Find Research Outputs

Search concepts
Selected filters

Publication Year

  • 2020
  • 2019
  • 2018
  • 2017
  • 2016
  • 2015
  • 2014
  • 2013
  • 2012
  • 2011

Author

  • Mika Prunnila
2019

Fast and sensitive thermoelectric bolometers based on silicon nanomembranes

Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 2019.

Research output: Contribution to conferenceOther conference contributionScientific

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

Nanobolometer with ultralow noise equivalent power

Kokkoniemi, R., Govenius, J., Vesterinen, V., Lake, R. E., Gunyhó, A. M., Tan, K. Y., Simbierowicz, S., Grönberg, L., Lehtinen, J., Prunnila, M., Hassel, J., Lamminen, A., Saira, O. P. & Möttönen, M., 1 Dec 2019, In : Communications Physics. 2, 1, 124.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
1 Citation (Scopus)

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Open Access
2 Citations (Scopus)

Fabrication and Studies of Silicide-Based Superconducting Nanowires

Lehtinen, J., Mykkänen, E., Kemppinen, A., Prunnila, M. & Manninen, A., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. IEEE Institute of Electrical and Electronic Engineers , 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Methods for Electrical Cooling and Thermometry of a Suspended Silicon Chip

Kemppinen, A., Mykkänen, E., Lehtinen, J., Shchepetov, A., Timofeev, A., Gunnarsson, D., Grönberg, L., Manninen, A. & Prunnila, M., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. IEEE Institute of Electrical and Electronic Engineers , 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Photoresponse of Graphene-Gated Graphene-GaSe Heterojunction Devices

Kim, W., Arpiainen, S., Xue, H., Soikkeli, M., Qi, M., Sun, Z., Lipsanen, H., Chaves, F. A., Jiménez, D. & Prunnila, M., 24 Aug 2018, In : ACS Applied Nano Materials. 1, 8, p. 3895–3902 8 p.

Research output: Contribution to journalArticle

Open Access
5 Citations (Scopus)

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. IEEE Institute of Electrical and Electronic Engineers , p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journalArticle in a proceedings journal

Open Access

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.

Research output: Contribution to journalArticle in a proceedings journal

Open Access

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Superconducting MoSi nanowires

Lehtinen, J. S., Kemppinen, A., Mykkänen, E., Prunnila, M. & Manninen, A. J., 1 Jan 2018, In : Superconductor Science and Technology. 31, 1, 015002.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Thermal characterization of thermal interface materials using the three-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). IEEE Institute of Electrical and Electronic Engineers , 8546370

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2017

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers , p. 1-5 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

On-chip magnetic cooling of a nanoelectronic device

Bradley, D. I., Guénault, A. M., Gunnarsson, D., Haley, R. P., Holt, S., Jones, A. T., Pashkin, Y. A., Penttilä, J., Prance, J. R., Prunnila, M. & Roschier, L., 4 Apr 2017, In : Scientific Reports. 7, 45566.

Research output: Contribution to journalArticle

Open Access
4 Citations (Scopus)

Porous Silicon Supercapacitors

Kestutis, G., Jouni, A. & Mika, P., 2017, Handbook of Porous Silicon: Live Reference - Constantly updated Springer.com/SpringerReference. Springer, p. 1-11

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Predictable quantum efficient detector based on n-type silicon photodiodes

Dönsberg, T., Manoocheri, F., Sildoja, M., Juntunen, M., Savin, H., Tuovinen, E., Ronkainen, H., Prunnila, M., Merimaa, M., Tang, C. K., Gran, J., Müller, I., Werner, L., Rougié, B., Pons, A., Smîd, M., Gál, P., Lolli, L., Brida, G., Rastello, M. L. & 1 others, Ikonen, E., 4 Oct 2017, In : Metrologia. 54, 6, p. 821-836 16 p.

Research output: Contribution to journalArticle

Open Access
4 Citations (Scopus)

Side-wall spacer passivated sub-μm Josephson junction fabrication process

Grönberg, L., Kiviranta, M., Vesterinen, V., Lehtinen, J., Simbierowicz, S., Luomahaara, J., Prunnila, M. & Hassel, J., 16 Nov 2017, In : Superconductor Science and Technology. 30, 12, 6 p., 125016.

Research output: Contribution to journalArticle

Open Access
2 Citations (Scopus)

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers , p. 1828-1831 4 p. 7994425

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.

Research output: Contribution to conferenceConference articleScientific

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)

Traceable Coulomb blockade thermometry

Hahtela, O., Mykkänen, E., Kemppinen, A., Meschke, M., Prunnila, M., Gunnarsson, D., Roschier, L., Penttilä, J. & Pekola, J., 1 Feb 2017, In : Metrologia. 54, 1, p. 69-76 8 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)
2016

Acoustic phonons in ultrathin free-standing silicon membranes

Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., Prunnila, M., Reparaz, J. S. & Ahopelto, J., 2016, Silicon Nanomembranes: Fundamental Science and Applications. Rogers, J. A. & Ahn, J-H. (eds.). Wiley, p. 305-326

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

ALD enhanced on-chip supercapacitors

Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.

