A calibration-free method to assess the quality of standards for THz on-wafer measurements

Maxim Masyukov, Irina Nefedova, Aleksi Tamminen, Kimmo Silvonen, Juan Cabello-Sanchez, Mikko Varonen, Mikko Kantanen, Helena Rodilla, Jan Stake, Zachary Taylor

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

Original languageEnglish
Title of host publicationIRMMW-THz 2022
Subtitle of host publication47th International Conference on Infrared, Millimeter and Terahertz Waves
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages2
ISBN (Electronic)978-1-72819-427-1
ISBN (Print)978-1-7281-9428-8
DOIs
Publication statusPublished - 26 Sep 2022
MoE publication typeA4 Article in a conference publication
Event47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022 - Delft, Netherlands
Duration: 28 Aug 20222 Sep 2022

Publication series

SeriesInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume2022-August
ISSN2162-2027

Conference

Conference47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022
Country/TerritoryNetherlands
CityDelft
Period28/08/222/09/22

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