A 12 MHz micromechanical bulk acoustic mode oscillator

Tomi Mattila (Corresponding Author), Jyrki Kiihamäki, Tuomas Lamminmäki, Olli Jaakkola, Pekka Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

123 Citations (Scopus)

Abstract

e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.
Original languageEnglish
Pages (from-to)1-9
JournalSensors and Actuators A: Physical
Volume101
Issue number1-2
DOIs
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

Fingerprint

Silicon
Micromechanical resonators
oscillators
acoustics
Micromechanics
Phase noise
Bias voltage
Electrostatics
micromechanics
preamplifiers
silicon
low noise
Q factors
purity
resonators
prototypes
electrostatics
electric potential

Keywords

  • micromechanical oscillators
  • micromechanical resonator
  • bulk acoustic wave
  • electromechanical coupling
  • oscillator noise

Cite this

Mattila, Tomi ; Kiihamäki, Jyrki ; Lamminmäki, Tuomas ; Jaakkola, Olli ; Rantakari, Pekka ; Oja, Aarne ; Seppä, Heikki ; Kattelus, Hannu ; Tittonen, Ilkka. / A 12 MHz micromechanical bulk acoustic mode oscillator. In: Sensors and Actuators A: Physical. 2002 ; Vol. 101, No. 1-2. pp. 1-9.
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A 12 MHz micromechanical bulk acoustic mode oscillator. / Mattila, Tomi (Corresponding Author); Kiihamäki, Jyrki; Lamminmäki, Tuomas; Jaakkola, Olli; Rantakari, Pekka; Oja, Aarne; Seppä, Heikki; Kattelus, Hannu; Tittonen, Ilkka.

In: Sensors and Actuators A: Physical, Vol. 101, No. 1-2, 2002, p. 1-9.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - A 12 MHz micromechanical bulk acoustic mode oscillator

AU - Mattila, Tomi

AU - Kiihamäki, Jyrki

AU - Lamminmäki, Tuomas

AU - Jaakkola, Olli

AU - Rantakari, Pekka

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Kattelus, Hannu

AU - Tittonen, Ilkka

PY - 2002

Y1 - 2002

N2 - e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

AB - e demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

KW - micromechanical oscillators

KW - micromechanical resonator

KW - bulk acoustic wave

KW - electromechanical coupling

KW - oscillator noise

U2 - 10.1016/S0924-4247(02)00204-2

DO - 10.1016/S0924-4247(02)00204-2

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JO - Sensors and Actuators A: Physical

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