A batch process for depositing amorphous metallic Mo-Si-N films

Hannu Kattelus; Hannele Heikkinen; Ari Häärä; Mari Ylönen; Antti Tolkki

A batch process for depositing amorphous metallic Mo-Si-N films

Hannu Kattelus
, Hannele Heikkinen
, Ari Häärä
, Mari Ylönen
, Antti Tolkki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Subtitle of host publication	Espoo, FI , 10 - 12 June 2002
Place of Publication	London, UK
Publisher	IOM Communications Ltd.
Pages	125-128
ISBN (Print)	1-86125-155-6
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication
Event	4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland Duration: 10 Jun 2002 → 12 Jun 2002

Conference

Conference	4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Country/Territory	Finland
City	Espoo
Period	10/06/02 → 12/06/02

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Amorphous metals
Mo-Si-N
metallic micromachining

Cite this

@inproceedings{c34008c1d5644734babfb9b8d38e6906,

title = "A batch process for depositing amorphous metallic Mo-Si-N films",

keywords = "Amorphous metals, Mo-Si-N, metallic micromachining",

author = "Hannu Kattelus and Hannele Heikkinen and Ari H{\"a}{\"a}r{\"a} and Mari Yl{\"o}nen and Antti Tolkki",

year = "2002",

language = "English",

isbn = "1-86125-155-6",

pages = "125--128",

booktitle = "Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002",

publisher = "IOM Communications Ltd.",

address = "United Kingdom",

note = "4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 ; Conference date: 10-06-2002 Through 12-06-2002",

}

Kattelus, H, Heikkinen, H, Häärä, A, Ylönen, M & Tolkki, A 2002, A batch process for depositing amorphous metallic Mo-Si-N films. in Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. IOM Communications Ltd., London, UK, pp. 125-128, 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002, Espoo, Finland, 10/06/02.

A batch process for depositing amorphous metallic Mo-Si-N films. / Kattelus, Hannu; Heikkinen, Hannele; Häärä, Ari et al.
Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London, UK: IOM Communications Ltd., 2002. p. 125-128.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - A batch process for depositing amorphous metallic Mo-Si-N films

AU - Kattelus, Hannu

AU - Heikkinen, Hannele

AU - Häärä, Ari

AU - Ylönen, Mari

AU - Tolkki, Antti

PY - 2002

Y1 - 2002

KW - Amorphous metals

KW - Mo-Si-N

KW - metallic micromachining

M3 - Conference article in proceedings

SN - 1-86125-155-6

SP - 125

EP - 128

BT - Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

PB - IOM Communications Ltd.

CY - London, UK

T2 - 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

Y2 - 10 June 2002 through 12 June 2002

ER -