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2019

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons

Nanobolometer with ultralow noise equivalent power

Kokkoniemi, R., Govenius, J., Vesterinen, V., Lake, R. E., Gunyhó, A. M., Tan, K. Y., Simbierowicz, S., Grönberg, L., Lehtinen, J., Prunnila, M., Hassel, J., Lamminen, A., Saira, O. P. & Möttönen, M., 1 Dec 2019, In : Communications Physics. 2, 1, 124.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
bolometers
low noise
time constant
astronomy
counting

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon
membranes
Detectors
Membranes
Phonon scattering
2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Open Access
2 Citations (Scopus)
Niobium
Parametric amplifiers
parametric amplifiers
spacers
Amplification

Fabrication and Studies of Silicide-Based Superconducting Nanowires

Lehtinen, J., Mykkänen, E., Kemppinen, A., Prunnila, M. & Manninen, A., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. IEEE Institute of Electrical and Electronic Engineers , 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

nanowires
fabrication
nanofabrication
crossovers
slip

Methods for Electrical Cooling and Thermometry of a Suspended Silicon Chip

Kemppinen, A., Mykkänen, E., Lehtinen, J., Shchepetov, A., Timofeev, A., Gunnarsson, D., Grönberg, L., Manninen, A. & Prunnila, M., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. IEEE Institute of Electrical and Electronic Engineers , 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

coolers
tunnel junctions
conductive heat transfer
temperature measurement
heat flux
2 Citations (Scopus)

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleScientificpeer-review

platforms
Glass
glass
sensors
Sensors

Photoresponse of Graphene-Gated Graphene-GaSe Heterojunction Devices

Kim, W., Arpiainen, S., Xue, H., Soikkeli, M., Qi, M., Sun, Z., Lipsanen, H., Chaves, F. A., Jiménez, D. & Prunnila, M., 31 Jul 2018, In : ACS Applied Nano Materials. 1, 8, p. 3895–3902 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
gallium selenides
heterojunction devices
photometers
heterojunctions
graphene

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Porous silicon
electrochemical capacitors
Silicon
porous silicon
Electrodes

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. IEEE Institute of Electrical and Electronic Engineers , p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Thermal conductivity
Ointments
Hot Temperature
Atomic layer deposition
Thermal diffusivity

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Glass
Porous silicon
Sensors
Liquids
Silicon

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
bolometers
photometers
silicon
membranes
costs

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

detectors
silicon
thermocouples
figure of merit
thermopiles
4 Citations (Scopus)

Superconducting MoSi nanowires

Lehtinen, J. S., Kemppinen, A., Mykkänen, E., Prunnila, M. & Manninen, A. J., 1 Jan 2018, In : Superconductor Science and Technology. 31, 1, 015002.

Research output: Contribution to journalArticleScientificpeer-review

Nanowires
nanowires
wire
Wire
Rapid thermal annealing

Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

platforms
liquids
thermal conductivity
passivity
chips

Thermal characterization of thermal interface materials using the three-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). IEEE Institute of Electrical and Electronic Engineers , 8546370

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

thermal conductivity
fillers
2017

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers , p. 1-5 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Material Characterization
Fabrication
Chip
Thermodynamic properties
Thermal Properties

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Porous Silicon
Porous silicon
electrochemical capacitors
Capacitance
porous silicon
3 Citations (Scopus)

On-chip magnetic cooling of a nanoelectronic device

Bradley, D. I., Guénault, A. M., Gunnarsson, D., Haley, R. P., Holt, S., Jones, A. T., Pashkin, Y. A., Penttilä, J., Prance, J. R., Prunnila, M. & Roschier, L., 4 Apr 2017, In : Scientific Reports. 7, 45566.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
magnetic cooling
chips
demagnetization
electrons
electron energy

Porous Silicon Supercapacitors

Kestutis, G., Jouni, A. & Mika, P., 2017, Handbook of Porous Silicon: Live Reference - Constantly updated Springer.com/SpringerReference. Springer, p. 1-11

