- 1 - 50 out of 60 results
- Publication Year, Title (descending)
Microelectrode Array With Transparent ALD TiN Electrodes
Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.Research output: Contribution to journal › Article › Scientific › peer-review
Nanobolometer with ultralow noise equivalent power
Kokkoniemi, R., Govenius, J., Vesterinen, V., Lake, R. E., Gunyhó, A. M., Tan, K. Y., Simbierowicz, S., Grönberg, L., Lehtinen, J., Prunnila, M., Hassel, J., Lamminen, A., Saira, O. P. & Möttönen, M., 1 Dec 2019, In : Communications Physics. 2, 1, 124.Research output: Contribution to journal › Article › Scientific › peer-review
Silicon Membranes for Nanophononics
Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
(Semi-)transparent ALD TiN microelectrodes
Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
A flux-driven Josephson parametric amplifier for sub-GHz frequencies fabricated with side-wall passivated spacer junction technology
Simbierowicz, S., Vesterinen, V., Grönberg, L., Lehtinen, J., Prunnila, M. & Hassel, J., 24 Aug 2018, In : Superconductor Science and Technology. 31, 10, 105001.Research output: Contribution to journal › Article › Scientific › peer-review
Fabrication and Studies of Silicide-Based Superconducting Nanowires
Lehtinen, J., Mykkänen, E., Kemppinen, A., Prunnila, M. & Manninen, A., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. IEEE Institute of Electrical and Electronic Engineers , 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Methods for Electrical Cooling and Thermometry of a Suspended Silicon Chip
Kemppinen, A., Mykkänen, E., Lehtinen, J., Shchepetov, A., Timofeev, A., Gunnarsson, D., Grönberg, L., Manninen, A. & Prunnila, M., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. IEEE Institute of Electrical and Electronic Engineers , 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples
Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
Photoresponse of Graphene-Gated Graphene-GaSe Heterojunction Devices
Kim, W., Arpiainen, S., Xue, H., Soikkeli, M., Qi, M., Sun, Z., Lipsanen, H., Chaves, F. A., Jiménez, D. & Prunnila, M., 31 Jul 2018, In : ACS Applied Nano Materials. 1, 8, p. 3895–3902 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Porous silicon supercapacitors
Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional
Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method
Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. IEEE Institute of Electrical and Electronic Engineers , p. 562-566 5 p. 8419617Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method
Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.Research output: Contribution to journal › Article › Scientific › peer-review
Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection
Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
Silicon nano-thermoelectric detectors for for sensing and instrumentation applications
Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
Superconducting MoSi nanowires
Lehtinen, J. S., Kemppinen, A., Mykkänen, E., Prunnila, M. & Manninen, A. J., 1 Jan 2018, In : Superconductor Science and Technology. 31, 1, 015002.Research output: Contribution to journal › Article › Scientific › peer-review
Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method
Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
Thermal characterization of thermal interface materials using the three-omega method
Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). IEEE Institute of Electrical and Electronic Engineers , 8546370Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method
Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers , p. 1-5 5 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print
Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
On-chip magnetic cooling of a nanoelectronic device
Bradley, D. I., Guénault, A. M., Gunnarsson, D., Haley, R. P., Holt, S., Jones, A. T., Pashkin, Y. A., Penttilä, J., Prance, J. R., Prunnila, M. & Roschier, L., 4 Apr 2017, In : Scientific Reports. 7, 45566.Research output: Contribution to journal › Article › Scientific › peer-review
Porous Silicon Supercapacitors
Kestutis, G., Jouni, A. & Mika, P., 2017, Handbook of Porous Silicon: Live Reference - Constantly updated Springer.com/SpringerReference. Springer, p. 1-11Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional
Predictable quantum efficient detector based on n-type silicon photodiodes
Dönsberg, T., Manoocheri, F., Sildoja, M., Juntunen, M., Savin, H., Tuovinen, E., Ronkainen, H., Prunnila, M., Merimaa, M., Tang, C. K., Gran, J., Müller, I., Werner, L., Rougié, B., Pons, A., Smîd, M., Gál, P., Lolli, L., Brida, G., Rastello, M. L. & 1 others, , 4 Oct 2017, In : Metrologia. 54, 6, p. 821-836 16 p.Research output: Contribution to journal › Article › Scientific › peer-review
Side-wall spacer passivated sub-μm Josephson junction fabrication process
Grönberg, L., Kiviranta, M., Vesterinen, V., Lehtinen, J., Simbierowicz, S., Luomahaara, J., Prunnila, M. & Hassel, J., 16 Nov 2017, In : Superconductor Science and Technology. 30, 12, 6 p., 125016.Research output: Contribution to journal › Article › Scientific › peer-review
Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density
Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers , p. 1828-1831 4 p. 7994425Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor
Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes
Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.Research output: Contribution to conference › Conference article › Scientific
Thermoelectric bolometers based on silicon membranes
Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes
Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.Research output: Contribution to journal › Article › Scientific › peer-review
Traceable Coulomb blockade thermometry
