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A comparative study of non-destructive techniques for estimating dislocation densities in heteroepitaxial AlN layers

  • Marek Patočka*
  • , Nikhilendu Tiwary
  • , Sami Suihkonen
  • , Mervi Paulasto-Kröckel
    • *Corresponding author for this work
  • Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

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