A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

R. Malmqvist, S. Cheng, Pekka Rantakari, C. Samuelsson, B. Carlegrim, Tauno Vähä-Heikkilä, H. Sagberg, B. Holter, U. Hanke, A. Rydberg, Jussi Varis

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.
Original languageEnglish
Title of host publicationSmart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium
Place of PublicationBrussels
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
EventSmart Systems Integration 2009 - Brussels, Belgium
Duration: 10 Mar 200911 Mar 2009

Conference

ConferenceSmart Systems Integration 2009
CountryBelgium
CityBrussels
Period10/03/0911/03/09

Keywords

  • RF MEMS
  • Ka-band
  • switching network
  • Qasi-Yagi antenna

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    Malmqvist, R., Cheng, S., Rantakari, P., Samuelsson, C., Carlegrim, B., Vähä-Heikkilä, T., Sagberg, H., Holter, B., Hanke, U., Rydberg, A., & Varis, J. (2009). A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. In Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium http://www.vtt.fi/inf/julkaisut/muut/2009/A20GHz_Antenna_Integrated_RF_MEMS_based_Router.pdf