Hahtela, O., Mykkänen, E., Kemppinen, A., Meschke, M., Prunnila, M., Gunnarsson, D., Roschier, L., Penttilä, J. & Pekola, J., 1 Feb 2017, In : Metrologia. 54, 1, p. 69-76 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Acoustic phonons in ultrathin free-standing silicon membranes
Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., Prunnila, M., Reparaz, J. S. & Ahopelto, J., 2016, Silicon Nanomembranes: Fundamental Science and Applications. Rogers, J. A. & Ahn, J-H. (eds.). Wiley, p. 305-326Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional
ALD enhanced on-chip supercapacitors
Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.Research output: Contribution to conference › Conference article › Scientific
Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors
Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345Research output: Contribution to journal › Article › Scientific › peer-review
Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators
Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839Research output: Contribution to journal › Article › Scientific › peer-review
Energy harvesting and storage with Si-based micro and nano structures
Prunnila, M., 2016.Research output: Contribution to conference › Conference article › Scientific
Graphene biosensor programming with genetically engineered fusion protein monolayers
Soikkeli, M., Kurppa, K., Kainlauri, M., Arpiainen, S., Paananen, A., Gunnarsson, D., Joensuu, J. J., Laaksonen, P., Prunnila, M., Linder, M. B. & Ahopelto, J., 2016, In : ACS Applied Materials & Interfaces. 8, 12, p. 8257-8264Research output: Contribution to journal › Article › Scientific › peer-review
Heat transport engineering in membranes and junctions for detectors and refrigerators
Prunnila, M., 2016.Research output: Contribution to conference › Other conference contribution › Scientific
Highly conformal TiN by atomic layer deposition: growth and characterization
Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVSResearch output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
High performance semiconductor-superconductor junction coolers
Prunnila, M., Gunnarsson, D., Timofeev, A., Prest, M., Whall, T., Parker, E., Myronov, M. & Leadley, D., 2016.Research output: Contribution to conference › Conference Abstract › Scientific
Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries
Kiviranta, M., Brandel, O., Grönberg, L., Kuner, J., Linzen, S., Beev, N., May, T. & Prunnila, M., 2016, In : IEEE Transactions on Applied Superconductivity. 26, 6, 7438771.Research output: Contribution to journal › Article › Scientific › peer-review
Nanoelectronic primary thermometry below 4 mK
Bradley, D. I., George, R. E., Gunnarsson, D., Haley, R. P., Heikkinen, H., Pashkin, Y. A. A., Penttila, J., Prance, J. R., Prunnila, M., Roschier, L. & Sarsby, M., 2016, In : Nature Communications. 7, 10455.Research output: Contribution to journal › Article › Scientific › peer-review
Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors
Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55Research output: Contribution to journal › Article › Scientific › peer-review
Nanophononics: state of the art and perspectives
Volz, S., Ordonez-Miranda, J., Shchepetov, A., Prunnila, M., Ahopelto, J., Pezeril, T., Vaudel, G., Gusev, V., Ruello, P., Weig, E. M., Schubert, M., Hettich, M., Grossman, M., Dekorsy, T., Alzina, F., Graczykowski, B., Chavez-Angel, E., Reparaz, S. J., Wagner, M. R., Sotomayor-Torres, C. M. & 3 others, , 2016, In : European Physical Journal B. 89, 15, 20 p.Research output: Contribution to journal › Article › Scientific › peer-review
New evaluation of T - T2000 from 0.02 K to 1 K by independent thermodynamics methods
Engert, J., Kirste, A., Shibahara, A., Casey, A., Levitin, L., Saunders, J., Hahtela, O., Kemppinen, A., Mykkänen, E., Prunnila, M., Gunnarsson, D., Roschier, L., Meschke, M. & Pekola, J., 2016, In : International Journal of Thermophysics. 37, 125Research output: Contribution to journal › Article › Scientific › peer-review
Optical characterisation of a strained-silicon cold-electron bolometer at 160 GHz
Brien, T. L. R., Ade, P. A. R., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parked, E. H. C., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 28 Apr 2016, Millimeter Waves and THz Technology Workshop (UCMMT), 2015 8th UK, Europe, China. IEEE Institute of Electrical and Electronic Engineers , p. 1 - 4 7460630Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Optical response of strained- and unstrained-silicon cold-electron bolometers
Brien, T., Ade, P., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parker, E., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 2016, In : Journal of Low Temperature Physics. 184, 1-2, p. 231-237Research output: Contribution to journal › Article › Scientific › peer-review
Porous silicon based supercapacitors for integrated energy storages
Prunnila, M., Grönberg, L., Grigoras, K. & Ahopelto, J., 2016.Research output: Contribution to conference › Other conference contribution › Scientific
Porous silicon for energy storage at microscale: Supercapacitors
Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Thermal and Electrical Properties of Strontium Titanate Membranes
Ahopelto, J., Shchepetov, A., Prunnila, M., Paterson, J., Tainoff, D. & Bourgeois, O., 2016.Research output: Contribution to conference › Conference article › Scientific
Thermal properties and applications of ultra-thin highly doped silicon membranes
Shchepetov, A., Varpula, A., Timofeev, A., Graczykowski, B., Sotomayor Torres, C., Ahopelto, J. & Prunnila, M., 2016.Research output: Contribution to conference › Conference Abstract › Scientific
Comparison of electron-phonon and hole-phonon energy loss rates in silicon
Richardson-Bullock, J. S., Prest, M. J., Shah, V. A., Gunnarsson, D., Prunnila, M., Dobbie, A., Myronov, M., Morris, R. J. H., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2015, In : Solid-State Electronics. 103, p. 40-43Research output: Contribution to journal › Article › Scientific › peer-review