A 6-24 GHz tunable MEMS impedance matching network

Tauno Vähä-Heikkilä; J. Rizk; Jussi Varis; Jussi Tuovinen

A 6-24 GHz tunable MEMS impedance matching network

Tauno Vähä-Heikkilä, J. Rizk, Jussi Varis, Jussi Tuovinen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

A novel wideband (6-24 GHz) MEMS impedance matching network is presented in this paper. The tunable triple-stub matching network is based on capacitive MEMS switches with metal-air-metal (MAM) fixed capacitors. It consists of 11 or 13 capacitive MEMS switches producing 2048 or 8192 different reflection coefficients. Measurement results are presented at the frequency band of 5.4-23.4 GHz.

Original language	English
Title of host publication	Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications
Subtitle of host publication	Circuits, systems, and measurement techniques
Editors	Juha A. Mallat, A. Räisänen, J. Tuovinen
Publisher	European Space Agency (ESA)
Pages	491-496
Publication status	Published - 2003
MoE publication type	A4 Article in a conference publication
Event	3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems and measurement techniques - MilliLab, Espoo, Finland Duration: 21 May 2003 → 23 May 2003

Publication series

Series	ESA Conference Proceedings
Volume	212
ISSN	1022-6656

Conference

Conference	3rd ESA Workshop On Millimetre Wave Technology and Applications
Country/Territory	Finland
City	Espoo
Period	21/05/03 → 23/05/03

Keywords

RF MEMS
matching network
impedance tuner

Cite this

Vähä-Heikkilä, T., Rizk, J., Varis, J., & Tuovinen, J. (2003). A 6-24 GHz tunable MEMS impedance matching network. In J. A. Mallat, A. Räisänen, & J. Tuovinen (Eds.), Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques (pp. 491-496). European Space Agency (ESA). ESA Conference Proceedings Vol. 212

Vähä-Heikkilä, Tauno ; Rizk, J. ; Varis, Jussi et al. / A 6-24 GHz tunable MEMS impedance matching network. Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques. editor / Juha A. Mallat ; A. Räisänen ; J. Tuovinen. European Space Agency (ESA), 2003. pp. 491-496 (ESA Conference Proceedings, Vol. 212).

@inproceedings{abbecb346c954581a02cdb4b2a23c426,

title = "A 6-24 GHz tunable MEMS impedance matching network",

abstract = "A novel wideband (6-24 GHz) MEMS impedance matching network is presented in this paper. The tunable triple-stub matching network is based on capacitive MEMS switches with metal-air-metal (MAM) fixed capacitors. It consists of 11 or 13 capacitive MEMS switches producing 2048 or 8192 different reflection coefficients. Measurement results are presented at the frequency band of 5.4-23.4 GHz.",

keywords = "RF MEMS, matching network, impedance tuner",

author = "Tauno V{\"a}h{\"a}-Heikkil{\"a} and J. Rizk and Jussi Varis and Jussi Tuovinen",

year = "2003",

language = "English",

series = "ESA Conference Proceedings",

publisher = "European Space Agency (ESA)",

pages = "491--496",

editor = "Mallat, {Juha A.} and A. R{\"a}is{\"a}nen and J. Tuovinen",

booktitle = "Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications",

address = "France",

note = "3rd ESA Workshop On Millimetre Wave Technology and Applications : Circuits, systems and measurement techniques ; Conference date: 21-05-2003 Through 23-05-2003",

}

Vähä-Heikkilä, T, Rizk, J, Varis, J & Tuovinen, J 2003, A 6-24 GHz tunable MEMS impedance matching network. in JA Mallat, A Räisänen & J Tuovinen (eds), Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques. European Space Agency (ESA), ESA Conference Proceedings, vol. 212, pp. 491-496, 3rd ESA Workshop On Millimetre Wave Technology and Applications, Espoo, Finland, 21/05/03.

A 6-24 GHz tunable MEMS impedance matching network. / Vähä-Heikkilä, Tauno; Rizk, J.; Varis, Jussi et al.

Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques. ed. / Juha A. Mallat; A. Räisänen; J. Tuovinen. European Space Agency (ESA), 2003. p. 491-496 (ESA Conference Proceedings, Vol. 212).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - A 6-24 GHz tunable MEMS impedance matching network

AU - Vähä-Heikkilä, Tauno

AU - Rizk, J.

AU - Varis, Jussi

AU - Tuovinen, Jussi

PY - 2003

Y1 - 2003

N2 - A novel wideband (6-24 GHz) MEMS impedance matching network is presented in this paper. The tunable triple-stub matching network is based on capacitive MEMS switches with metal-air-metal (MAM) fixed capacitors. It consists of 11 or 13 capacitive MEMS switches producing 2048 or 8192 different reflection coefficients. Measurement results are presented at the frequency band of 5.4-23.4 GHz.

AB - A novel wideband (6-24 GHz) MEMS impedance matching network is presented in this paper. The tunable triple-stub matching network is based on capacitive MEMS switches with metal-air-metal (MAM) fixed capacitors. It consists of 11 or 13 capacitive MEMS switches producing 2048 or 8192 different reflection coefficients. Measurement results are presented at the frequency band of 5.4-23.4 GHz.

KW - RF MEMS

KW - matching network

KW - impedance tuner

M3 - Conference article in proceedings

T3 - ESA Conference Proceedings

SP - 491

EP - 496

BT - Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications

A2 - Mallat, Juha A.

A2 - Räisänen, A.

A2 - Tuovinen, J.

PB - European Space Agency (ESA)

T2 - 3rd ESA Workshop On Millimetre Wave Technology and Applications

Y2 - 21 May 2003 through 23 May 2003

ER -

A 6-24 GHz tunable MEMS impedance matching network

Abstract

Publication series

Conference

Keywords

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