A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

Robert Malmqvist, Carl Samuelsson, Börje Carlegrim, Shi Cheng, Anders Rydberg, Ulrik Hanke, Bengt Holter, Håkon Sagberg, Pekka Rantakari, Tauno Vähä-Heikkilä, Jussi Varis

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.
    Original languageEnglish
    Title of host publicationSmart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium
    Place of PublicationBrussels
    Number of pages2
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication
    EventSmart Systems Integration 2009 - Brussels, Belgium
    Duration: 10 Mar 200911 Mar 2009


    ConferenceSmart Systems Integration 2009


    • RF MEMS
    • Ka-band
    • switching network
    • Qasi-Yagi antenna


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