A 12 MHz micromechanical bulk acoustic mode oscillator
- Tomi Mattila*
- , Jyrki Kiihamäki
- , Tuomas Lamminmäki
- , Olli Jaakkola
- , Pekka Rantakari
- , Aarne Oja
- , Heikki Seppä
- , Hannu Kattelus
- , Ilkka Tittonen
*Corresponding author for this work
- Helsinki University of Technology
Research output: Contribution to journal › Article › Scientific › peer-review
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