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Porous silicon
Capacitors
Electrodes
Graphite
Atomic layer deposition
3 Citations (Scopus)

Predictable quantum efficient detector based on n-type silicon photodiodes

Dönsberg, T., Manoocheri, F., Sildoja, M., Juntunen, M., Savin, H., Tuovinen, E., Ronkainen, H., Prunnila, M., Merimaa, M., Tang, C. K., Gran, J., Müller, I., Werner, L., Rougié, B., Pons, A., Smîd, M., Gál, P., Lolli, L., Brida, G., Rastello, M. L. & 1 others, Ikonen, E., 4 Oct 2017, In : Metrologia. 54, 6, p. 821-836 16 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Photodiodes
Detectors
Silicon
Substrates
Atomic layer deposition
2 Citations (Scopus)

Side-wall spacer passivated sub-μm Josephson junction fabrication process

Grönberg, L., Kiviranta, M., Vesterinen, V., Lehtinen, J., Simbierowicz, S., Luomahaara, J., Prunnila, M. & Hassel, J., 16 Nov 2017, In : Superconductor Science and Technology. 30, 12, 6 p., 125016.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Josephson junctions
spacers
Lithography
Niobium
Parametric amplifiers

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers , p. 1828-1831 4 p. 7994425

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

grasses
electrochemical capacitors
Silicon
microelectromechanical systems
MEMS
10 Citations (Scopus)

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Nanorods
Silicon
Composite materials
Capacitance
Electrodes

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.

Research output: Contribution to conferenceConference articleScientific

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Bolometer
Bolometers
bolometers
Silicon
Membrane
14 Citations (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

doped crystals
thermocouples
membranes
detectors
single crystals
4 Citations (Scopus)

Traceable Coulomb blockade thermometry

Hahtela, O., Mykkänen, E., Kemppinen, A., Meschke, M., Prunnila, M., Gunnarsson, D., Roschier, L., Penttilä, J. & Pekola, J., 1 Feb 2017, In : Metrologia. 54, 1, p. 69-76 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Coulomb blockade
Temperature
Digital voltmeters
Thermodynamics
Temperature scales
2016

Acoustic phonons in ultrathin free-standing silicon membranes

Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., Prunnila, M., Reparaz, J. S. & Ahopelto, J., 2016, Silicon Nanomembranes: Fundamental Science and Applications. Rogers, J. A. & Ahn, J-H. (eds.). Wiley, p. 305-326

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

phonons
membranes
acoustics
silicon
insulators

ALD enhanced on-chip supercapacitors

Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.

Research output: Contribution to conferenceConference articleScientific

47 Citations (Scopus)

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Titanium nitride
Porous silicon
Nanostructured materials
Silicon
Energy storage
4 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants

Energy harvesting and storage with Si-based micro and nano structures

Prunnila, M., 2016.

Research output: Contribution to conferenceConference articleScientific

31 Citations (Scopus)

Graphene biosensor programming with genetically engineered fusion protein monolayers

Soikkeli, M., Kurppa, K., Kainlauri, M., Arpiainen, S., Paananen, A., Gunnarsson, D., Joensuu, J. J., Laaksonen, P., Prunnila, M., Linder, M. B. & Ahopelto, J., 2016, In : ACS Applied Materials & Interfaces. 8, 12, p. 8257-8264

Research output: Contribution to journalArticleScientificpeer-review

Graphite
Biosensors
Graphene
Monolayers
Fusion reactions

Heat transport engineering in membranes and junctions for detectors and refrigerators

Prunnila, M., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
cycles
residual stress
wafers
electrical resistivity

High performance semiconductor-superconductor junction coolers

Prunnila, M., Gunnarsson, D., Timofeev, A., Prest, M., Whall, T., Parker, E., Myronov, M. & Leadley, D., 2016.

Research output: Contribution to conferenceConference AbstractScientific

7 Citations (Scopus)

Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Kiviranta, M., Brandel, O., Grönberg, L., Kuner, J., Linzen, S., Beev, N., May, T. & Prunnila, M., 2016, In : IEEE Transactions on Applied Superconductivity. 26, 6, 7438771.

