Abstract
In this paper, we present a 20 GHz antenna integrated
MEMS based router made on a quartz substrate. Monolithic
integration is used in order to avoid inter-chip connects
that usually introduce additional losses at higher
frequencies. A Quasi-Yagi antenna element is chosen due
to its compact size, sufficient impedance bandwidth, and
end fire radiation patterns. We have also made several
MEMS switch designs that were fabricated on quartz and
silicon substrates.
Original language | English |
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Title of host publication | Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium |
Place of Publication | Brussels |
Number of pages | 2 |
Publication status | Published - 2009 |
MoE publication type | A4 Article in a conference publication |
Event | Smart Systems Integration 2009 - Brussels, Belgium Duration: 10 Mar 2009 → 11 Mar 2009 |
Conference
Conference | Smart Systems Integration 2009 |
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Country/Territory | Belgium |
City | Brussels |
Period | 10/03/09 → 11/03/09 |
Keywords
- RF MEMS
- Ka-band
- switching network
- Qasi-Yagi antenna