A 12 MHz micromechanical bulk acoustic mode oscillator

Tomi Mattila (Corresponding Author), Jyrki Kiihamäki, Tuomas Lamminmäki, Olli Jaakkola, Pekka Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

    Research output: Contribution to journalArticleScientificpeer-review

    132 Citations (Scopus)


    e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.
    Original languageEnglish
    Pages (from-to)1-9
    JournalSensors and Actuators A: Physical
    Issue number1-2
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed


    • micromechanical oscillators
    • micromechanical resonator
    • bulk acoustic wave
    • electromechanical coupling
    • oscillator noise


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