A 20-50 GHz RF MEMS single-stub impedance tuner

Tauno Vähä-Heikkilä, Jussi Varis, Jussi Tuovinen, G.M. Reibeiz

Research output: Contribution to journalArticleScientificpeer-review

33 Citations (Scopus)


A novel radio-frequency (RF) microelectromechanical system (MEMS) single-stub impedance tuner has been developed. The design is based on combining the loaded line technique with the single-stub topology to obtain wide impedance coverage with high |ΓMAX|. The tuner consist of ten switched MEMS capacitors producing 1024 (210) different impedances. The design has been optimized for noise parameter and load-pull measurements of active devices and shows excellent measured impedance coverage over the 20-50 GHz frequency range.
Original languageEnglish
Pages (from-to)205 - 207
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number4
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed


  • impedance tuner
  • load-pull
  • matching network
  • multiband
  • noise parameters
  • radio-frequency (RF) microelectromechanical system (MEMS)

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