A 20-50 GHz RF MEMS single-stub impedance tuner

Tauno Vähä-Heikkilä, Jussi Varis, Jussi Tuovinen, G.M. Reibeiz

    Research output: Contribution to journalArticleScientificpeer-review

    36 Citations (Scopus)


    A novel radio-frequency (RF) microelectromechanical system (MEMS) single-stub impedance tuner has been developed. The design is based on combining the loaded line technique with the single-stub topology to obtain wide impedance coverage with high |ΓMAX|. The tuner consist of ten switched MEMS capacitors producing 1024 (210) different impedances. The design has been optimized for noise parameter and load-pull measurements of active devices and shows excellent measured impedance coverage over the 20-50 GHz frequency range.
    Original languageEnglish
    Pages (from-to)205 - 207
    Number of pages3
    JournalIEEE Microwave and Wireless Components Letters
    Issue number4
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed


    • impedance tuner
    • load-pull
    • matching network
    • multiband
    • noise parameters
    • radio-frequency (RF) microelectromechanical system (MEMS)


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