A 12 MHz micromechanical bulk acoustic mode oscillator

Tomi Mattila (Corresponding Author), Jyrki Kiihamäki, Tuomas Lamminmäki, Olli Jaakkola, Pekka Rantakari, Aarne Oja, Heikki Seppä, Hannu Kattelus, Ilkka Tittonen

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