A calibration-free method to assess the quality of standards for THz on-wafer measurements

Maxim Masyukov; Irina Nefedova; Aleksi Tamminen; Kimmo Silvonen; Juan Cabello-Sanchez; Mikko Varonen; Mikko Kantanen; Helena Rodilla; Jan Stake; Zachary Taylor

doi:10.1109/IRMMW-THz50927.2022.9895704

A calibration-free method to assess the quality of standards for THz on-wafer measurements

Maxim Masyukov
, Irina Nefedova
, Aleksi Tamminen
, Kimmo Silvonen
, Juan Cabello-Sanchez
, Mikko Varonen
, Mikko Kantanen
, Helena Rodilla
, Jan Stake
, Zachary Taylor

Aalto University
Chalmers University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

Original language	English
Title of host publication	IRMMW-THz 2022
Subtitle of host publication	47th International Conference on Infrared, Millimeter and Terahertz Waves
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	2
ISBN (Electronic)	978-1-72819-427-1
ISBN (Print)	978-1-7281-9428-8
DOIs	https://doi.org/10.1109/IRMMW-THz50927.2022.9895704
Publication status	Published - 26 Sept 2022
MoE publication type	A4 Article in a conference publication
Event	47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022 - Delft, Netherlands Duration: 28 Aug 2022 → 2 Sept 2022

Publication series

Series	International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume	2022-August
ISSN	2162-2027

Conference

Conference	47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022
Country/Territory	Netherlands
City	Delft
Period	28/08/22 → 2/09/22

Funding

M.M. acknowledges the IEEE MTT Society for the financial support of this study, as well as Ms. Divya Jayasankar and Mr. Yin Zeng for their help and stimulating discussions.

Access to Document

10.1109/IRMMW-THz50927.2022.9895704

Cite this

Masyukov, M., Nefedova, I., Tamminen, A., Silvonen, K., Cabello-Sanchez, J., Varonen, M., Kantanen, M., Rodilla, H., Stake, J., & Taylor, Z. (2022). A calibration-free method to assess the quality of standards for THz on-wafer measurements. In IRMMW-THz 2022: 47th International Conference on Infrared, Millimeter and Terahertz Waves IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/IRMMW-THz50927.2022.9895704

Masyukov, Maxim ; Nefedova, Irina ; Tamminen, Aleksi et al. / A calibration-free method to assess the quality of standards for THz on-wafer measurements. IRMMW-THz 2022: 47th International Conference on Infrared, Millimeter and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 2022. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2022-August).

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title = "A calibration-free method to assess the quality of standards for THz on-wafer measurements",

abstract = "A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.",

author = "Maxim Masyukov and Irina Nefedova and Aleksi Tamminen and Kimmo Silvonen and Juan Cabello-Sanchez and Mikko Varonen and Mikko Kantanen and Helena Rodilla and Jan Stake and Zachary Taylor",

note = "Funding Information: M.M. acknowledges the IEEE MTT Society for the financial support of this study, as well as Ms. Divya Jayasankar and Mr. Yin Zeng for their help and stimulating discussions. ; 47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022 ; Conference date: 28-08-2022 Through 02-09-2022",

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doi = "10.1109/IRMMW-THz50927.2022.9895704",

language = "English",

isbn = "978-1-7281-9428-8",

series = "International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz",

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Masyukov, M, Nefedova, I, Tamminen, A, Silvonen, K, Cabello-Sanchez, J, Varonen, M , Kantanen, M, Rodilla, H, Stake, J & Taylor, Z 2022, A calibration-free method to assess the quality of standards for THz on-wafer measurements. in IRMMW-THz 2022: 47th International Conference on Infrared, Millimeter and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2022-August, 47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022, Delft, Netherlands, 28/08/22. https://doi.org/10.1109/IRMMW-THz50927.2022.9895704

A calibration-free method to assess the quality of standards for THz on-wafer measurements. / Masyukov, Maxim; Nefedova, Irina; Tamminen, Aleksi et al.
IRMMW-THz 2022: 47th International Conference on Infrared, Millimeter and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 2022. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2022-August).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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AU - Masyukov, Maxim

AU - Nefedova, Irina

AU - Tamminen, Aleksi

AU - Silvonen, Kimmo

AU - Cabello-Sanchez, Juan

AU - Varonen, Mikko

AU - Kantanen, Mikko

AU - Rodilla, Helena

AU - Stake, Jan

AU - Taylor, Zachary

N1 - Funding Information: M.M. acknowledges the IEEE MTT Society for the financial support of this study, as well as Ms. Divya Jayasankar and Mr. Yin Zeng for their help and stimulating discussions.

PY - 2022/9/26

Y1 - 2022/9/26

N2 - A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

AB - A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

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M3 - Conference article in proceedings

AN - SCOPUS:85139829537

SN - 978-1-7281-9428-8

T3 - International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz

BT - IRMMW-THz 2022

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022

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Masyukov M, Nefedova I, Tamminen A, Silvonen K, Cabello-Sanchez J, Varonen M et al. A calibration-free method to assess the quality of standards for THz on-wafer measurements. In IRMMW-THz 2022: 47th International Conference on Infrared, Millimeter and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers. 2022. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2022-August). doi: 10.1109/IRMMW-THz50927.2022.9895704

A calibration-free method to assess the quality of standards for THz on-wafer measurements

Abstract

Publication series

Conference

Funding

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