A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

Robert Malmqvist; Carl Samuelsson; Börje Carlegrim; Shi Cheng; Anders Rydberg; Ulrik Hanke; Bengt Holter; Håkon Sagberg; Pekka Rantakari; Tauno Vähä-Heikkilä; Jussi Varis

A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

Robert Malmqvist, Carl Samuelsson, Börje Carlegrim, Shi Cheng, Anders Rydberg, Ulrik Hanke, Bengt Holter, Håkon Sagberg, Pekka Rantakari, Tauno Vähä-Heikkilä, Jussi Varis

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.

Original language	English
Title of host publication	Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium
Place of Publication	Brussels
Number of pages	2
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication
Event	Smart Systems Integration 2009 - Brussels, Belgium Duration: 10 Mar 2009 → 11 Mar 2009

Conference

Conference	Smart Systems Integration 2009
Country/Territory	Belgium
City	Brussels
Period	10/03/09 → 11/03/09

Keywords

RF MEMS
Ka-band
switching network
Qasi-Yagi antenna

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https://publications.vtt.fi/julkaisut/muut/2009/A20GHz_Antenna_Integrated_RF_MEMS_based_Router.pdf

Cite this

Malmqvist, R., Samuelsson, C., Carlegrim, B., Cheng, S., Rydberg, A., Hanke, U., Holter, B., Sagberg, H., Rantakari, P., Vähä-Heikkilä, T., & Varis, J. (2009). A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. In Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium https://publications.vtt.fi/julkaisut/muut/2009/A20GHz_Antenna_Integrated_RF_MEMS_based_Router.pdf

@inproceedings{377b6d6c264148b98f4bf76a280f7c83,

title = "A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz",

abstract = "In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.",

keywords = "RF MEMS, Ka-band, switching network, Qasi-Yagi antenna",

author = "Robert Malmqvist and Carl Samuelsson and B{\"o}rje Carlegrim and Shi Cheng and Anders Rydberg and Ulrik Hanke and Bengt Holter and H{\aa}kon Sagberg and Pekka Rantakari and Tauno V{\"a}h{\"a}-Heikkil{\"a} and Jussi Varis",

year = "2009",

language = "English",

isbn = "978-3-89838-616-6",

booktitle = "Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium",

note = "Smart Systems Integration 2009 ; Conference date: 10-03-2009 Through 11-03-2009",

}

Malmqvist, R, Samuelsson, C, Carlegrim, B, Cheng, S, Rydberg, A, Hanke, U, Holter, B, Sagberg, H, Rantakari, P , Vähä-Heikkilä, T & Varis, J 2009, A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. in Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium. Brussels, Smart Systems Integration 2009, Brussels, Belgium, 10/03/09. <https://publications.vtt.fi/julkaisut/muut/2009/A20GHz_Antenna_Integrated_RF_MEMS_based_Router.pdf>

TY - GEN

T1 - A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

AU - Malmqvist, Robert

AU - Samuelsson, Carl

AU - Carlegrim, Börje

AU - Cheng, Shi

AU - Rydberg, Anders

AU - Hanke, Ulrik

AU - Holter, Bengt

AU - Sagberg, Håkon

AU - Rantakari, Pekka

AU - Vähä-Heikkilä, Tauno

AU - Varis, Jussi

PY - 2009

Y1 - 2009

N2 - In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.

AB - In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.

KW - RF MEMS

KW - Ka-band

KW - switching network

KW - Qasi-Yagi antenna

M3 - Conference article in proceedings

SN - 978-3-89838-616-6

BT - Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium

CY - Brussels

T2 - Smart Systems Integration 2009

Y2 - 10 March 2009 through 11 March 2009

ER -

A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

Abstract

Conference

Keywords

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