A batch process for depositing amorphous metallic Mo-Si-N films

Hannu Kattelus, Hannele Heikkinen, Ari Häärä, Mari Ylönen, Antti Tolkki

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationConference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
    Subtitle of host publicationEspoo, FI , 10 - 12 June 2002
    Place of PublicationLondon, UK
    PublisherIOM Communications Ltd.
    Pages125-128
    ISBN (Print)1-86125-155-6
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication
    Event4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland
    Duration: 10 Jun 200212 Jun 2002

    Conference

    Conference4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
    CountryFinland
    CityEspoo
    Period10/06/0212/06/02

    Keywords

    • Amorphous metals
    • Mo-Si-N
    • metallic micromachining

    Cite this

    Kattelus, H., Heikkinen, H., Häärä, A., Ylönen, M., & Tolkki, A. (2002). A batch process for depositing amorphous metallic Mo-Si-N films. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002 (pp. 125-128). London, UK: IOM Communications Ltd..
    Kattelus, Hannu ; Heikkinen, Hannele ; Häärä, Ari ; Ylönen, Mari ; Tolkki, Antti. / A batch process for depositing amorphous metallic Mo-Si-N films. Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London, UK : IOM Communications Ltd., 2002. pp. 125-128
    @inproceedings{c34008c1d5644734babfb9b8d38e6906,
    title = "A batch process for depositing amorphous metallic Mo-Si-N films",
    keywords = "Amorphous metals, Mo-Si-N, metallic micromachining",
    author = "Hannu Kattelus and Hannele Heikkinen and Ari H{\"a}{\"a}r{\"a} and Mari Yl{\"o}nen and Antti Tolkki",
    year = "2002",
    language = "English",
    isbn = "1-86125-155-6",
    pages = "125--128",
    booktitle = "Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002",
    publisher = "IOM Communications Ltd.",
    address = "United Kingdom",

    }

    Kattelus, H, Heikkinen, H, Häärä, A, Ylönen, M & Tolkki, A 2002, A batch process for depositing amorphous metallic Mo-Si-N films. in Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. IOM Communications Ltd., London, UK, pp. 125-128, 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002, Espoo, Finland, 10/06/02.

    A batch process for depositing amorphous metallic Mo-Si-N films. / Kattelus, Hannu; Heikkinen, Hannele; Häärä, Ari; Ylönen, Mari; Tolkki, Antti.

    Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London, UK : IOM Communications Ltd., 2002. p. 125-128.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - A batch process for depositing amorphous metallic Mo-Si-N films

    AU - Kattelus, Hannu

    AU - Heikkinen, Hannele

    AU - Häärä, Ari

    AU - Ylönen, Mari

    AU - Tolkki, Antti

    PY - 2002

    Y1 - 2002

    KW - Amorphous metals

    KW - Mo-Si-N

    KW - metallic micromachining

    M3 - Conference article in proceedings

    SN - 1-86125-155-6

    SP - 125

    EP - 128

    BT - Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

    PB - IOM Communications Ltd.

    CY - London, UK

    ER -

    Kattelus H, Heikkinen H, Häärä A, Ylönen M, Tolkki A. A batch process for depositing amorphous metallic Mo-Si-N films. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London, UK: IOM Communications Ltd. 2002. p. 125-128