A batch process for depositing amorphous metallic Mo-Si-N films

Hannu Kattelus, Hannele Heikkinen, Ari Häärä, Mari Ylönen, Antti Tolkki

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationConference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
    Subtitle of host publicationEspoo, FI , 10 - 12 June 2002
    Place of PublicationLondon, UK
    PublisherIOM Communications Ltd.
    Pages125-128
    ISBN (Print)1-86125-155-6
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication
    Event4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland
    Duration: 10 Jun 200212 Jun 2002

    Conference

    Conference4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
    CountryFinland
    CityEspoo
    Period10/06/0212/06/02

    Keywords

    • Amorphous metals
    • Mo-Si-N
    • metallic micromachining

    Cite this

    Kattelus, H., Heikkinen, H., Häärä, A., Ylönen, M., & Tolkki, A. (2002). A batch process for depositing amorphous metallic Mo-Si-N films. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002 (pp. 125-128). IOM Communications Ltd..