A 12 MHz micromechanical bulk acoustic mode oscillator

Tomi Mattila; Jyrki Kiihamäki; Tuomas Lamminmäki; Olli Jaakkola; Pekka Rantakari; Aarne Oja; Heikki Seppä; Hannu Kattelus; Ilkka Tittonen

doi:10.1016/S0924-4247(02)00204-2

A 12 MHz micromechanical bulk acoustic mode oscillator

Tomi Mattila (Corresponding Author), Jyrki Kiihamäki, Tuomas Lamminmäki, Olli Jaakkola, Pekka Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

Helsinki University of Technology

Research output: Contribution to journal › Article › Scientific › peer-review

132 Citations (Scopus)

Abstract

e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

Original language	English
Pages (from-to)	1-9
Journal	Sensors and Actuators A: Physical
Volume	101
Issue number	1-2
DOIs	https://doi.org/10.1016/S0924-4247(02)00204-2
Publication status	Published - 2002
MoE publication type	A1 Journal article-refereed

Keywords

micromechanical oscillators
micromechanical resonator
bulk acoustic wave
electromechanical coupling
oscillator noise

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10.1016/S0924-4247(02)00204-2

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title = "A 12 MHz micromechanical bulk acoustic mode oscillator",

abstract = "e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.",

keywords = "micromechanical oscillators, micromechanical resonator, bulk acoustic wave, electromechanical coupling, oscillator noise",

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T1 - A 12 MHz micromechanical bulk acoustic mode oscillator

AU - Mattila, Tomi

AU - Kiihamäki, Jyrki

AU - Lamminmäki, Tuomas

AU - Jaakkola, Olli

AU - Rantakari, Pekka

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Kattelus, Hannu

AU - Tittonen, Ilkka

PY - 2002

Y1 - 2002

N2 - e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

AB - e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

KW - micromechanical oscillators

KW - micromechanical resonator

KW - bulk acoustic wave

KW - electromechanical coupling

KW - oscillator noise

U2 - 10.1016/S0924-4247(02)00204-2

DO - 10.1016/S0924-4247(02)00204-2

M3 - Article

SN - 0924-4247

VL - 101

SP - 1

EP - 9

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-2

ER -

A 12 MHz micromechanical bulk acoustic mode oscillator

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Keywords

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