A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

R. Malmqvist, S. Cheng, Pekka Rantakari, C. Samuelsson, B. Carlegrim, Tauno Vähä-Heikkilä, H. Sagberg, B. Holter, U. Hanke, A. Rydberg, Jussi Varis

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.
Original languageEnglish
Title of host publicationSmart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium
Place of PublicationBrussels
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
EventSmart Systems Integration 2009 - Brussels, Belgium
Duration: 10 Mar 200911 Mar 2009

Conference

ConferenceSmart Systems Integration 2009
CountryBelgium
CityBrussels
Period10/03/0911/03/09

Fingerprint

Switching networks
Routers
MEMS
Quartz
Antennas
Substrates
Fires
Switches
Bandwidth
Silicon

Keywords

  • RF MEMS
  • Ka-band
  • switching network
  • Qasi-Yagi antenna

Cite this

Malmqvist, R., Cheng, S., Rantakari, P., Samuelsson, C., Carlegrim, B., Vähä-Heikkilä, T., ... Varis, J. (2009). A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. In Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium Brussels.
Malmqvist, R. ; Cheng, S. ; Rantakari, Pekka ; Samuelsson, C. ; Carlegrim, B. ; Vähä-Heikkilä, Tauno ; Sagberg, H. ; Holter, B. ; Hanke, U. ; Rydberg, A. ; Varis, Jussi. / A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium. Brussels, 2009.
@inproceedings{377b6d6c264148b98f4bf76a280f7c83,
title = "A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz",
abstract = "In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.",
keywords = "RF MEMS, Ka-band, switching network, Qasi-Yagi antenna",
author = "R. Malmqvist and S. Cheng and Pekka Rantakari and C. Samuelsson and B. Carlegrim and Tauno V{\"a}h{\"a}-Heikkil{\"a} and H. Sagberg and B. Holter and U. Hanke and A. Rydberg and Jussi Varis",
year = "2009",
language = "English",
isbn = "978-3-89838-616-6",
booktitle = "Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium",

}

Malmqvist, R, Cheng, S, Rantakari, P, Samuelsson, C, Carlegrim, B, Vähä-Heikkilä, T, Sagberg, H, Holter, B, Hanke, U, Rydberg, A & Varis, J 2009, A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. in Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium. Brussels, Smart Systems Integration 2009, Brussels, Belgium, 10/03/09.

A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. / Malmqvist, R.; Cheng, S.; Rantakari, Pekka; Samuelsson, C.; Carlegrim, B.; Vähä-Heikkilä, Tauno; Sagberg, H.; Holter, B.; Hanke, U.; Rydberg, A.; Varis, Jussi.

Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium. Brussels, 2009.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

AU - Malmqvist, R.

AU - Cheng, S.

AU - Rantakari, Pekka

AU - Samuelsson, C.

AU - Carlegrim, B.

AU - Vähä-Heikkilä, Tauno

AU - Sagberg, H.

AU - Holter, B.

AU - Hanke, U.

AU - Rydberg, A.

AU - Varis, Jussi

PY - 2009

Y1 - 2009

N2 - In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.

AB - In this paper, we present a 20 GHz antenna integrated MEMS based router made on a quartz substrate. Monolithic integration is used in order to avoid inter-chip connects that usually introduce additional losses at higher frequencies. A Quasi-Yagi antenna element is chosen due to its compact size, sufficient impedance bandwidth, and end fire radiation patterns. We have also made several MEMS switch designs that were fabricated on quartz and silicon substrates.

KW - RF MEMS

KW - Ka-band

KW - switching network

KW - Qasi-Yagi antenna

M3 - Conference article in proceedings

SN - 978-3-89838-616-6

BT - Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium

CY - Brussels

ER -

Malmqvist R, Cheng S, Rantakari P, Samuelsson C, Carlegrim B, Vähä-Heikkilä T et al. A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz. In Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium. Brussels. 2009