Research output: Contribution to conferenceConference articleScientific

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
49 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Energy harvesting and storage with Si-based micro and nano structures

Prunnila, M., 2016.

Research output: Contribution to conferenceConference articleScientific

Graphene biosensor programming with genetically engineered fusion protein monolayers

Soikkeli, M., Kurppa, K., Kainlauri, M., Arpiainen, S., Paananen, A., Gunnarsson, D., Joensuu, J. J., Laaksonen, P., Prunnila, M., Linder, M. B. & Ahopelto, J., 2016, In : ACS Applied Materials & Interfaces. 8, 12, p. 8257-8264

Research output: Contribution to journalArticleScientificpeer-review

33 Citations (Scopus)

Heat transport engineering in membranes and junctions for detectors and refrigerators

Prunnila, M., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

High performance semiconductor-superconductor junction coolers

Prunnila, M., Gunnarsson, D., Timofeev, A., Prest, M., Whall, T., Parker, E., Myronov, M. & Leadley, D., 2016.

Research output: Contribution to conferenceConference AbstractScientific

Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Kiviranta, M., Brandel, O., Grönberg, L., Kuner, J., Linzen, S., Beev, N., May, T. & Prunnila, M., 2016, In : IEEE Transactions on Applied Superconductivity. 26, 6, 7438771.

Research output: Contribution to journalArticle

7 Citations (Scopus)

Nanoelectronic primary thermometry below 4 mK

Bradley, D. I., George, R. E., Gunnarsson, D., Haley, R. P., Heikkinen, H., Pashkin, Y. A. A., Penttila, J., Prance, J. R., Prunnila, M., Roschier, L. & Sarsby, M., 2016, In : Nature Communications. 7, 10455.

Research output: Contribution to journalArticle

Open Access
15 Citations (Scopus)

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticle

27 Citations (Scopus)

Nanophononics: state of the art and perspectives

Volz, S., Ordonez-Miranda, J., Shchepetov, A., Prunnila, M., Ahopelto, J., Pezeril, T., Vaudel, G., Gusev, V., Ruello, P., Weig, E. M., Schubert, M., Hettich, M., Grossman, M., Dekorsy, T., Alzina, F., Graczykowski, B., Chavez-Angel, E., Reparaz, S. J., Wagner, M. R., Sotomayor-Torres, C. M. & 3 others, Xiong, S., Neogi, S. & Donadio, D., 2016, In : European Physical Journal B. 89, 15, 20 p.

Research output: Contribution to journalArticle

Open Access
81 Citations (Scopus)

New evaluation of T - T2000 from 0.02 K to 1 K by independent thermodynamics methods

Engert, J., Kirste, A., Shibahara, A., Casey, A., Levitin, L., Saunders, J., Hahtela, O., Kemppinen, A., Mykkänen, E., Prunnila, M., Gunnarsson, D., Roschier, L., Meschke, M. & Pekola, J., 2016, In : International Journal of Thermophysics. 37, 125

Research output: Contribution to journalArticle

5 Citations (Scopus)

Optical characterisation of a strained-silicon cold-electron bolometer at 160 GHz

Brien, T. L. R., Ade, P. A. R., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parked, E. H. C., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 28 Apr 2016, Millimeter Waves and THz Technology Workshop (UCMMT), 2015 8th UK, Europe, China. IEEE Institute of Electrical and Electronic Engineers , p. 1 - 4 7460630

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Optical response of strained- and unstrained-silicon cold-electron bolometers

Brien, T., Ade, P., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parker, E., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 2016, In : Journal of Low Temperature Physics. 184, 1-2, p. 231-237

Research output: Contribution to journalArticle

Open Access
1 Citation (Scopus)

Porous silicon based supercapacitors for integrated energy storages

Prunnila, M., Grönberg, L., Grigoras, K. & Ahopelto, J., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
5 Citations (Scopus)

Thermal and Electrical Properties of Strontium Titanate Membranes

Ahopelto, J., Shchepetov, A., Prunnila, M., Paterson, J., Tainoff, D. & Bourgeois, O., 2016.

Research output: Contribution to conferenceConference articleScientific

Thermal properties and applications of ultra-thin highly doped silicon membranes

Shchepetov, A., Varpula, A., Timofeev, A., Graczykowski, B., Sotomayor Torres, C., Ahopelto, J. & Prunnila, M., 2016.

Research output: Contribution to conferenceConference AbstractScientific