ahopelto, J., 2015.

Research output: Contribution to conferenceOther conference contributionScientific

Protein Programmed Graphene Biosensor

Ahopelto, J., 2015.

Research output: Contribution to conferenceConference articleScientific

68 Citations (Scopus)

Reconstructing phonon mean-free-path contributions to thermal conductivity using nanoscale membranes

Cuffe, J., Eliason, J. K., Maznev, A. A., Collins, K. C., Johnson, J. A., Shchepetov, A., Prunnila, M., Ahopelto, J., Sotomayor Torres, C. M., Chen, G. & Nelson, K. A., 2015, In : Physical Review B: Condensed Matter and Materials Physics. 91, 24, 245423.

Research output: Contribution to journalArticleScientificpeer-review

mean free path
Thermal conductivity
thermal conductivity
membranes
Membranes

Silicon: Potential Thermoelectric Material ?

Ahopelto, J., 2015, Workshop report. CECAM

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

thermoelectric materials
silicon
thermal conductivity
figure of merit
Seebeck effect

Silicon Membranes for Thermoelectrics

Shchepetov, A., Prunnila, M. & Ahopelto, J., 2015.

Research output: Contribution to conferenceConference AbstractScientific

Open Access
membranes
silicon
thermoelectric materials
phonons
cooling

Silicon Nanomembranes for Phononics

Ahopelto, J., 2015.

Research output: Contribution to conferenceConference articleScientific

9 Citations (Scopus)

Thermal Transport in Free-Standing Silicon Membranes: Confinement, Intrinsic and Extrinsic Contributions

Sotomayor-Torres, C., Chavez-Angel, E., Alzina, F., Reparaz, J. S., Graczykowski, B., El Sachat, A., Wagner, M. R., Sledzinka, M., Shchepetov, A., Prunnila, M. & Ahopelto, J., 2015.

Research output: Contribution to conferenceConference AbstractScientific

Open Access
68 Citations (Scopus)

Tuning thermal transport in ultrathin silicon membranes by surface nanoscale engineering

Neogi, S., Reparaz, J. S., Pereira, L. F. C., Graczykowski, B., Wagner, M. R., Sledzinska, M., Shchepetov, A., Prunnila, M., Ahopelto, J., Sotomayor-Torres, C. M. & Donadio, D., 2015, In : ACS Nano. 9, 4, p. 3820-3828

Research output: Contribution to journalArticleScientificpeer-review

Silicon
thermal conductivity
Tuning
tuning
engineering
2014
12 Citations (Scopus)

Acoustic phonon propagation in ultra-thin Si membranes under biaxial stress field

Graczykowski, B., Gomis-Bresco, J., Alzina, F., Reparaz, J., Shchepetov, A., Prunnila, M., Ahopelto, J. & Sotomayor Torres, C. M., 2014, In : New Journal of Physics. 16, 073024.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
stress distribution
membranes
propagation
acoustics
phonons

ALD coating of porous silicon

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Porous silicon
Coatings
Atomic layer deposition
Capacitance
Electrodes

ALD modified porous silicon electrodes for supercapacitors

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Porous silicon
Electrodes
Supercapacitor

Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference PosterScientificpeer-review

titanium nitrides
electrochemical capacitors
atomic layer epitaxy
porous silicon
electrodes