@inproceedings{a9f179e0f82e4ca098eb0aead6af7f19,
title = "A 500 kHz micromechanical oscillator based on cantilever resonator",
author = "Miikka Ylimaula and Markku {\AA}berg",
year = "2001",
language = "English",
isbn = "951-22-5582-0",
volume = "3",
series = "Helsinki University of Technology: Electronic Circuit Design Laboratory. Publications",
publisher = "Helsinki University of Technology",
pages = "369--372",
editor = "Veikko Porra",
booktitle = "Circuit paradigm in the 21st century",
address = "Finland",
note = "15th European Conference on Circuit Theory and Design, ECCTD 2001, ECCTD '01 ; Conference date: 28-08-2001 Through 31-08-2001",
}