A 6-24 GHz tunable MEMS impedance matching network

Tauno Vähä-Heikkilä, J. Rizk, Jussi Varis, Jussi Tuovinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A novel wideband (6-24 GHz) MEMS impedance matching network is presented in this paper. The tunable triple-stub matching network is based on capacitive MEMS switches with metal-air-metal (MAM) fixed capacitors. It consists of 11 or 13 capacitive MEMS switches producing 2048 or 8192 different reflection coefficients. Measurement results are presented at the frequency band of 5.4-23.4 GHz.
Original languageEnglish
Title of host publicationProceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications
Subtitle of host publicationCircuits, systems, and measurement techniques
EditorsJuha A. Mallat, A. Räisänen, J. Tuovinen
PublisherEuropean Space Agency ESA
Pages491-496
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication
Event3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems and measurement techniques - MilliLab, Espoo, Finland
Duration: 21 May 200323 May 2003

Publication series

SeriesESA Conference Proceedings
Volume212
ISSN1022-6656

Conference

Conference3rd ESA Workshop On Millimetre Wave Technology and Applications
CountryFinland
CityEspoo
Period21/05/0323/05/03

Keywords

  • RF MEMS
  • matching network
  • impedance tuner

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    Vähä-Heikkilä, T., Rizk, J., Varis, J., & Tuovinen, J. (2003). A 6-24 GHz tunable MEMS impedance matching network. In J. A. Mallat, A. Räisänen, & J. Tuovinen (Eds.), Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques (pp. 491-496). European Space Agency ESA. ESA Conference Proceedings, Vol.. 212