Research output: Contribution to journalArticleScientificpeer-review

foundries
Foundries
Josephson junctions
layouts
Multilayers
14 Citations (Scopus)

Nanoelectronic primary thermometry below 4 mK

Bradley, D. I., George, R. E., Gunnarsson, D., Haley, R. P., Heikkinen, H., Pashkin, Y. A. A., Penttila, J., Prance, J. R., Prunnila, M., Roschier, L. & Sarsby, M., 2016, In : Nature Communications. 7, 10455.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Thermometry
Nanoelectronics
temperature measurement
Electrons
Coulomb blockade
27 Citations (Scopus)

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticleScientificpeer-review

Titanium nitride
Silicon
Nanorods
Coatings
Electrodes
76 Citations (Scopus)

Nanophononics: state of the art and perspectives

Volz, S., Ordonez-Miranda, J., Shchepetov, A., Prunnila, M., Ahopelto, J., Pezeril, T., Vaudel, G., Gusev, V., Ruello, P., Weig, E. M., Schubert, M., Hettich, M., Grossman, M., Dekorsy, T., Alzina, F., Graczykowski, B., Chavez-Angel, E., Reparaz, S. J., Wagner, M. R., Sotomayor-Torres, C. M. & 3 others, Xiong, S., Neogi, S. & Donadio, D., 2016, In : European Physical Journal B. 89, 15, 20 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Phonons
phonons
Electron transport properties
Nanoelectronics
thermoelectric materials
5 Citations (Scopus)

New evaluation of T - T2000 from 0.02 K to 1 K by independent thermodynamics methods

Engert, J., Kirste, A., Shibahara, A., Casey, A., Levitin, L., Saunders, J., Hahtela, O., Kemppinen, A., Mykkänen, E., Prunnila, M., Gunnarsson, D., Roschier, L., Meschke, M. & Pekola, J., 2016, In : International Journal of Thermophysics. 37, 125

Research output: Contribution to journalArticleScientificpeer-review

thermometers
thermodynamics
evaluation
temperature scales
budgets

Optical characterisation of a strained-silicon cold-electron bolometer at 160 GHz

Brien, T. L. R., Ade, P. A. R., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parked, E. H. C., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 28 Apr 2016, Millimeter Waves and THz Technology Workshop (UCMMT), 2015 8th UK, Europe, China. IEEE Institute of Electrical and Electronic Engineers , p. 1 - 4 7460630

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

bolometers
silicon
detectors
electrons
amplifiers
1 Citation (Scopus)

Optical response of strained- and unstrained-silicon cold-electron bolometers

Brien, T., Ade, P., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parker, E., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 2016, In : Journal of Low Temperature Physics. 184, 1-2, p. 231-237

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Bolometers
bolometers
Silicon
Electrons
silicon

Porous silicon based supercapacitors for integrated energy storages

Prunnila, M., Grönberg, L., Grigoras, K. & Ahopelto, J., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

3 Citations (Scopus)

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Porous silicon
Energy storage
Capacitors
Electrodes
Supercapacitor

Thermal and Electrical Properties of Strontium Titanate Membranes

Ahopelto, J., Shchepetov, A., Prunnila, M., Paterson, J., Tainoff, D. & Bourgeois, O., 2016.

Research output: Contribution to conferenceConference articleScientific

Thermal properties and applications of ultra-thin highly doped silicon membranes

Shchepetov, A., Varpula, A., Timofeev, A., Graczykowski, B., Sotomayor Torres, C., Ahopelto, J. & Prunnila, M., 2016.

Research output: Contribution to conferenceConference AbstractScientific

2015

Comparison of electron-phonon and hole-phonon energy loss rates in silicon

Richardson-Bullock, J. S., Prest, M. J., Shah, V. A., Gunnarsson, D., Prunnila, M., Dobbie, A., Myronov, M., Morris, R. J. H., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2015, In : Solid-State Electronics. 103, p. 40-43

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Energy dissipation
energy dissipation
Electrons
silicon